Phan; Khoi A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Phan; Khoi A..The latest application filed is for "heat regulating device for an integrated circuit".

Company Profile

0.62.11

Phan; Khoi A. - San Jose CA
Phan; Khoi A - San Jose CA
Phan; Khoi A. - Santa Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Mitigating heat in an integrated circuit Grant 8,028,531 - Phan , et al. October 4, 2	2011-10-04
System and method for imprint lithography to facilitate dual damascene integration in a single imprint act Grant 7,709,373 - Dakshina-Murthy , et al. May 4, 2	2010-05-04
Heat Regulating Device For An Integrated Circuit App 20090288425 - Phan; Khoi A. ; et al.	2009-11-26
Mask having sidewall absorbers to enable the printing of finer features in nanoprint lithography (1XMASK) Grant 7,604,903 - Singh , et al. October 20, 2	2009-10-20
Recirculation and reuse of dummy dispensed resist Grant 7,591,902 - Rangarajan , et al. September 22, 2	2009-09-22
Feedback control of imprint mask feature profile using scatterometry and spacer etchback Grant 7,449,348 - Dakshina-Murthy , et al. November 11, 2	2008-11-11
Using supercritical fluids to clean lenses and monitor defects Grant 7,381,278 - Subramanian , et al. June 3, 2	2008-06-03
Recirculation And Reuse Of Dummy Dispensed Resist App 20070261636 - Rangarajan; Bharath ; et al.	2007-11-15
Systems and methods of imprint lithography with adjustable mask Grant 7,295,288 - Subramanian , et al. November 13, 2	2007-11-13
Frame structure for turbulence control in immersion lithography Grant 7,289,193 - Subramanian , et al. October 30, 2	2007-10-30
Use of supercritical fluid to dry wafer and clean lens in immersion lithography Grant 7,262,422 - Subramanian , et al. August 28, 2	2007-08-28
Composite alignment mark scheme for multi-layers in lithography Grant 7,221,060 - Singh , et al. May 22, 2	2007-05-22
Systems and methods that employ exposure compensation to provide uniform CD control on reticle during fabrication Grant 7,187,796 - Phan , et al. March 6, 2	2007-03-06
Use of supercritical fluid to dry wafer and clean lens in immersion lithography App 20070026345 - Subramanian; Ramkumar ; et al.	2007-02-01
Use of non-lithographic shrink techniques for fabrication/making of imprints masks Grant 7,159,205 - Amblard , et al. January 2, 2	2007-01-02
Real time immersion medium control using scatterometry Grant 7,158,896 - Singh , et al. January 2, 2	2007-01-02
Using supercritical fluids to clean lenses and monitor defects Grant 7,156,925 - Subramanian , et al. January 2, 2	2007-01-02
Re-circulation and reuse of dummy-dispensed resist Grant 7,153,364 - Rangarajan , et al. December 26, 2	2006-12-26
System and method for imprint lithography to facilitate dual damascene integration in a single imprint act Grant 7,148,142 - Dakshina-Murthy , et al. December 12, 2	2006-12-12
Surface oxide tabulation and photo process control and cost savings Grant 7,109,046 - Subramanian , et al. September 19, 2	2006-09-19
Barcode marking of wafer products for inventory control Grant 7,100,826 - Phan , et al. September 5, 2	2006-09-05
Scatterometry monitor in cluster process tool environment for advanced process control (APC) Grant 7,076,320 - Phan , et al. July 11, 2	2006-07-11
Multi-layer overlay measurement and correction technique for IC manufacturing Grant 7,065,737 - Phan , et al. June 20, 2	2006-06-20
Optical monitoring and control of two layers of liquid immersion media Grant 7,065,427 - Dakshina-Murthy , et al. June 20, 2	2006-06-20
Non-lithographic shrink techniques for improving line edge roughness and using imperfect (but simpler) BARCs Grant 7,064,846 - Amblard , et al. June 20, 2	2006-06-20
Use of base developers as immersion lithography fluid Grant 7,056,646 - Amblard , et al. June 6, 2	2006-06-06
System and method for defect identification and location using an optical indicia device Grant 7,034,930 - Subramanian , et al. April 25, 2	2006-04-25
System and method of pattern recognition and metrology structure for an X-initiative layout design Grant 7,001,830 - Phan , et al. February 21, 2	2006-02-21
Refractive index system monitor and control for immersion lithography Grant 6,999,254 - Phan , et al. February 14, 2	2006-02-14
Electrical critical dimension measurement and defect detection for reticle fabrication Grant 6,972,576 - Lyons , et al. December 6, 2	2005-12-06
Using scatterometry to detect and control undercut for ARC with developable BARCs Grant 6,972,201 - Subramanian , et al. December 6, 2	2005-12-06
Artificial intelligence system for track defect problem solving Grant 6,954,678 - Phan , et al. October 11, 2	2005-10-11
Multi-layer overlay measurement and correction technique for IC manufacturing App 20050193362 - Phan, Khoi A. ; et al.	2005-09-01
Real time particle monitor inside of plasma chamber during resist strip processing Grant 6,924,157 - Phan , et al. August 2, 2	2005-08-02
Comprehensive integrated lithographic process control system based on product design and yield feedback system Grant 6,915,177 - Phan , et al. July 5, 2	2005-07-05
Pattern recognition and metrology structure for an x-initiative layout design App 20050048741 - Phan, Khoi A. ; et al.	2005-03-03
Refractive index system monitor and control for immersion lithography Grant 6,844,206 - Phan , et al. January 18, 2	2005-01-18
Quartz mask crack monitor system for reticle by acoustic and/or laser scatterometry Grant 6,818,360 - Phan , et al. November 16, 2	2004-11-16
System and method to monitor reticle heating Grant 6,809,793 - Phan , et al. October 26, 2	2004-10-26
Model based metal overetch control Grant 6,808,591 - Phan , et al. October 26, 2	2004-10-26
Reticle defect printability verification by resist latent image comparison Grant 6,784,446 - Phan , et al. August 31, 2	2004-08-31
Scatterometry of grating structures to monitor wafer stress Grant 6,771,356 - Lyons , et al. August 3, 2	2004-08-03
System and method for control of hardmask etch to prevent pattern collapse of ultra-thin resists Grant 6,762,133 - Rangarajan , et al. July 13, 2	2004-07-13
Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process Grant 6,759,179 - Phan , et al. July 6, 2	2004-07-06
In-situ chemical composition monitor on wafer during plasma etching for defect control Grant 6,753,261 - Phan , et al. June 22, 2	2004-06-22
Method and system to monitor and control electro-static discharge Grant 6,741,445 - Phan , et al. May 25, 2	2004-05-25
Low defect metrology approach on clean track using integrated metrology Grant 6,724,476 - Phan , et al. April 20, 2	2004-04-20
Comprehensive integrated lithographic process control system based on product design and yield feedback system App 20040063009 - Phan, Khoi A. ; et al.	2004-04-01
Sensor to predict void free films using various grating structures and characterize fill performance Grant 6,684,172 - Subramanian , et al. January 27, 2	2004-01-27
Vapor drying for cleaning photoresists Grant 6,663,723 - Templeton , et al. December 16, 2	2003-12-16
Defect detection in pellicized reticles via exposure at short wavelengths Grant 6,665,065 - Phan , et al. December 16, 2	2003-12-16
Controlling thermal expansion of mask substrates by scatterometry Grant 6,654,660 - Singh , et al. November 25, 2	2003-11-25
Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process Grant 6,649,525 - Phan , et al. November 18, 2	2003-11-18
Parallel plate development Grant 6,634,805 - Templeton , et al. October 21, 2	2003-10-21
System and method for illuminating a semiconductor processing system Grant 6,632,283 - Singh , et al. October 14, 2	2003-10-14
Low defect EBR nozzle Grant 6,612,319 - Rangarajan , et al. September 2, 2	2003-09-02
Reducing resist residue defects in open area on patterned wafer using trim mask Grant 6,613,500 - Phan , et al. September 2, 2	2003-09-02
Monitor CMP process using scatterometry Grant 6,594,024 - Singh , et al. July 15, 2	2003-07-15
System and method for facilitating detection of defects on a wafer Grant 6,559,457 - Phan , et al. May 6, 2	2003-05-06
Nozzle arm movement for resist development App 20030068430 - Subramanian, Ramkumar ; et al.	2003-04-10
In-situ or ex-situ profile monitoring of phase openings on alternating phase shifting masks by scatterometry App 20030052084 - Tabery, Cyrus E. ; et al.	2003-03-20
System and method to facilitate removal of defects from a substrate Grant 6,486,072 - Phan , et al. November 26, 2	2002-11-26
Modification of mask layout data to improve mask fidelity App 20020160281 - Subramanian, Ramkumar ; et al.	2002-10-31
In-situ thickness measurement for use in semiconductor processing App 20020142493 - Halliyal, Arvind ; et al.	2002-10-03
UV-enhanced silylation process to increase etch resistance of ultra thin resists Grant 6,451,512 - Rangarajan , et al. September 17, 2	2002-09-17
Modification of mask layout data to improve mask fidelity Grant 6,444,373 - Subramanian , et al. September 3, 2	2002-09-03
Electron beam flood exposure technique to reduce the carbon contamination Grant 6,444,381 - Singh , et al. September 3, 2	2002-09-03
Analysis of CD-SEM signal to detect scummed/closed contact holes and lines Grant 6,373,053 - Choo , et al. April 16, 2	2002-04-16
Parallel inspection of semiconductor wafers by a plurality of different inspection stations to maximize throughput Grant 6,320,402 - Phan , et al. November 20, 2	2001-11-20
Ozone cleaning of wafers App 20010010229 - Subramanian, Ramkumar ; et al.	2001-08-02
Apparatus and method for reducing defects in a semiconductor lithographic process Grant 6,222,936 - Phan , et al. April 24, 2	2001-04-24
Low cost application of oxide test wafer for defect monitor in photolithography process Grant 6,171,737 - Phan , et al. January 9, 2	2001-01-09
Method for reducing defects in a semiconductor lithographic process Grant 5,985,497 - Phan , et al. November 16, 1	1999-11-16

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