Patent | Date |
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Extreme ultraviolet source with dual magnetic cusp particle catchers Grant 9,578,729 - McGeoch February 21, 2 | 2017-02-21 |
Extreme ultraviolet source with magnetic cusp plasma control Grant 9,544,986 - McGeoch January 10, 2 | 2017-01-10 |
Extreme Ultraviolet Source With Magnetic Cusp Plasma Control App 20160242268 - McGeoch; Malcolm W. | 2016-08-18 |
Extreme Ultraviolet Source With Dual Magnetic Cusp Particle Catchers App 20160150625 - McGeoch; Malcolm W. | 2016-05-26 |
Extreme ultraviolet source with magnetic cusp plasma control Grant 9,301,380 - McGeoch March 29, 2 | 2016-03-29 |
Extreme Ultraviolet Source With Magnetic Cusp Plasma Control App 20160007433 - McGeoch; Malcolm W. | 2016-01-07 |
Extreme ultraviolet source with magnetic cusp plasma control Grant 9,155,178 - McGeoch October 6, 2 | 2015-10-06 |
Lithium extreme ultraviolet source and operating method Grant 8,592,788 - McGeoch November 26, 2 | 2013-11-26 |
Induction heated buffer gas heat pipe for use in an extreme ultraviolet source Grant 8,569,724 - McGeoch October 29, 2 | 2013-10-29 |
Induction Heated Buffer Gas Heat Pipe For Use In An Extreme Ultraviolet Source App 20130153568 - McGeoch; Malcolm W. | 2013-06-20 |
Pulsed discharge extreme ultraviolet source with magnetic shield Grant 8,440,988 - McGeoch May 14, 2 | 2013-05-14 |
Laser heated discharge plasma EUV source Grant 8,269,199 - McGeoch September 18, 2 | 2012-09-18 |
Pulsed Discharge Extreme Ultraviolet Source With Magnetic Shield App 20120146510 - McGeoch; Malcolm W. | 2012-06-14 |
Z-pinch Plasma Generator And Plasma Target App 20110089834 - McGeoch; Malcolm W. | 2011-04-21 |
Liquid metal droplet generator Grant 7,637,403 - McGeoch December 29, 2 | 2009-12-29 |
Laser Heated Discharge Plasma EUV Source With Plasma Assisted Lithium Reflux App 20090224182 - McGeoch; Malcolm W. | 2009-09-10 |
Laser Heated Discharge Plasma Euv Source App 20090212241 - McGeoch; Malcolm W. | 2009-08-27 |
Extreme ultraviolet source with wide angle vapor containment and reflux Grant 7,479,646 - McGeoch January 20, 2 | 2009-01-20 |
Extreme ultraviolet source with wide angle vapor containment and reflux App 20070158595 - McGeoch; Malcolm W. | 2007-07-12 |
Optically addressed extreme ultraviolet modulator and lithography system incorporating modulator Grant 7,079,306 - McGeoch July 18, 2 | 2006-07-18 |
Injection pinch discharge extreme ultraviolet source Grant 7,075,096 - McGeoch July 11, 2 | 2006-07-11 |
Liquid metal droplet generator App 20060102663 - McGeoch; Malcolm W. | 2006-05-18 |
Injection pinch discharge extreme ultraviolet source App 20050178985 - McGeoch, Malcolm W. | 2005-08-18 |
Optically addressed extreme ultraviolet modulator and lithography system incorporating modulator App 20050068613 - McGeoch, Malcolm W. | 2005-03-31 |
Star pinch plasma source of photons or neutrons Grant 6,728,337 - McGeoch April 27, 2 | 2004-04-27 |
Star pinch X-ray and extreme ultraviolet photon source Grant 6,567,499 - McGeoch May 20, 2 | 2003-05-20 |
Star pinch plasma source of photons or neutrons App 20020186815 - McGeoch, Malcolm W. | 2002-12-12 |
Star pinch X-ray and extreme ultraviolet photon source App 20020186814 - McGeoch, Malcolm W. | 2002-12-12 |
Extreme ultraviolet based on colliding neutral beams Grant 6,421,421 - McGeoch July 16, 2 | 2002-07-16 |
Z-pinch soft x-ray source using diluent gas Grant 6,075,838 - McGeoch June 13, 2 | 2000-06-13 |