Platzgummer; Elmar

Patent Applications and Registrations

Patent applications and USPTO patent grants for Platzgummer; Elmar.The latest application filed is for "charged-particle source and method for cleaning a charged-particle source using back-sputtering".

Company Profile

8.53.53

Platzgummer; Elmar - Vienna AT
Platzgummer; Elmar - Wien AT

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Charged-particle source and method for cleaning a charged-particle source using back-sputtering Grant 10,840,054 - Platzgummer , et al. November 17, 2	2020-11-17
Non-linear dose- and blur-dependent edge placement correction Grant 10,651,010 - Platzgummer , et al.	2020-05-12
Dose-related feature reshaping in an exposure pattern to be exposed in a multi beam writing apparatus Grant 10,522,329 - Platzgummer , et al. Dec	2019-12-31
Multi-beam writing using inclined exposure stripes Grant 10,410,831 - Platzgummer Sept	2019-09-10
Charged-Particle Source and Method for Cleaning a Charged-Particle Source Using Back-Sputtering App 20190237288 - Platzgummer; Elmar ; et al.	2019-08-01
Non-linear Dose- and Blur-Dependent Edge Placement Correction App 20190214226 - Platzgummer; Elmar ; et al.	2019-07-11
Method for compensating pattern placement errors caused by variation of pattern exposure density in a multi-beam writer Grant 10,325,756 - Platzgummer	2019-06-18
Advanced dose-level quantization of multibeam-writers Grant 10,325,757 - Platzgummer , et al.	2019-06-18
Method for Irradiating a Target Using Restricted Placement Grids App 20190088448 - Platzgummer; Elmar ; et al.	2019-03-21
Dose-Related Feature Reshaping in an Exposure Pattern to be Exposed in a Multi Beam Writing Apparatus App 20190066976 - Platzgummer; Elmar ; et al.	2019-02-28
Advanced Dose-Level Quantization for Multibeam-Writers App 20180218879 - Platzgummer; Elmar ; et al.	2018-08-02
Method for Compensating Pattern Placement Errors Caused by Variation of Pattern Exposure Density in a Multi-Beam Writer App 20170357153 - Platzgummer; Elmar	2017-12-14
Bi-directional double-pass multi-beam writing Grant 9,799,487 - Platzgummer October 24, 2	2017-10-24
Multi-beam writing of pattern areas of relaxed critical dimension Grant 9,653,263 - Platzgummer , et al. May 16, 2	2017-05-16
Correction of short-range dislocations in a multi-beam writer Grant 9,568,907 - Platzgummer , et al. February 14, 2	2017-02-14
Compensation of imaging deviations in a particle-beam writer using a convolution kernel Grant 9,520,268 - Platzgummer December 13, 2	2016-12-13
Multi-Beam Writing Using Inclined Exposure Stripes App 20160336147 - Platzgummer; Elmar	2016-11-17
Compensation of dose inhomogeneity using overlapping exposure spots Grant 9,495,499 - Platzgummer , et al. November 15, 2	2016-11-15
Bi-Directional Double-Pass Multi-Beam Writing App 20160276131 - Platzgummer; Elmar	2016-09-22
Multi-Beam Writing of Pattern Areas of Relaxed Critical Dimension App 20160276132 - Platzgummer; Elmar ; et al.	2016-09-22
Multi-beam tool for cutting patterns Grant 9,443,699 - Platzgummer , et al. September 13, 2	2016-09-13
Customizing a particle-beam writer using a convolution kernel Grant 9,373,482 - Platzgummer June 21, 2	2016-06-21
Correction of Short-Range Dislocations in a Multi-Beam Writer App 20160071684 - Platzgummer; Elmar ; et al.	2016-03-10
Compensation of defective beamlets in a charged-particle multi-beam exposure tool Grant 9,269,543 - Reiter , et al. February 23, 2	2016-02-23
Customizing a Particle-Beam Writer Using a Convolution Kernel App 20160012170 - Platzgummer; Elmar	2016-01-14
Compensation of Imaging Deviations in a Particle-Beam Writer Using a Convolution Kernel App 20160013019 - Platzgummer; Elmar	2016-01-14
Compensation of Dose Inhomogeneity Using Overlapping Exposure Spots App 20150347660 - Platzgummer; Elmar ; et al.	2015-12-03
Multi-Beam Tool for Cutting Patterns App 20150311030 - Platzgummer; Elmar ; et al.	2015-10-29
Multi-Beam Tool for Cutting Patterns App 20150311031 - Platzgummer; Elmar ; et al.	2015-10-29
Compensation Of Defective Beamlets In A Charged-particle Multi-beam Exposure Tool App 20150248993 - Reiter; Rafael ; et al.	2015-09-03
Pattern definition device having multiple blanking arrays Grant 9,099,277 - Platzgummer August 4, 2	2015-08-04
High-voltage insulation device for charged-particle optical apparatus Grant 9,093,201 - Platzgummer , et al. July 28, 2	2015-07-28
Method for charged-particle multi-beam exposure Grant 9,053,906 - Platzgummer June 9, 2	2015-06-09
Charged-particle Multi-beam Apparatus Having Correction Plate App 20150069260 - Platzgummer; Elmar	2015-03-12
Method For Charged-particle Multi-beam Exposure App 20150028230 - Platzgummer; Elmar	2015-01-29
Pattern Definition Device Having Multiple Blanking Arrays App 20150021493 - Platzgummer; Elmar	2015-01-22
High-voltage Insulation Device For Charged-particle Optical Apparatus App 20140197327 - Platzgummer; Elmar ; et al.	2014-07-17
Multi-beam deflector array means with bonded electrodes Grant 8,563,942 - Platzgummer October 22, 2	2013-10-22
Pattern definition device with multiple multibeam array Grant 8,546,767 - Platzgummer , et al. October 1, 2	2013-10-01
Method for multi-beam exposure on a target Grant 8,378,320 - Platzgummer February 19, 2	2013-02-19
Particle-optical system Grant 8,368,015 - Platzgummer , et al. February 5, 2	2013-02-05
Charged particle beam exposure system and beam manipulating arrangement Grant 8,368,030 - Platzgummer , et al. February 5, 2	2013-02-05
Charged-particle exposure apparatus with electrostatic zone plate Grant 8,304,749 - Platzgummer , et al. November 6, 2	2012-11-06
Global point spreading function in multi-beam patterning Grant 8,278,635 - Platzgummer , et al. October 2, 2	2012-10-02
Compensation of dose inhomogeneity and image distortion Grant 8,258,488 - Platzgummer , et al. September 4, 2	2012-09-04
Method for maskless particle-beam exposure Grant 8,222,621 - Fragner , et al. July 17, 2	2012-07-17
Method for producing a multi-beam deflector array device having electrodes Grant 8,198,601 - Platzgummer , et al. June 12, 2	2012-06-12
Multi-beam source Grant 8,183,543 - Platzgummer May 22, 2	2012-05-22
Method for maskless particle-beam exposure Grant 8,115,183 - Platzgummer February 14, 2	2012-02-14
Constant current multi-beam patterning Grant 8,057,972 - Fragner , et al. November 15, 2	2011-11-15
Charged particle system Grant 8,049,189 - Buschbeck , et al. November 1, 2	2011-11-01
Charged particle beam exposure system Grant 8,026,495 - Platzgummer September 27, 2	2011-09-27
Method For Multi-beam Exposure On A Target App 20110226968 - Platzgummer; Elmar	2011-09-22
Pattern Definition Device With Multiple Multibeam Array App 20110204253 - Platzgummer; Elmar ; et al.	2011-08-25
Multi-beam Deflector Array Means With Bonded Electrodes App 20100288938 - Platzgummer; Elmar	2010-11-18
Particle-Optical System App 20100270474 - Platzgummer; Elmar ; et al.	2010-10-28
Method For Maskless Particle-beam Exposure App 20100252733 - Platzgummer; Elmar	2010-10-07
Global Point Spreading Function in Multi-Beam Patterning App 20100224790 - Platzgummer; Elmar ; et al.	2010-09-09
Particle-beam exposure apparatus with overall-modulation of a patterned beam Grant 7,781,748 - Platzgummer August 24, 2	2010-08-24
Method for maskless particle-beam exposure Grant 7,777,201 - Fragner , et al. August 17, 2	2010-08-17
Method For Producing A Multi-beam Deflector Array Device Having Electrodes App 20100187434 - Platzgummer; Elmar ; et al.	2010-07-29
Particle-beam apparatus with improved wien-type filter Grant 7,763,851 - Platzgummer July 27, 2	2010-07-27
Charged-particle exposure apparatus Grant 7,737,422 - Platzgummer , et al. June 15, 2	2010-06-15
Method For Maskless Particle-beam Exposure App 20100127185 - Fragner; Heinrich ; et al.	2010-05-27
Constant Current Multi-beam Patterning App 20100124722 - Fragner; Heinrich ; et al.	2010-05-20
Pattern definition device having distinct counter-electrode array plate Grant 7,714,298 - Platzgummer May 11, 2	2010-05-11
Multi-beam deflector array device for maskless particle-beam processing Grant 7,687,783 - Platzgummer , et al. March 30, 2	2010-03-30
Compensation Of Dose Inhomogeneity And Image Distortion App 20100038554 - Platzgummer; Elmar ; et al.	2010-02-18
Charged-particle exposure apparatus Grant 7,598,499 - Platzgummer October 6, 2	2009-10-06
Charged Particle Beam Exposure System App 20090212240 - Platzgummer; Elmar ; et al.	2009-08-27
Particle-beam Exposure Apparatus With Overall-modulation Of A Patterned Beam App 20090200495 - Platzgummer; Elmar	2009-08-13
Charged particle beam exposure system and beam manipulating arrangement App 20090140160 - Platzgummer; Elmar ; et al.	2009-06-04
Multi-beam Source App 20090026389 - Platzgummer; Elmar	2009-01-29
Pattern Definition Device Having Distinct Counter-electrode Array Plate App 20080283767 - Platzgummer; Elmar	2008-11-20
Charged-Particle Exposure Apparatus App 20080258084 - Platzgummer; Elmar ; et al.	2008-10-23
Method For Maskless Particle-beam Exposure App 20080237460 - Fragner; Heinrich ; et al.	2008-10-02
Charged-Particle Exposure Apparatus With Electrostatic Zone Plate App 20080230711 - Platzgummer; Elmar ; et al.	2008-09-25
Charged Particle System App 20080210887 - Buschbeck; Herbert ; et al.	2008-09-04
Multi-beam Deflector Array Device For Maskless Particle-beam Processing App 20080203317 - Platzgummer; Elmar ; et al.	2008-08-28
Particle-beam Apparatus With Improved Wien-type Filter App 20080149846 - Platzgummer; Elmar	2008-06-26
Particle-optical projection system Grant 7,388,217 - Buschbeck , et al. June 17, 2	2008-06-17
Advanced pattern definition for particle-beam exposure Grant 7,368,738 - Platzgummer May 6, 2	2008-05-06
Charged-particle exposure apparatus App 20080099693 - Platzgummer; Elmar	2008-05-01
Advanced pattern definition for particle-beam processing Grant 7,276,714 - Platzgummer , et al. October 2, 2	2007-10-02
Particle-optical projection system App 20070125956 - Buschbeck; Herbert ; et al.	2007-06-07
Charged-particle multi-beam exposure apparatus Grant 7,214,951 - Stengl , et al. May 8, 2	2007-05-08
Method of synthesising carbon nano tubes Grant 7,033,647 - Tang , et al. April 25, 2	2006-04-25
Method Of Synthesising Carbon Nano Tubes App 20060068096 - Tang; Xinhe ; et al.	2006-03-30
Particle multibeam lithography Grant 6,989,546 - Loschner , et al. January 24, 2	2006-01-24
Advanced pattern definition for particle-beam exposure App 20050242303 - Platzgummer, Elmar	2005-11-03
Advanced pattern definition for particle-beam processing App 20050242302 - Platzgummer, Elmar ; et al.	2005-11-03
Particle-optical projection system App 20050201246 - Buschbeck, Herbert ; et al.	2005-09-15
Ion irradiation of a target at very high and very low kinetic ion energies Grant 6,909,103 - Platzgummer , et al. June 21, 2	2005-06-21
Charged-particle multi-beam exposure apparatus App 20050104013 - Stengl, Gerhard ; et al.	2005-05-19
Apparatus for enhancing the lifetime of stencil masks Grant 6,858,118 - Platzgummer , et al. February 22, 2	2005-02-22
Ion irradiation of a target at very high and very low kinetic ion energies App 20050012052 - Platzgummer, Elmar ; et al.	2005-01-20
Apparatus for enhancing the lifetime of stencil masks App 20040188243 - Platzgummer, Elmar ; et al.	2004-09-30
Maskless particle-beam system for exposing a pattern on a substrate Grant 6,768,125 - Platzgummer , et al. July 27, 2	2004-07-27
Method for producing a superconducting circuit App 20030236169 - Lang, Wolfgang ; et al.	2003-12-25
Maskless particle-beam system for exposing a pattern on a substrate App 20030155534 - Platzgummer, Elmar ; et al.	2003-08-21
Field ionization ion source App 20030122085 - Stengl, Gerhard ; et al.	2003-07-03