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Patent applications and USPTO patent grants for Pohray; Vinay.The latest application filed is for "wiggling control for pseudo-hardmask".
Patent | Date |
---|---|
Wiggling control for pseudo-hardmask Grant 8,470,126 - Sheu , et al. June 25, 2 | 2013-06-25 |
Wiggling Control For Pseudo-hardmask App 20130020026 - Sheu; Ben-Li ;   et al. | 2013-01-24 |
Wiggling control for pseudo-hardmask Grant 8,304,262 - Sheu , et al. November 6, 2 | 2012-11-06 |
Wiggling Control For Pseudo-hardmask App 20120214310 - Sheu; Ben-Li ;   et al. | 2012-08-23 |
Lag control Grant 7,789,991 - Worsham , et al. September 7, 2 | 2010-09-07 |
Lag control Grant 7,307,025 - Worsham , et al. December 11, 2 | 2007-12-11 |
Trench etch process for low-k dielectrics Grant 6,909,195 - Li , et al. June 21, 2 | 2005-06-21 |
Method for patterning multilevel interconnects Grant 6,875,699 - Lassig , et al. April 5, 2 | 2005-04-05 |
Trench etch process for low-k dielectrics App 20050009324 - Li, SiYi ;   et al. | 2005-01-13 |
Trench etch process for low-k dielectrics Grant 6,794,293 - Li , et al. September 21, 2 | 2004-09-21 |
Trench Etch Process For Low-k Dielectrics App 20040038540 - Li, SiYi ;   et al. | 2004-02-26 |
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