Phillipps; Geoffrey Norman
Patent Applications and Registrations
Patent applications and USPTO patent grants for Phillipps; Geoffrey Norman.The latest application filed is for "lithographic method and patterning device".
- Phillipps; Geoffrey Norman - Luyksgestel NL
| Patent | Date |
|---|---|
| Lithographic method and patterning device Grant 7,879,514 - Phillipps , et al. February 1, 2 | 2011-02-01 |
| Method and system for 3D alignment in wafer scale integration Grant 7,562,686 - Best , et al. July 21, 2 | 2009-07-21 |
| Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method Grant 7,398,177 - Smeets , et al. July 8, 2 | 2008-07-08 |
| Lithographic method and patterning device App 20080032203 - Phillipps; Geoffrey Norman ; et al. | 2008-02-07 |
| Method and system for 3D aligment in wafer scale integration App 20060172507 - Best; Keith Frank ; et al. | 2006-08-03 |
| Measurement substrate, substrate table, lithographic apparatus, method of calculating an angle of an alignment beam of an alignment system, and alignment verification method App 20060085161 - Smeets; Erik Marie Jose ; et al. | 2006-04-20 |
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