Ponnekanti; Hari K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Ponnekanti; Hari K..The latest application filed is for "loadlock integrated bevel etcher system".
Company Profile
9.28.37
- Ponnekanti; Hari K. - San Jose CA
- Ponnekanti; Hari K - San Jose CA
- Ponnekanti; Hari K. - Santa Clara CA
Patent Activity
| Patent | Date |
|---|---|
| Loadlock integrated bevel etcher system Grant 11,031,262 - Basu , et al. June 8, 2 | 2021-06-08 |
| Rotary plasma electrical feedthrough Grant 10,854,432 - Ponnekanti December 1, 2 | 2020-12-01 |
| Semiconductor process equipment Grant 10,734,265 - Janakiraman , et al. | 2020-08-04 |
| Loadlock Integrated Bevel Etcher System App 20200234982 - BASU; Saptarshi ; et al. | 2020-07-23 |
| Loadlock integrated bevel etcher system Grant 10,636,684 - Basu , et al. | 2020-04-28 |
| Single oxide metal deposition chamber Grant 10,597,785 - Subramani , et al. | 2020-03-24 |
| Sputtering showerhead Grant 10,577,689 - Subramani , et al. | 2020-03-03 |
| Hyrodgen Partial Pressure Control In A Vacuum Process Chamber App 20200032392 - L'HEUREUX; James ; et al. | 2020-01-30 |
| Wafer swapper Grant 10,518,418 - Du Bois , et al. Dec | 2019-12-31 |
| Loadlock Integrated Bevel Etcher System App 20190371630 - Basu; Saptarshi ; et al. | 2019-12-05 |
| Semiconductor process equipment Grant 10,483,141 - Janakiraman , et al. Nov | 2019-11-19 |
| Hydrogen partial pressure control in a vacuum process chamber Grant 10,435,787 - L'Heureux , et al. O | 2019-10-08 |
| Loadlock integrated bevel etcher system Grant 10,403,515 - Basu , et al. Sep | 2019-09-03 |
| Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system Grant 10,403,535 - Ye , et al. Sep | 2019-09-03 |
| On-board metrology (OBM) design and implication in process tool Grant 10,388,549 - Paul , et al. A | 2019-08-20 |
| Processing system containing an isolation region separating a deposition chamber from a treatment chamber Grant 10,236,197 - Janakiraman , et al. | 2019-03-19 |
| Semiconductor Process Equipment App 20180308735 - JANAKIRAMAN; Karthik ; et al. | 2018-10-25 |
| Semiconductor process equipment Grant 10,056,279 - Janakiraman , et al. August 21, 2 | 2018-08-21 |
| Hydrogen Partial Pressure Control In A Vacuum Process Chamber App 20180135171 - L'HEUREUX; James ; et al. | 2018-05-17 |
| Wafer Swapper App 20180117771 - DU BOIS; Dale R. ; et al. | 2018-05-03 |
| Sputtering Showerhead App 20180087155 - SUBRAMANI; Anantha K. ; et al. | 2018-03-29 |
| Semiconductor Process Equipment App 20180076075 - JANAKIRAMAN; Karthik ; et al. | 2018-03-15 |
| Single Oxide Metal Deposition Chamber App 20180073150 - SUBRAMANI; Anantha K. ; et al. | 2018-03-15 |
| Wafer swapper Grant 9,889,567 - Du Bois , et al. February 13, 2 | 2018-02-13 |
| Rotary Plasma Electrical Feedthrough App 20170352558 - PONNEKANTI; Hari K. | 2017-12-07 |
| Quad Chamber And Platform Having Multiple Quad Chambers App 20170194174 - JANAKIRAMAN; Karthik ; et al. | 2017-07-06 |
| On-board Metrology (obm) Design And Implication In Process Tool App 20170148654 - PAUL; Khokan C. ; et al. | 2017-05-25 |
| Loadlock Integrated Bevel Etcher System App 20170092511 - BASU; Saptarshi ; et al. | 2017-03-30 |
| Wafer Swapper App 20160314995 - DU BOIS; Dale R. ; et al. | 2016-10-27 |
| Semiconductor Process Equipment App 20160218029 - JANAKIRAMAN; Karthik ; et al. | 2016-07-28 |
| Processing System Containing An Isolation Region separating a Deposition chamber from a treatment chamber App 20160133489 - JANAKIRAMAN; Karthik ; et al. | 2016-05-12 |
| Method And Apparatus Of Processing Wafers With Compressive Or Tensile Stress At Elevated Temperatures In A Plasma Enhanced Chemical Vapor Deposition System App 20160049323 - YE; Zheng John ; et al. | 2016-02-18 |
| Methods of forming solar cells and solar cell modules Grant 9,040,409 - Kumar , et al. May 26, 2 | 2015-05-26 |
| Methods of manufacturing solar cell devices Grant 8,859,324 - Stewart , et al. October 14, 2 | 2014-10-14 |
| Methods Of Forming Solar Cells And Solar Cell Modules App 20140273338 - KUMAR; Prabhat ; et al. | 2014-09-18 |
| In Situ Silicon Surface Pre-clean For High Performance Passivation Of Silicon Solar Cells App 20140213016 - SHENG; Shuran ; et al. | 2014-07-31 |
| Static Deposition Profile Modulation For Linear Plasma Source App 20130273262 - Vellaikal; Manoj ; et al. | 2013-10-17 |
| Methods Of Manufacturing Solar Cell Devices App 20130183796 - Stewart; Michael P. ; et al. | 2013-07-18 |
| Advanced Platform For Passivating Crystalline Silicon Solar Cells App 20130171757 - PONNEKANTI; HARI K. ; et al. | 2013-07-04 |
| Selective Atomic Layer Deposition Of Passivation Layers For Silicon-based Photovoltaic Devices App 20130157409 - VAIDYA; Kaushik ; et al. | 2013-06-20 |
| Rear-point-contact Process Or Photovoltaic Cells App 20130109133 - Frei; Michel R. ; et al. | 2013-05-02 |
| Method And Apparatus Of Removing A Passivation Film And Improving Contact Resistance In Rear Point Contact Solar Cells App 20130102109 - Stewart; Michael P. ; et al. | 2013-04-25 |
| Method And Apparatus For Remote Plasma Source Assisted Silicon-containing Film Deposition App 20130012030 - Lakshmanan; Annamalai ; et al. | 2013-01-10 |
| Staggered Dual Process Chambers Using One Single Facet On A Transfer Module App 20100196599 - Ponnekanti; Hari K ; et al. | 2010-08-05 |
| Tandem process chamber Grant 7,655,092 - Fairbairn , et al. February 2, 2 | 2010-02-02 |
| Tandem process chamber App 20080105202 - Fairbairn; Kevin ; et al. | 2008-05-08 |
| Electron beam treatment apparatus Grant 7,049,606 - Demos , et al. May 23, 2 | 2006-05-23 |
| Electron Beam Treatment Apparatus App 20050092935 - Demos, Alexandros T. ; et al. | 2005-05-05 |
| Large area source for uniform electron beam generation Grant 6,831,284 - Demos , et al. December 14, 2 | 2004-12-14 |
| Large area source for uniform electron beam generation App 20040099817 - Demos, Alexandros T. ; et al. | 2004-05-27 |
| Tandem process chamber App 20040069225 - Fairbairn, Kevin ; et al. | 2004-04-15 |
| Compact and high throughput semiconductor fabrication system App 20040018070 - Zhao, Jun ; et al. | 2004-01-29 |
| Tandem process chamber Grant 6,635,115 - Fairbairn , et al. October 21, 2 | 2003-10-21 |
| Tandem process chamber Grant 6,152,070 - Fairbairn , et al. November 28, 2 | 2000-11-28 |
| Front end wafer staging with wafer cassette turntables and on-the-fly wafer center finding Grant 6,082,950 - Altwood , et al. July 4, 2 | 2000-07-04 |
| Process chamber exhaust system Grant 6,077,157 - Fairbairn , et al. June 20, 2 | 2000-06-20 |
| Gas delivery system Grant 5,911,834 - Fairbairn , et al. June 15, 1 | 1999-06-15 |
| Ultra high throughput wafer vacuum processing system Grant 5,855,681 - Maydan , et al. January 5, 1 | 1999-01-05 |
| Remote plasma source Grant 5,844,195 - Fairbairn , et al. December 1, 1 | 1998-12-01 |
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