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Patent applications and USPTO patent grants for Pirkle; David.The latest application filed is for "method and apparatus for detecting defects on wafers".
Patent | Date |
---|---|
Method And Apparatus For Detecting Defects On Wafers App 20160293502 - Pirkle; David | 2016-10-06 |
Methods and apparatus for sensing unconfinement in a plasma processing chamber Grant 7,722,778 - Fischer , et al. May 25, 2 | 2010-05-25 |
Methods And Apparatus For Sensing Unconfinement In A Plasma Processing Chamber App 20100096361 - Fischer; Andreas ;   et al. | 2010-04-22 |
Apparatus and methods for the detection of an arc in a plasma processing system Grant 7,334,477 - Pirkle February 26, 2 | 2008-02-26 |
Window for microwave plasma processing device Grant 5,234,526 - Chen , et al. August 10, 1 | 1993-08-10 |
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