Phi; Son M.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Phi; Son M..The latest application filed is for "low temperature chuck for plasma processing systems".
- Phi; Son M. - Milpitas CA
| Patent | Date |
|---|---|
| Low Temperature Chuck For Plasma Processing Systems App 20170229326 - Tran; Toan Q. ; et al. | 2017-08-10 |
| Low Temperature Chuck For Plasma Processing Systems App 20160225652 - Tran; Toan Q. ; et al. | 2016-08-04 |
| Wafer Profile Modification Through Hot/cold Temperature Zones On Pedestal For Semiconductor Manufacturing Equipment App 20120074126 - Bang; Won B. ; et al. | 2012-03-29 |
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