PHAN; Khoi Anh
Patent Applications and Registrations
Patent applications and USPTO patent grants for PHAN; Khoi Anh.The latest application filed is for "low temp single precursor arc hard mask for multilayer patterning application".
- PHAN; Khoi Anh - San Jose CA
| Patent | Date |
|---|---|
| Low Temp Single Precursor Arc Hard Mask For Multilayer Patterning Application App 20170125241 - MUKHERJEE; Shaunak ; et al. | 2017-05-04 |
| Focus monitor structure and method for lithography process Grant 6,063,531 - Singh , et al. May 16, 2 | 2000-05-16 |
| Defect diagnosis using simulation for IC yield improvement Grant 5,886,909 - Milor , et al. March 23, 1 | 1999-03-23 |
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