| Patent | Date |
|---|
Wafer bonding system and method
Grant 10,121,760 - Phillips November 6, 2 | 2018-11-06 |
Fly's eye optical mirror with a plurality of optical elements rotationally aligned along two axes
Grant 10,114,193 - Phillips October 30, 2 | 2018-10-30 |
System and method for clamping wafers together in alignment using pressure
Grant 9,947,637 - Phillips , et al. April 17, 2 | 2018-04-17 |
Mirror assembly for an exposure apparatus
Grant 9,323,157 - Phillips , et al. April 26, 2 | 2016-04-26 |
Exposure method and device manufacturing method including selective deformation of a mask
Grant 9,304,385 - Phillips , et al. April 5, 2 | 2016-04-05 |
High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
Grant 9,041,900 - Phillips May 26, 2 | 2015-05-26 |
High heat load optics with a liquid metal interface for use in an extreme ultraviolet lithography system
Grant 9,041,904 - Phillips May 26, 2 | 2015-05-26 |
Wafer Bonding System And Method
App 20150122414 - PHILLIPS; Alton H. | 2015-05-07 |
System And Method For Clamping Wafers Together In Alignment Using Pressure
App 20150122412 - PHILLIPS; Alton H. ; et al. | 2015-05-07 |
Thermally conductive coil and methods and systems
Grant 8,847,721 - Cooper , et al. September 30, 2 | 2014-09-30 |
Method and apparatus for utilizing in-situ measurements techniques in conjunction with thermoelectric chips (TECs)
Grant 8,794,011 - Phillips , et al. August 5, 2 | 2014-08-05 |
Temperature-controlled holding devices for planar articles
Grant 8,767,174 - Sogard , et al. July 1, 2 | 2014-07-01 |
Intermittent Temperature Control Of Movable Optical Elements
App 20140176931 - Phillips; Alton H. ; et al. | 2014-06-26 |
Method and apparatus for aligning mirror blocks of a multi-element mirror assembly
Grant 8,739,383 - Phillips June 3, 2 | 2014-06-03 |
Mirror Assembly For An Exposure Apparatus
App 20140078485 - Phillips; Alton H ; et al. | 2014-03-20 |
Fly's Eye Optical Mirror With A Plurality Of Optical Elements Rotationally Aligned Along Two Axes
App 20140071419 - Phillips; Alton H. | 2014-03-13 |
Stage Assembly With Secure Device Holder
App 20130250271 - Phillips; Alton H. ; et al. | 2013-09-26 |
Self-correcting optical elements for high-thermal-load optical systems
Grant 8,425,060 - Watson , et al. April 23, 2 | 2013-04-23 |
Devices and methods for reducing residual reticle chucking forces
Grant 8,284,379 - Phillips October 9, 2 | 2012-10-09 |
System And Method For Controlling The Distortion Of A Reticle
App 20120120379 - Phillips; Alton H. ; et al. | 2012-05-17 |
High Heat Load Optics With A Liquid Metal Interface For Use In An Extreme Ultraviolet Lithography System
App 20120099088 - Phillips; Alton H. | 2012-04-26 |
Temperature-controlled Holding Devices For Planar Articles
App 20110211178 - Sogard; Michael R. ; et al. | 2011-09-01 |
Hydrostatic liquid-metal deformable optical elements
Grant 8,002,420 - Phillips August 23, 2 | 2011-08-23 |
Thermally Conductive Coil and Methods and Systems
App 20110109419 - Cooper; Alexander ; et al. | 2011-05-12 |
Multi-Element Mirror Assembly and Alignment
App 20100263192 - Phillips; Alton H. | 2010-10-21 |
EUV reticle handling system and method
Grant 7,804,583 - Phillips , et al. September 28, 2 | 2010-09-28 |
Filtered device container assembly with shield for a reticle
Grant 7,773,198 - Phillips August 10, 2 | 2010-08-10 |
Reticle Error Reduction By Cooling
App 20100186942 - Phillips; Alton H. ; et al. | 2010-07-29 |
Shield Layer Plus Refrigerated Backside Cooling For Planar Motors
App 20100156198 - Cooper; Alexander ; et al. | 2010-06-24 |
Monolithic stage devices providing motion in six degrees of freedom
Grant 7,728,462 - Williams , et al. June 1, 2 | 2010-06-01 |
High Heat Load Optics with a Liquid Metal Interface for Use in an Extreme Ultraviolet Lithography System
App 20100110397 - Phillips; Alton H. | 2010-05-06 |
Exposure Method, Device Manufacturing Method, And Mask
App 20100097588 - Phillips; Alton H. ; et al. | 2010-04-22 |
Hydrostatic Liquid-metal Deformable Optical Elements
App 20100020423 - Phillips; Alton H. | 2010-01-28 |
Liquid cooled mirror for use in extreme ultraviolet lithography
Grant 7,591,561 - Phillips , et al. September 22, 2 | 2009-09-22 |
Contact material and system for ultra-clean applications
Grant 7,551,265 - Phillips June 23, 2 | 2009-06-23 |
Reflective optical elements exhibiting multimetallic-like self-correction of distortions caused by heating
App 20090122428 - Phillips; Alton H. ; et al. | 2009-05-14 |
Self-correcting optical elements for high-thermal-load optical systems
App 20090122429 - Watson; Douglas C. ; et al. | 2009-05-14 |
Lithography apparatus with flexibly supported optical system
App 20090033895 - Binnard; Michael B. ; et al. | 2009-02-05 |
Devices And Methods For Decreasing Residual Chucking Forces
App 20090033907 - Watson; Douglas C. ; et al. | 2009-02-05 |
EUV Reticle Handling System and Method
App 20090027639 - Phillips; Alton H. ; et al. | 2009-01-29 |
EUV reticle handling system and method
Grant 7,477,358 - Phillips , et al. January 13, 2 | 2009-01-13 |
Devices And Methods For Reducing Residual Reticle Chucking Forces
App 20080291411 - Phillips; Alton H. | 2008-11-27 |
Monolithic, Non-Contact Six Degree-of-Freedom Stage Apparatus
App 20080285004 - Binnard; Michael B. ; et al. | 2008-11-20 |
Device container assembly with adjustable retainers for a reticle
App 20080128303 - Phillips; Alton H. ; et al. | 2008-06-05 |
Monolithic stage devices providing motion in six degrees of freedom
App 20080012431 - Williams; Mark ; et al. | 2008-01-17 |
Stage assembly with secure device holder
App 20070292245 - Phillips; Alton H. ; et al. | 2007-12-20 |
EUVL reticle stage and reticle protection system and method
App 20070285632 - Phillips; Alton H. ; et al. | 2007-12-13 |
Kinematic Chucks For Reticles And Other Planar Bodies
App 20070268476 - Phillips; Alton H. ; et al. | 2007-11-22 |
Six Degree-of-Freedom Stage Apparatus
App 20070267995 - Binnard; Michael B. ; et al. | 2007-11-22 |
Devices and methods for sensing secure attachment of an object onto a chuck
Grant 7,283,201 - Phillips October 16, 2 | 2007-10-16 |
Filtered device container assembly with shield for a reticle
App 20070229793 - Phillips; Alton H. | 2007-10-04 |
Aperture changing apparatus and method
App 20070211352 - Phillips; Alton H. ; et al. | 2007-09-13 |
Cooled optical filters and optical systems comprising same
App 20070170379 - Watson; Douglas C. ; et al. | 2007-07-26 |
Liquid Cooled Mirror for Use in Extreme Ultraviolet Lithography
App 20070091485 - Phillips; Alton H. ; et al. | 2007-04-26 |
Devices and methods for sensing secure attachment of an object onto a chuck
App 20070091291 - Phillips; Alton H. | 2007-04-26 |
Low spring constant, pneumatic suspension with vacuum chamber, air bearing, active force compensation, and sectioned vacuum chambers
App 20070030462 - Yuan; Bausan ; et al. | 2007-02-08 |
Multiple system vibration isolator
Grant 7,095,482 - Phillips , et al. August 22, 2 | 2006-08-22 |
Lithographic-optical systems including isolatable vacuum chambers, and lithography apparatus comprising same
App 20060181689 - Phillips; Alton H. ; et al. | 2006-08-17 |
Lithographic optical systems including exchangeable optical-element sets
App 20060176460 - Phillips; Alton H. ; et al. | 2006-08-10 |
Multiple System Vibration Isolator
App 20060126039 - Phillips; Alton H. ; et al. | 2006-06-15 |
Contact material and system for ultra-clean applications
App 20060073395 - Phillips; Alton H. | 2006-04-06 |
EUV reticle handling system and method
App 20060066834 - Phillips; Alton H. ; et al. | 2006-03-30 |
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
Grant 6,987,559 - Phillips , et al. January 17, 2 | 2006-01-17 |
Electromagnetic Force Actuator
App 20050236915 - Phillips, Alton H. | 2005-10-27 |
Vibration isolator with low lateral stiffness
Grant 6,953,109 - Watson , et al. October 11, 2 | 2005-10-11 |
Kinematic optical mounting assembly with flexures
Grant 6,922,293 - Watson , et al. July 26, 2 | 2005-07-26 |
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system
Grant 6,880,942 - Hazelton , et al. April 19, 2 | 2005-04-19 |
Modular exposure apparatus with removable optical device and improved isolation of the optical device
Grant 6,774,981 - Watson , et al. August 10, 2 | 2004-08-10 |
Vibration-attenuation devices having low lateral stiffness, and exposure apparatus comprising same
App 20040080729 - Phillips, Alton H. ; et al. | 2004-04-29 |
Vibration isolator with low lateral stiffness
App 20040065517 - Watson, Douglas C. ; et al. | 2004-04-08 |
Adaptive optic with discrete actuators for continuous deformation of a deformable mirror system
App 20040036940 - Hazelton, Andrew J. ; et al. | 2004-02-26 |
Kinematic optical mounting assembly with flexures
App 20040008429 - Watson, Douglas C. ; et al. | 2004-01-15 |
Multiple system vibration isolator
App 20040000215 - Phillips, Alton H. ; et al. | 2004-01-01 |
Adaptive optic off-axis metrology
App 20030234993 - Hazelton, Andrew J. ; et al. | 2003-12-25 |
Fluid connector for a stage assembly
App 20030098963 - Phillips, Alton H. ; et al. | 2003-05-29 |
Braid removal tool
Grant 6,021,783 - Phillips February 8, 2 | 2000-02-08 |
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