Pham; Thanh N.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pham; Thanh N..The latest application filed is for "corrosion-resistant gas distribution plate for plasma processing chamber".
- Pham; Thanh N. - San Jose CA
- Pham; Thanh N - San Jose CA
| Patent | Date |
|---|---|
| Deposition-selective etch-deposition process for dielectric film gapfill Grant 7,799,698 - Zhang , et al. September 21, 2 | 2010-09-21 |
| Deposition-selective etch-deposition process for dielectric film gapfill Grant 7,691,753 - Zhang , et al. April 6, 2 | 2010-04-06 |
| Corrosion-resistant gas distribution plate for plasma processing chamber App 20090087615 - Sun; Jennifer Y. ; et al. | 2009-04-02 |
| Gas delivery system for semiconductor processing Grant 7,498,268 - Gondhalekar , et al. March 3, 2 | 2009-03-03 |
| Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate Grant 7,479,304 - Sun , et al. January 20, 2 | 2009-01-20 |
| Sequential gas flow oxide deposition technique Grant 7,399,388 - Moghadam , et al. July 15, 2 | 2008-07-15 |
| In-situ-etch-assisted HDP deposition Grant 7,294,588 - Karim , et al. November 13, 2 | 2007-11-13 |
| Gas Delivery System For Semiconductor Processing App 20070048446 - Gondhalekar; Sudhir ; et al. | 2007-03-01 |
| Gas delivery system for semiconductor processing Grant 7,141,138 - Gondhalekar , et al. November 28, 2 | 2006-11-28 |
| Deposition-selective Etch-deposition Process For Dielectric Film Gapfill App 20060228886 - Zhang; Lin ; et al. | 2006-10-12 |
| Deposition process for high aspect ratio trenches Grant 7,097,886 - Moghadam , et al. August 29, 2 | 2006-08-29 |
| In-situ-etch-assisted HDP deposition App 20060166515 - Karim; M. Ziaul ; et al. | 2006-07-27 |
| Deposition-selective etch-deposition process for dielectric film gapfill Grant 7,081,414 - Zhang , et al. July 25, 2 | 2006-07-25 |
| In-situ-etch-assisted HDP deposition using SiF.sub.4 Grant 7,049,211 - Karim , et al. May 23, 2 | 2006-05-23 |
| Gap filling with a composite layer Grant 7,033,945 - Byun , et al. April 25, 2 | 2006-04-25 |
| Gap filling with a composite layer App 20050277257 - Byun, Jeong Soo ; et al. | 2005-12-15 |
| In-situ-etch-assisted HDP deposition using SiF4 App 20050164517 - Karim, M. Ziaul ; et al. | 2005-07-28 |
| In-situ-etch-assisted HDP deposition using SiF4 and hydrogen Grant 6,903,031 - Karim , et al. June 7, 2 | 2005-06-07 |
| Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate App 20050056218 - Sun, Jennifer Y. ; et al. | 2005-03-17 |
| In-situ-etch-assisted HDP deposition using SiF4 and hydrogen App 20050048801 - Karim, M. Ziaul ; et al. | 2005-03-03 |
| Sequential gas flow oxide deposition technique App 20050019494 - Moghadam, Farhad K. ; et al. | 2005-01-27 |
| [deposition-selective Etch-deposition Process For Dielectric Film Gapfill] App 20040251236 - Zhang, Lin ; et al. | 2004-12-16 |
| Gas delivery system for semiconductor processing App 20040231798 - Gondhalekar, Sudhir ; et al. | 2004-11-25 |
| Gas delivery system for semiconductor processing App 20040126952 - Gondhalekar, Sudhir ; et al. | 2004-07-01 |
| Deposition process for high aspect ratio trenches App 20040115898 - Moghadam, Farhad K. ; et al. | 2004-06-17 |
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