loadpatents
Patent applications and USPTO patent grants for POIS; Heath.The latest application filed is for "feed-forward of multi-layer and multi-process information using xps and xrf technologies".
Patent | Date |
---|---|
Feed-forward Of Multi-layer And Multi-process Information Using Xps And Xrf Technologies App 20210372787 - POIS; Heath ;   et al. | 2021-12-02 |
System And Method For Measuring A Sample By X-ray Reflectance Scatterometry App 20210164924 - POIS; Heath ;   et al. | 2021-06-03 |
Method And System For Non-destructive Metrology Of Thin Layers App 20200191734 - Lee; Wei Ti ;   et al. | 2020-06-18 |
Method and system for non-destructive metrology of thin layers Grant 10,533,961 - Lee , et al. Ja | 2020-01-14 |
Method And System For Non-destructive Metrology Of Thin Layers App 20180328871 - Lee; Wei Ti ;   et al. | 2018-11-15 |
High resolution monitoring of CD variations Grant 8,049,903 - Opsal , et al. November 1, 2 | 2011-11-01 |
High Resolution Monitoring Of Cd Variations App 20110205554 - OPSAL; Jon ;   et al. | 2011-08-25 |
High resolution monitoring of CD variations Grant 7,933,026 - Opsal , et al. April 26, 2 | 2011-04-26 |
High Resolution Monitoring Of Cd Variations App 20090259605 - Opsal; Jon ;   et al. | 2009-10-15 |
High resolution monitoring of CD variations Grant 7,567,351 - Opsal , et al. July 28, 2 | 2009-07-28 |
Multiple tool and structure analysis Grant 7,478,019 - Zangooie , et al. January 13, 2 | 2009-01-13 |
High resolution monitoring of CD variations App 20070201017 - Opsal; Jon ;   et al. | 2007-08-30 |
Multiple tool and structure analysis App 20060167651 - Zangooie; Shahin ;   et al. | 2006-07-27 |
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