Patent | Date |
---|
Substrate holder for use in a lithographic apparatus Grant 11,448,976 - Poiesz , et al. September 20, 2 | 2022-09-20 |
Method, Substrate And System For Estimating Stress In A Substrate App 20220113640 - POIESZ; Thomas ;   et al. | 2022-04-14 |
Method Of Clamping A Substrate To A Clamping System, A Substrate Holder And A Substrate Support App 20220082952 - SOETHOUDT; Abraham Alexander ;   et al. | 2022-03-17 |
Lithographic apparatus and a device manufacturing method Grant 11,269,259 - Poiesz , et al. March 8, 2 | 2022-03-08 |
Substrate holder, substrate support and method of clamping a substrate to a clamping system Grant 11,187,998 - Soethoudt , et al. November 30, 2 | 2021-11-30 |
Substrate holder and a method of manufacturing a device Grant 11,086,234 - Poiesz , et al. August 10, 2 | 2021-08-10 |
Substrate Holder For Use In A Lithographic Apparatus App 20210165334 - POIESZ; Thomas ;   et al. | 2021-06-03 |
Lithographic Apparatus And A Device Manufacturing Method App 20210072649 - Poiesz; Thomas ;   et al. | 2021-03-11 |
System, Device And Method For Reconditioning A Substrate Support App 20210053177 - SCHOLTEN; Bert Dirk ;   et al. | 2021-02-25 |
Lithographic apparatus and a device manufacturing method Grant 10,871,715 - Poiesz , et al. December 22, 2 | 2020-12-22 |
Substrate Holder, Substrate Support And Method Of Clamping A Substrate To A Clamping System App 20200326635 - SOETHOUDT; Abraham Alexander ;   et al. | 2020-10-15 |
Substrate Holder And A Method Of Manufacturing A Device App 20200292947 - POIESZ; Thomas ;   et al. | 2020-09-17 |
Support apparatus, a lithographic apparatus and a device manufacturing method Grant 10,768,535 - Jeunink , et al. Sep | 2020-09-08 |
Substrate holder and a method of manufacturing a substrate holder Grant 10,719,019 - Poiesz , et al. | 2020-07-21 |
Lithographic Apparatus And A Device Manufacturing Method App 20200183289 - POIESZ; Thomas ;   et al. | 2020-06-11 |
Substrate support, method for loading a substrate on a substrate support location, lithographic apparatus and device manufacturing method Grant 10,656,536 - Leenders , et al. | 2020-05-19 |
Support Apparatus, A Lithographic Apparatus And A Device Manufacturing Method App 20200142317 - JEUNINK; Andre Bernardus ;   et al. | 2020-05-07 |
Lithographic apparatus and method for loading a substrate Grant 10,599,053 - Soethoudt , et al. | 2020-03-24 |
Support apparatus, lithographic apparatus and device manufacturing method Grant 10,514,615 - Jeunink , et al. Dec | 2019-12-24 |
Lithographic Apparatus And Method For Loading A Substrate App 20190339627 - SOETHOUDT; Abraham Alexander ;   et al. | 2019-11-07 |
A Substrate Holder And A Method Of Manufacturing A Substrate Holder App 20190332015 - POIESZ; Thomas ;   et al. | 2019-10-31 |
Substrate holder, a lithographic apparatus and method of manufacturing devices Grant 10,453,734 - Poiesz , et al. Oc | 2019-10-22 |
Lithographic apparatus and method for loading a substrate Grant 10,353,303 - Soethoudt , et al. July 16, 2 | 2019-07-16 |
Substrate support, method of compensating unflatness of an upper surface of a substrate, lithographic apparatus and device manufacturing method Grant 10,310,393 - Poiesz | 2019-06-04 |
Lithographic Apparatus, Method For Unloading A Substrate And Method For Loading A Substrate App 20190043749 - JEUNINK; Andre Bernardus ;   et al. | 2019-02-07 |
Support Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20180231897 - JEUNINK; Andre Bernardus ;   et al. | 2018-08-16 |
Substrate Support, Method Of Compensating Unflatness Of An Upper Surface Of A Substrate, Lithographic Apparatus And Device Manufacturing Method App 20180188660 - POIESZ; Thomas | 2018-07-05 |
Substrate Holder, A Lithographic Apparatus And Method Of Manufacturing Devices App 20180190534 - POIESZ; Thomas ;   et al. | 2018-07-05 |
Lithographic Apparatus And Method For Loading A Substrate App 20180149983 - SOETHOUDT; Abraham Alexander ;   et al. | 2018-05-31 |
Substrate holder and support table for lithography Grant 9,939,736 - Houben , et al. April 10, 2 | 2018-04-10 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 9,798,253 - Van Sommeren , et al. October 24, 2 | 2017-10-24 |
Substrate Support, Method For Loading A Substrate On A Substrate Support Location, Lithographic Apparatus And Device Manufacturing Method App 20170192359 - LEENDERS; Martinus Hendrikus Antonius ;   et al. | 2017-07-06 |
Support Table For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20170045828 - VAN SOMMEREN; Daan Daniel Johannes Antonius ;   et al. | 2017-02-16 |
Substrate Holder And Support Table For Lithography App 20160334710 - HOUBEN; Martijn ;   et al. | 2016-11-17 |