Patent | Date |
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Beam focusing and reflective optics Grant 10,989,601 - Liphardt , et al. April 27, 2 | 2021-04-27 |
Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error Grant 10,859,439 - Lihardt , et al. December 8, 2 | 2020-12-08 |
Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing Grant 10,775,298 - Hassler , et al. Sept | 2020-09-15 |
Theta-theta sample positioning stage with application to sample mapping using reflectometer, spectrophotometer or ellipsometer system Grant 10,444,140 - Hovorka , et al. Oc | 2019-10-15 |
Beam focusing and reflecting optics with enhanced detector system Grant 10,338,362 - Liphardt , et al. | 2019-07-02 |
Beam focusing and reflective optics Grant 10,018,815 - Liphardt , et al. July 10, 2 | 2018-07-10 |
Beam focusing and beam collecting optics with wavelength dependent filter element adjustment of beam area Grant 9,921,395 - Liphardt , et al. March 20, 2 | 2018-03-20 |
System for viewing samples that are undergoing ellipsometric investigation in real time Grant 9,658,151 - Liphardt , et al. May 23, 2 | 2017-05-23 |
Beam Focusing And Beam Collecting Optics App 20160356998 - LIPHARDT; MARTIN M. ;   et al. | 2016-12-08 |
Beam focusing and beam collecting optics Grant 9,500,843 - Liphardt , et al. November 22, 2 | 2016-11-22 |
Reflective focusing optics Grant 9,442,016 - Liphardt , et al. September 13, 2 | 2016-09-13 |
System for determining average ellipsometric parameters for planar or non-planar shaped objects, and method of its use Grant 9,360,369 - Pfeiffer , et al. June 7, 2 | 2016-06-07 |
In line ellipsometer system and method of use Grant 9,347,768 - Pfeiffer , et al. May 24, 2 | 2016-05-24 |
Reflective focusing optics App 20150355029 - Liphardt; Martin M. ;   et al. | 2015-12-10 |
System for viewing samples that are undergoing ellipsometric investigation in real time App 20150185136 - Liphardt; Martin M. ;   et al. | 2015-07-02 |
System for viewing samples that are undergoing ellipsometric investigation in real time Grant 8,953,030 - Liphardt , et al. February 10, 2 | 2015-02-10 |
DLP base small spot investigation system Grant 8,749,782 - Liphardt , et al. June 10, 2 | 2014-06-10 |
Small volume cell Grant 8,531,665 - Pfeiffer , et al. September 10, 2 | 2013-09-10 |
Small volume cell Grant 8,493,565 - Pfeiffer , et al. July 23, 2 | 2013-07-23 |
Fast sample height, AOI and POI alignment in mapping ellipsometer or the like Grant 8,436,994 - Liphardt , et al. May 7, 2 | 2013-05-07 |
Small volume cell Grant 8,130,375 - Pfeiffer , et al. March 6, 2 | 2012-03-06 |
Fast sample height, AOI and POI alignment in mapping ellipsometer or the like App 20110109906 - Liphardt; Martin M. ;   et al. | 2011-05-12 |
Fast sample height, AOI and POI alignment in mapping ellipsometer or the like Grant 7,872,751 - Liphardt , et al. January 18, 2 | 2011-01-18 |
System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters Grant 7,830,512 - Pfeiffer , et al. November 9, 2 | 2010-11-09 |
System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing Grant 7,821,637 - Pfeiffer , et al. October 26, 2 | 2010-10-26 |
Small volume cell Grant 7,817,266 - Pfeiffer , et al. October 19, 2 | 2010-10-19 |
System and method of controlling intensity of an electromagnetic beam Grant 7,796,260 - Johs , et al. September 14, 2 | 2010-09-14 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,633,625 - Woollam , et al. December 15, 2 | 2009-12-15 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,616,319 - Woollam , et al. November 10, 2 | 2009-11-10 |
System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters App 20090231700 - Pfeiffer; Galen L. ;   et al. | 2009-09-17 |
Beam chromatic shifting and directing means Grant 7,535,566 - Johs , et al. May 19, 2 | 2009-05-19 |
Fast sample height, AOI and POI alignment in mapping ellipsometer or the like App 20090103093 - Liphardt; Martin M. ;   et al. | 2009-04-23 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths Grant 7,508,510 - Pfeiffer , et al. March 24, 2 | 2009-03-24 |
Small volume cell App 20090027679 - Pfeiffer; Galen L. ;   et al. | 2009-01-29 |
System for reducing stress induced effects during determination of fluid optical constants Grant 7,349,092 - Tiwald , et al. March 25, 2 | 2008-03-25 |
Spectrophotometer, ellipsometer, polarimeter and the like systems Grant 7,327,456 - Woollam , et al. February 5, 2 | 2008-02-05 |
Aspects of producing, directing, conditioning, impinging and detecting spectroscopic electromagnetic radiation from small spots on samples Grant 7,317,529 - Liphardt , et al. January 8, 2 | 2008-01-08 |
Control of uncertain angle of incidence of beam from Arc lamp Grant 7,301,631 - Johs , et al. November 27, 2 | 2007-11-27 |
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems Grant 7,274,450 - Green , et al. September 25, 2 | 2007-09-25 |
System for implementing variable retarder capability in ellipsometer, polarimeter or the like systems Grant 7,265,835 - Herzinger , et al. September 4, 2 | 2007-09-04 |
System for and method of investigating the exact same point on a sample substrate with multiple wavelengths App 20070097373 - Pfeiffer; Galen L. ;   et al. | 2007-05-03 |
Spectroscopic ellipsometer and polarimeter systems Grant 7,158,231 - Woollam , et al. January 2, 2 | 2007-01-02 |
Alignment of ellipsometer beam to sample surface Grant 7,136,162 - Liphardt , et al. November 14, 2 | 2006-11-14 |
System and method for setting and compensating errors in AOI and POI of a beam of EM radiation Grant 7,136,172 - Johs , et al. November 14, 2 | 2006-11-14 |
Ellipsometer or polarimeter and the like system with beam chromatic shifting and directing means Grant 7,099,006 - Johs , et al. August 29, 2 | 2006-08-29 |
Spectrophotometer, ellipsometer, polarimeter and the like systems Grant 6,982,792 - Woollam , et al. January 3, 2 | 2006-01-03 |
System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation Grant 6,937,341 - Woollam , et al. August 30, 2 | 2005-08-30 |