Pharand; Michel

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pharand; Michel.The latest application filed is for "actuator assembly including magnetic sensor system for vibrationless position feedback".

Company Profile

1.15.21

Pharand; Michel - Los Gatos CA
Pharand; Michel - Chelmsford MA
Pharand; Michel - San Jose CA
Pharand; Michel - Fremont CA
Pharand; Michel - Woburn MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Actuator assembly including magnetic sensor system for vibrationless position feedback Grant 10,451,982 - Chang , et al. Oc	2019-10-22
Rotary probe head Grant 10,107,654 - Chang , et al. October 23, 2	2018-10-23
Actuator Assembly Including Magnetic Sensor System For Vibrationless Position Feedback App 20180205305 - Chang; Patrick ; et al.	2018-07-19
System and method for controlling a temperature of a reaction assembly Grant 9,778,579 - Pharand , et al. October 3, 2	2017-10-03
Current Controller For Cryogenically Cooled Motor App 20170111002 - Hemati; Neyram ; et al.	2017-04-20
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure Grant 9,625,368 - Goodwin , et al. April 18, 2	2017-04-18
Rotary Probe Head App 20170059296 - CHANG; Patrick S. ; et al.	2017-03-02
System And Method For Controlling A Temperature Of A Reaction Assembly App 20150146176 - Pharand; Michel ; et al.	2015-05-28
Fluid Distribution Network For Large Stator Motor App 20150075751 - Pharand; Michel ; et al.	2015-03-19
Temperature Control Of A Mover With Active Bypass, Predictive Feedforward Control, And Phase Change Housing App 20130140372 - MAHADESWARASWAMY; Chetan ; et al.	2013-06-06
Modular Coil Arrays For Planar And Linear Motors App 20130069449 - Pharand; Michel ; et al.	2013-03-21
Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport Grant 8,376,130 - Deyanov , et al. February 19, 2	2013-02-19
Direct Drive Modular Belt Conveyor, Cartridge, And Quick Connect-disconnect Constant Velocity Drive Shaft, For High Speed Foup Transport App 20120267219 - Deyanov; Roumen ; et al.	2012-10-25
Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure App 20120188557 - Goodwin; Eric Peter ; et al.	2012-07-26
Microchannel-cooled Coils Of Electromagnetic Actuators Exhibiting Reduced Eddy-current Drag App 20120062866 - Binnard; Michael B. ; et al.	2012-03-15
Combination load lock for handling workpieces Grant 7,828,504 - Pharand , et al. November 9, 2	2010-11-09
Direct Drive Modular Belt Conveyor, Cartridge, And Quick Connect-disconnect Constant Velocity Drive Shaft, For High Speed Foup Transport App 20100219050 - Deyanov; Roumen ; et al.	2010-09-02
Workpiece handling scan arm for ion implantation system Grant 7,560,705 - Eiriksson , et al. July 14, 2	2009-07-14
Environmental Isolation System For Flat Panel Displays App 20080156679 - Bonora; Anthony C. ; et al.	2008-07-03
Workpiece Handling Scan Arm For Ion Implantation System App 20080105836 - Eiriksson; Ari ; et al.	2008-05-08
Combination load lock for handling workpieces App 20070264105 - Pharand; Michel ; et al.	2007-11-15
High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer Grant 7,151,658 - Kellerman , et al. December 19, 2	2006-12-19
Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit Grant 7,100,759 - Pharand , et al. September 5, 2	2006-09-05
Uniform gas cushion wafer support Grant 7,070,661 - Eiriksson , et al. July 4, 2	2006-07-04
Apparatus for positioning an elevator tube Grant 7,026,581 - Pharand , et al. April 11, 2	2006-04-11
Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit App 20060027440 - Pharand; Michel ; et al.	2006-02-09
Ceramic end effector for micro circuit manufacturing App 20050110292 - Baumann, Paul W. ; et al.	2005-05-26
Uniform gas cushion wafer support App 20050039685 - Eiriksson, Ari ; et al.	2005-02-24
Method of positioning an elevator tube App 20050042807 - Pharand, Michel ; et al.	2005-02-24
High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer App 20040212946 - Kellerman, Peter L. ; et al.	2004-10-28
Ceramic end effector for micro circuit manufacturing App 20040100110 - Baumann, Paul W. ; et al.	2004-05-27
Wafer pedestal tilt mechanism Grant 6,727,509 - Pharand , et al. April 27, 2	2004-04-27
Wafer pedestal tilt mechanism App 20030111617 - Pharand, Michel ; et al.	2003-06-19
Method and apparatus for monitoring charge neutralization operation Grant 5,959,305 - Mack , et al. September 28, 1	1999-09-28

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