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Patent applications and USPTO patent grants for PIOTECH INC..The latest application filed is for "semiconductor processing apparatus and method".
Patent | Date |
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Wafer pedestal with contact array Grant 11,437,253 - Arami , et al. September 6, 2 | 2022-09-06 |
Manipulator Finger, Manipulator, And Method Of Operating The Same App 20220208577 - Liu; Chun ;   et al. | 2022-06-30 |
Gas Showerhead With Controllable Airflow Distribution App 20220205101 - Liu; Zhenjie ;   et al. | 2022-06-30 |
Coating Device And Carrier Seat Thereof App 20220205092 - Guo; Yue ;   et al. | 2022-06-30 |
Apparatus And Method For Manufacturing Semiconductor Film App 20220205102 - Tan; Huaqiang ;   et al. | 2022-06-30 |
Wafer Support Pin Lifting Device App 20220208595 - Yang; Dezan ;   et al. | 2022-06-30 |
In-cavity Cleaning Method App 20220205087 - Zhang; Yaxin ;   et al. | 2022-06-30 |
Semiconductor Processing Apparatus And Method App 20220208590 - Wang; Zhuo ;   et al. | 2022-06-30 |
Protection Mechanism And Method For Protecting Wafer And Pin App 20220208598 - Tan; Huaqiang ;   et al. | 2022-06-30 |
Device For Adjusting Plasma Edge In Processing Chamber And Control Method Thereof App 20220208528 - Zhang; Saiqian ;   et al. | 2022-06-30 |
Wafer Transfer Method And Mechanical Arm App 20220208584 - Tian; Jason ;   et al. | 2022-06-30 |
Automatic Wafer Carrying System And Method For Transferring Wafer Using The System App 20210407843 - Yang; Hualong ;   et al. | 2021-12-30 |
Semiconductor Device For Condition-controlled Radio Frequency System App 20210398771 - Tan; Huaqiang ;   et al. | 2021-12-23 |
Apparatus, System, And Method For Impedance Adjustment Of Processing Station App 20210398779 - Kim; Giyoul ;   et al. | 2021-12-23 |
Substrate Transfer Module And Semiconductor Processing System App 20210358782 - Tian; Jason Lee ;   et al. | 2021-11-18 |
Double-sided Deposition Apparatus And Method App 20210305019 - Lu; Brian ;   et al. | 2021-09-30 |
Wafer susceptor apparatus with thermal insulation and method for manufacturing the same Grant 11,088,012 - Arami , et al. August 10, 2 | 2021-08-10 |
Gas-dispersing Apparatus For Multiple Chemical Materials App 20210172063 - TAN; HUAQIANG ;   et al. | 2021-06-10 |
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