| Patent | Date |
|---|
Methods and systems for inspection of semiconductor structures with automatically generated defect features
Grant 11,379,967 - George , et al. July 5, 2 | 2022-07-05 |
Method for process monitoring with optical inspections
Grant 11,379,969 - Plihal , et al. July 5, 2 | 2022-07-05 |
Diagnostic methods for the classifiers and the defects captured by optical tools
Grant 11,237,119 - Plihal , et al. February 1, 2 | 2022-02-01 |
System and method for difference filter and aperture selection using shallow deep learning
Grant 11,151,707 - Bhattacharyya , et al. October 19, 2 | 2021-10-19 |
Defect location accuracy using shape based grouping guided defect centering
Grant 11,119,060 - Saraswatula , et al. September 14, 2 | 2021-09-14 |
Defect candidate generation for inspection
Grant 11,114,324 - Plihal , et al. September 7, 2 | 2021-09-07 |
Semiconductor hot-spot and process-window discovery combining optical and electron-beam inspection
Grant 11,055,840 - Liang , et al. July 6, 2 | 2021-07-06 |
System, method for training and applying defect classifiers in wafers having deeply stacked layers
Grant 10,964,013 - Plihal , et al. March 30, 2 | 2021-03-30 |
Semiconductor Hot-Spot and Process-Window Discovery Combining Optical and Electron-Beam Inspection
App 20210042908 - Liang; Ardis ; et al. | 2021-02-11 |
Method For Process Monitoring With Optical Inspections
App 20210035282 - Plihal; Martin ; et al. | 2021-02-04 |
System and Method for Determining Defects Using Physics-Based Image Perturbations
App 20210027445 - Plihal; Martin ; et al. | 2021-01-28 |
Creating and tuning a classifier to capture more defects of interest during inspection
Grant 10,902,579 - Soltanmohammadi , et al. January 26, 2 | 2021-01-26 |
And noise based care areas
Grant 10,832,396 - Duffy , et al. November 10, 2 | 2020-11-10 |
Defect Candidate Generation for Inspection
App 20200328104 - Plihal; Martin ; et al. | 2020-10-15 |
Methods And Systems For Inspection Of Semiconductor Structures With Automatically Generated Defect Features
App 20200234428 - George; Jacob ; et al. | 2020-07-23 |
Identifying nuisances and defects of interest in defects detected on a wafer
Grant 10,699,926 - Plihal , et al. | 2020-06-30 |
Care areas for improved electron beam defect detection
Grant 10,692,690 - Anantha , et al. | 2020-06-23 |
System and Method for Difference Filter and Aperture Selection Using Shallow Deep Learning
App 20200184628 - Bhattacharyya; Santosh ; et al. | 2020-06-11 |
Mode selection for inspection
Grant 10,670,536 - Plihal , et al. | 2020-06-02 |
Design And Noise Based Care Areas
App 20200126212 - Duffy; Brian ; et al. | 2020-04-23 |
Adaptive automatic defect classification
Grant 10,436,720 - He , et al. O | 2019-10-08 |
Mode Selection for Inspection
App 20190302031 - Plihal; Martin ; et al. | 2019-10-03 |
Nuisance Mining For Novel Defect Discovery
App 20190287015 - Plihal; Martin | 2019-09-19 |
Production sample shaping that preserves re-normalizability
Grant 10,338,004 - Plihal , et al. | 2019-07-02 |
Optimizing training sets used for setting up inspection-related algorithms
Grant 10,267,748 - Plihal , et al. | 2019-04-23 |
Defect Location Accuracy Using Shape Based Grouping Guided Defect Centering
App 20190072505 - SARASWATULA; Jagdish Chandra ; et al. | 2019-03-07 |
Identifying Nuisances and Defects of Interest in Defects Detected on a Wafer
App 20190067060 - Plihal; Martin ; et al. | 2019-02-28 |
Care Areas for Improved Electron Beam Defect Detection
App 20180277337 - Anantha; Vidyasagar ; et al. | 2018-09-27 |
System, Method For Training And Applying Defect Classifiers In Wafers Having Deeply Stacked Layers
App 20180204315 - Plihal; Martin ; et al. | 2018-07-19 |
Diagnostic Methods for the Classifiers and the Defects Captured by Optical Tools
App 20180197714 - Plihal; Martin ; et al. | 2018-07-12 |
System, method and computer program product for correcting a difference image generated from a comparison of target and reference dies
Grant 9,984,454 - Plihal May 29, 2 | 2018-05-29 |
System and method for production line monitoring
Grant 9,983,148 - Paramasivam , et al. May 29, 2 | 2018-05-29 |
Optimizing Training Sets Used for Setting Up Inspection-Related Algorithms
App 20180106732 - Plihal; Martin ; et al. | 2018-04-19 |
System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference components
Grant 9,940,705 - Park , et al. April 10, 2 | 2018-04-10 |
Adaptive sampling for process window determination
Grant 9,891,538 - Plihal February 13, 2 | 2018-02-13 |
Adaptive nuisance filter
Grant 9,835,566 - Liang , et al. December 5, 2 | 2017-12-05 |
System, Method And Computer Program Product For Detecting Defects In A Fabricated Target Component Using Consistent Modulation For The Target And Reference Components
App 20170323434 - Park; Allen ; et al. | 2017-11-09 |
System, Method And Computer Program Product For Correcting A Difference Image Generated From A Comparison Of Target And Reference Dies
App 20170309007 - Plihal; Martin | 2017-10-26 |
Wafer inspection recipe setup
Grant 9,714,905 - Plihal , et al. July 25, 2 | 2017-07-25 |
Creating defect classifiers and nuisance filters
Grant 9,613,411 - Konuru , et al. April 4, 2 | 2017-04-04 |
Adaptive Automatic Defect Classification
App 20170082555 - He; Li ; et al. | 2017-03-23 |
Wafer Defect Discovery
App 20170076911 - Chen; Hong ; et al. | 2017-03-16 |
Dynamic binning for diversification and defect discovery
Grant 9,582,869 - Plihal , et al. February 28, 2 | 2017-02-28 |
System and Method for Production Line Monitoring
App 20160377552 - Paramasivam; Saravanan ; et al. | 2016-12-29 |
Wafer defect discovery
Grant 9,518,934 - Chen , et al. December 13, 2 | 2016-12-13 |
Adaptive Sampling for Process Window Determination
App 20160274036 - Plihal; Martin | 2016-09-22 |
Adaptive Nuisance Filter
App 20160258879 - Liang; Ardis ; et al. | 2016-09-08 |
Composite defect classifier
Grant 9,430,743 - Plihal August 30, 2 | 2016-08-30 |
Wafer Defect Discovery
App 20160123898 - Chen; Hong ; et al. | 2016-05-05 |
Dynamic Binning for Diversification and Defect Discovery
App 20160110857 - Plihal; Martin ; et al. | 2016-04-21 |
Production Sample Shaping that Preserves Re-Normalizability
App 20150276618 - Plihal; Martin ; et al. | 2015-10-01 |
Creating Defect Classifiers and Nuisance Filters
App 20150262038 - Konuru; Raghavan ; et al. | 2015-09-17 |
Composite Defect Classifier
App 20150254832 - Plihal; Martin | 2015-09-10 |
Unbiased wafer defect samples
Grant 8,948,494 - Plihal , et al. February 3, 2 | 2015-02-03 |
Unbiased Wafer Defect Samples
App 20140133737 - Plihal; Martin ; et al. | 2014-05-15 |
Scanner performance comparison and matching using design and defect data
Grant 8,594,823 - Park , et al. November 26, 2 | 2013-11-26 |
Monitoring of time-varying defect classification performance
Grant 8,537,349 - Huet , et al. September 17, 2 | 2013-09-17 |
Process excursion detection
Grant 8,289,510 - Huet , et al. October 16, 2 | 2012-10-16 |
Multi-scale classification of defects
Grant 8,165,837 - Paramasivam , et al. April 24, 2 | 2012-04-24 |
Monitoring Of Time-varying Defect Classification Performance
App 20110224932 - Huet; Patrick ; et al. | 2011-09-15 |
Scanner Performance Comparison And Matching Using Design And Defect Data
App 20110172804 - Park; Allen ; et al. | 2011-07-14 |
Process Excursion Detection
App 20110137576 - Huet; Patrick Y. ; et al. | 2011-06-09 |
Process Excursion Detection
App 20100067781 - Huet; Patrick Y. ; et al. | 2010-03-18 |
Process excursion detection
Grant 7,646,476 - Huet , et al. January 12, 2 | 2010-01-12 |
Methods and systems for generating an inspection process for an inspection system
Grant 7,570,797 - Wang , et al. August 4, 2 | 2009-08-04 |
Process Excursion Detection
App 20080204739 - Huet; Patrick Y. ; et al. | 2008-08-28 |
Wafer inspection systems and methods for analyzing inspection data
Grant 7,417,724 - Sullivan , et al. August 26, 2 | 2008-08-26 |
Process excursion detection
Grant 7,394,534 - Huet , et al. July 1, 2 | 2008-07-01 |
Wafer inspection systems and methods for analyzing inspection data
Grant 7,227,628 - Sullivan , et al. June 5, 2 | 2007-06-05 |
Detection of spatially repeating signatures
Grant 7,006,886 - Huet , et al. February 28, 2 | 2006-02-28 |
Spatial signature analysis
Grant 6,718,526 - Eldredge , et al. April 6, 2 | 2004-04-06 |
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