Pham; Tuyen Paul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pham; Tuyen Paul.The latest application filed is for "temperature controlled wafer chuck system with low thermal resistance".
- Pham; Tuyen Paul - Sunland CA
| Patent | Date |
|---|---|
| Temperature controlled wafer chuck system with low thermal resistance Grant 6,605,955 - Costello , et al. August 12, 2 | 2003-08-12 |
| Temperature-controlled semiconductor wafer chuck system Grant 6,583,638 - Costello , et al. June 24, 2 | 2003-06-24 |
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