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Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
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Method for determining contribution to a fingerprint
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Method And Apparatus For Predicting Substrate Image
App 20220187713 - MIDDLEBROOKS; Scott Anderson ; et al. | 2022-06-16 |
Methods and apparatus for calculating electromagnetic scattering properties of a structure
Grant 11,347,151 - Van Kraaij , et al. May 31, 2 | 2022-05-31 |
Method For Decision Making In A Semiconductor Manufacturing Process
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Method For Decreasing Uncertainty In Machine Learning Model Predictions
App 20210286270 - MIDDLEBROOKS; Scott Anderson ; et al. | 2021-09-16 |
Method and apparatus for image analysis
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Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures
Grant 11,041,816 - Pisarenco , et al. June 22, 2 | 2021-06-22 |
Hidden Defect Detection And Epe Estimation Based On The Extracted 3d Information From E-beam Images
App 20210174491 - PISARENCO; Maxim ; et al. | 2021-06-10 |
Scatterometer and Method of Scatterometry Using Acoustic Radiation
App 20210055215 - PISARENCO; Maxim ; et al. | 2021-02-25 |
Method For Determining Contribution To A Fingerprint
App 20210003927 - Harutyunyan; Davit ; et al. | 2021-01-07 |
Scatterometer and method of scatterometry using acoustic radiation
Grant 10,845,304 - Pisarenco , et al. November 24, 2 | 2020-11-24 |
Method for determining contribution to a fingerprint
Grant 10,816,904 - Harutyunyan , et al. October 27, 2 | 2020-10-27 |
Methods and Apparatus for Simulating Interaction of Radiation with Structures, Metrology Methods and Apparatus, Device Manufactu
App 20200202054 - DIRKS; Remco ; et al. | 2020-06-25 |
Methods and apparatuses for measurement of a parameter of a feature fabricated on a substrate
Grant 10,649,345 - Pisarenco , et al. | 2020-05-12 |
Method and apparatus for image analysis
Grant 10,607,334 - Middlebrooks , et al. | 2020-03-31 |
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
Grant 10,592,618 - Dirks , et al. | 2020-03-17 |
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure
App 20190346775 - VAN KRAAIJ; Markus Gerardus Martinus Maria ; et al. | 2019-11-14 |
Method for parameter determination and apparatus thereof
Grant 10,444,638 - Pandey , et al. Oc | 2019-10-15 |
Method And Apparatus For Image Analysis
App 20190310554 - MIDDLEBROOKS; Scott Anderson ; et al. | 2019-10-10 |
Method and apparatus for calculating electromagnetic scattering properties of finite periodic structures
Grant 10,408,753 - Pisarenco , et al. Sept | 2019-09-10 |
Method For Determining Contribution To A Fingerprint
App 20190271919 - HARUTYUNYAN; Davit ; et al. | 2019-09-05 |
Scatterometer and Method of Scatterometry Using Acoustic Radiation
App 20190113452 - Pisarenco; Maxim ; et al. | 2019-04-18 |
Method for Parameter Determination and Apparatus Thereof
App 20190033725 - PANDEY; Nitesh ; et al. | 2019-01-31 |
Methods And Apparatuses For Measurement Of A Parameter Of A Feature Fabricated On A Substrate
App 20190025714 - PISARENCO; Maxim ; et al. | 2019-01-24 |
Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing method
Grant 10,146,140 - Pisarenco , et al. De | 2018-12-04 |
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure and for Reconstruction of Approximate Structures
App 20180164229 - Pisarenco; Maxim ; et al. | 2018-06-14 |
Methods and apparatus for calculating electromagnetic scattering properties of a structure and for estimation of geometrical and material parameters thereof
Grant 9,939,250 - Pisarenco , et al. April 10, 2 | 2018-04-10 |
Method And Apparatus For Image Analysis
App 20170345138 - MIDDLEBROOKS; Scott Anderson ; et al. | 2017-11-30 |
Methods and Apparatus for Simulating Interaction of Radiation with Structures, Metrology Methods and Apparatus, Device Manufacturing Method
App 20170102623 - PISARENCO; Maxim ; et al. | 2017-04-13 |
Methods And Apparatus For Simulating Interaction Of Radiation With Structures, Metrology Methods And Apparatus, Device Manufacturing Method
App 20170017738 - DIRKS; Remco ; et al. | 2017-01-19 |
Methods and Apparatus for Calculating Electromagnetic Scattering Properties of a Structure and for Estimation of Geometrical and Material Parameters thereof
App 20160273906 - PISARENCO; Maxim ; et al. | 2016-09-22 |
Reference library generation method for methods of inspection, inspection apparatus and lithographic apparatus
Grant 8,875,078 - Pisarenco , et al. October 28, 2 | 2014-10-28 |
Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures
App 20130144560 - PISARENCO; Maxim ; et al. | 2013-06-06 |
Reference Library Generation Method for Methods of Inspection, Inspection Apparatus and Lithographic Apparatus
App 20130035911 - PISARENCO; Maxim ; et al. | 2013-02-07 |
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