Plug; Reinder Teun

Patent Applications and Registrations

Patent applications and USPTO patent grants for Plug; Reinder Teun.The latest application filed is for "methods and apparatus for estimating substrate shape".

Company Profile

2.13.13

Plug; Reinder Teun - Eindhoven NL

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Guided patterning device inspection Grant 11,287,748 - Van Oosten , et al. March 29, 2	2022-03-29
Methods And Apparatus For Estimating Substrate Shape App 20220050391 - DILLEN; Hermanus Adrianus ; et al.	2022-02-17
Guided Patterning Device Inspection App 20210041788 - VAN OOSTEN; Anton Bernhard ; et al.	2021-02-11
Method and apparatus for predicting performance of a metrology system Grant 10,884,342 - Maassen , et al. January 5, 2	2021-01-05
Method Of Patterning At Least A Layer Of A Semiconductor Device App 20190235394 - PLUG; Reinder Teun ; et al.	2019-08-01
Method And Apparatus For Predicting Performance Of A Metrology System App 20180314160 - MAASSEN; Martinus Gerardus Maria Johannes ; et al.	2018-11-01
Metrology method and apparatus, lithographic apparatus, device manufacturing method and substrate Grant 8,411,287 - Smilde , et al. April 2, 2	2013-04-02
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Grant 7,961,309 - Plug , et al. June 14, 2	2011-06-14
Metrology Method and Apparatus, Lithographic Apparatus, Device Manufacturing Method and Substrate App 20110043791 - Smilde; Hendrik Jan Hidde ; et al.	2011-02-24
Lithographic apparatus, combination of lithographic apparatus and processing module, and device manufacturing method Grant 7,679,714 - Onvlee , et al. March 16, 2	2010-03-16
Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method Grant 7,659,988 - Kok , et al. February 9, 2	2010-02-09
Metrology Tool, System Comprising a Lithographic Apparatus and a Metrology Tool, and a Method for Determining a Parameter of a Substrate App 20090296081 - PLUG; Reinder Teun ; et al.	2009-12-03
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Grant 7,586,598 - Plug , et al. September 8, 2	2009-09-08
Lithography system, control system and device manufacturing method Grant 7,511,797 - Van De Mast , et al. March 31, 2	2009-03-31
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate Grant 7,502,103 - Plug , et al. March 10, 2	2009-03-10
Lithographic system, sensor, and method of measuring properties of a substrate Grant 7,480,050 - Den Boef , et al. January 20, 2	2009-01-20
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method App 20080148875 - Hoogenboom; Thomas Leo Maria ; et al.	2008-06-26
Lithography system, control system and device manufacturing method App 20080143985 - Mast; Franciscus Van De ; et al.	2008-06-19
Lithography system, control system and device manufacturing method Grant 7,352,439 - Van De Mast , et al. April 1, 2	2008-04-01
Lithography system, control system and device manufacturing method App 20080036983 - De Mast; Franciscus Van ; et al.	2008-02-14
Apparatus for angular-resolved spectroscopic lithography characterization and device manufacturing method App 20080002207 - Kok; Martinus Joseph ; et al.	2008-01-03
Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate App 20070279742 - Plug; Reinder Teun ; et al.	2007-12-06
Lithographic system, sensor, and method of measuring properties of a substrate App 20070182964 - Den Boef; Arie Jeffrey ; et al.	2007-08-09
Method, apparatus and computer product for substrate processing Grant 7,113,253 - Plug September 26, 2	2006-09-26
Method, apparatus and computer product for substrate processing App 20050058446 - Plug, Reinder Teun	2005-03-17

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