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Patent applications and USPTO patent grants for Pietsch; Katrin.The latest application filed is for "device for measuring the position of at least one structure on a substrate".
Patent | Date |
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Method for determining positions of structures on a substrate Grant 7,948,635 - Pietsch , et al. May 24, 2 | 2011-05-24 |
Device for measuring the position of at least one structure on a substrate Grant 7,872,763 - Pietsch , et al. January 18, 2 | 2011-01-18 |
Apparatus and method for supporting a substrate at a position with high precision App 20090126525 - Pietsch; Katrin ;   et al. | 2009-05-21 |
Device for measuring the position of at least one structure on a substrate App 20090128828 - Pietsch; Katrin ;   et al. | 2009-05-21 |
Method for determining positions of structures on a substrate App 20090109443 - Pietsch; Katrin ;   et al. | 2009-04-30 |
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