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Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 11,300,890 - Kunnen , et al. April 12, 2 | 2022-04-12 |
Lithographic apparatus with improved patterning performance Grant 11,048,178 - La Torre , et al. June 29, 2 | 2021-06-29 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,916,453 - Van Beuzekom , et al. February 9, 2 | 2021-02-09 |
Setpoint generator, lithographic apparatus, lithographic apparatus operating method, and device manufacturing method Grant 10,908,517 - Van Damme , et al. February 2, 2 | 2021-02-02 |
Lithographic Apparatus With Improved Patterning Performance App 20200393769 - LA TORRE; Federico ;   et al. | 2020-12-17 |
Setpoint Generator, Lithographic Apparatus, Lithographic Apparatus Operating Method, and Device Manufacturing Method App 20200174381 - VAN DAMME; Jean-Philippe Xavier ;   et al. | 2020-06-04 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20200124993 - KUNNEN; Johan Gertrudis Cornelis ;   et al. | 2020-04-23 |
Lithography apparatus, and a method of manufacturing a device Grant 10,627,721 - Van Den Nieuwelaar , et al. | 2020-04-21 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 10,520,837 - Kunnen , et al. Dec | 2019-12-31 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20190391499 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2019-12-26 |
Object holder and lithographic apparatus Grant 10,481,502 - Laurent , et al. Nov | 2019-11-19 |
Lithographic apparatus, method of transferring a substrate and device manufacturing method Grant 10,409,174 - Van Beuzekom , et al. Sept | 2019-09-10 |
Lithographic apparatus and a method of manufacturing a lithographic apparatus Grant 10,324,384 - Pieterse , et al. | 2019-06-18 |
A Lithography Apparatus, And A Method Of Manufacturing A Device App 20180321592 - VAN DEN NIEUWELAAR; Norbertus Josephus Martinus ;   et al. | 2018-11-08 |
Lithographic apparatus and a method of manufacturing a device using a lithographic apparatus Grant 10,095,129 - Gattobigio , et al. October 9, 2 | 2018-10-09 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method App 20180284627 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2018-10-04 |
Object Holder And Lithographic Apparatus App 20180267412 - LAURENT; Thibault Simon Mathieu ;   et al. | 2018-09-20 |
Lithographic Apparatus And A Method Of Manufacturing A Lithographic Apparatus App 20180210350 - PIETERSE; Gerben ;   et al. | 2018-07-26 |
Object holder and lithographic apparatus Grant 9,915,877 - Laurent , et al. March 13, 2 | 2018-03-13 |
Fluid handling structure, a lithographic apparatus and a device manufacturing method Grant 9,904,177 - Thomas , et al. February 27, 2 | 2018-02-27 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method Grant 9,897,928 - Kunnen , et al. February 20, 2 | 2018-02-20 |
Object Holder And Lithographic Apparatus App 20170315454 - LAURENT; Thibault Simon Mathieu ;   et al. | 2017-11-02 |
Object holder and lithographic apparatus Grant 9,785,055 - Laurent , et al. October 10, 2 | 2017-10-10 |
Lithographic Apparatus And A Method Of Manufacturing A Device Using A Lithographic Apparatus App 20170131644 - GATTOBIGIO; Giovanni Luca ;   et al. | 2017-05-11 |
Lithographic Apparatus, Method Of Transferring A Substrate And Device Manufacturing Method App 20170108781 - VAN BEUZEKOM; Aart Adrianus ;   et al. | 2017-04-20 |
Effective droplet drying Grant 9,044,725 - Houben , et al. June 2, 2 | 2015-06-02 |
Object Holder And Lithographic Apparatus App 20150131064 - Laurent; Thibault Simon Mathieu ;   et al. | 2015-05-14 |
Gas manifold, module for a lithographic apparatus, lithographic apparatus and device manufacturing method Grant 8,675,169 - Van Boxtel , et al. March 18, 2 | 2014-03-18 |
Additive Fabrication Apparatus And Method Of Layerwise Production Of A Tangible Object App 20130241113 - Geers; Leon Ferdinand Gerard ;   et al. | 2013-09-19 |
Fluid Handling Structure, A Lithographic Apparatus And A Device Manufacturing Method App 20130050665 - Thomas; Ivo Adam Johannes ;   et al. | 2013-02-28 |
Lithographic Apparatus, Support Table For A Lithographic Apparatus And Device Manufacturing Method App 20130045447 - Kunnen; Johan Gertrudis Cornelis ;   et al. | 2013-02-21 |
Effective Droplet Drying App 20120104111 - Houben; Rene Jos ;   et al. | 2012-05-03 |
Gas Manifold, Module For A Lithographic Apparatus, Lithographic Apparatus And Device Manufacturing Method App 20120092631 - VAN BOXTEL; Frank Johannes Jacobus ;   et al. | 2012-04-19 |