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Patent applications and USPTO patent grants for Pombrik; Sofia.The latest application filed is for "source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition".
Patent | Date |
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Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition Grant 8,299,286 - Gardiner , et al. October 30, 2 | 2012-10-30 |
Method of forming metal films on a substrate by chemical vapor deposition Grant 6,110,529 - Gardiner , et al. August 29, 2 | 2000-08-29 |
Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same Grant 5,820,664 - Gardiner , et al. October 13, 1 | 1998-10-13 |
Platinum source compositions for chemical vapor deposition of platinum Grant 5,783,716 - Baum , et al. July 21, 1 | 1998-07-21 |
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