| Patent | Date |
|---|
Trusted field programmable gate array
Grant 11,379,125 - Plouchart , et al. July 5, 2 | 2022-07-05 |
Tamper-resistant Circuit, Back-end Of The Line Memory And Physical Unclonable Function For Supply Chain Protection
App 20220020706 - Plouchart; Jean-Olivier ; et al. | 2022-01-20 |
Tamper Resistant Obfuscation Circuit
App 20220019703 - Plouchart; Jean-Olivier ; et al. | 2022-01-20 |
Encryption engine with an undetectable/tamper-proof private key in late node CMOS technology
Grant 11,216,595 - Boivie , et al. January 4, 2 | 2022-01-04 |
Secure Chip Identification Using Resistive Processing Unit As A Physically Unclonable Function
App 20210342489 - Kumar; Arvind ; et al. | 2021-11-04 |
Method for product authentication using a microfluidic reader
Grant 11,164,190 - Pfeiffer , et al. November 2, 2 | 2021-11-02 |
Zonal nanofluidic anti-tamper device for product authentication
Grant 11,162,950 - Pfeiffer , et al. November 2, 2 | 2021-11-02 |
Encryption engine with an undetectable/tamper proof private key in late node CMOS technology
Grant 10,997,321 - Boivie , et al. May 4, 2 | 2021-05-04 |
Lithographically defined intrinsic identifier
Grant 10,778,422 - Pfeiffer , et al. Sept | 2020-09-15 |
Screen printed phosphors for intrinsic chip identifiers
Grant 10,721,082 - Pfeiffer , et al. | 2020-07-21 |
Method For Product Authentication Using A Microfluidic Reader
App 20200175524 - Pfeiffer; Dirk ; et al. | 2020-06-04 |
Use Of Microfluidic Reader Device For Product Authentication
App 20200175235 - Pfeiffer; Dirk ; et al. | 2020-06-04 |
Zonal Nanofluidic Anti-Tamper Device for Product Authentication
App 20200174010 - Pfeiffer; Dirk ; et al. | 2020-06-04 |
Encryption Engine With An Undetectable/tamper-proof Private Key In Late Node Cmos Technology
App 20200019731 - Boivie; Richard H. ; et al. | 2020-01-16 |
Encryption Engine With An Undetectable/tamper-proof Private Key In Late Node Cmos Technology
App 20200019732 - Boivie; Richard H. ; et al. | 2020-01-16 |
Graphene-based micro-scale identification system
Grant 10,430,700 - Valdes Garcia , et al. O | 2019-10-01 |
Encryption engine with an undetectable/tamper-proof private key in late node CMOS technology
Grant 10,423,805 - Boivie , et al. Sept | 2019-09-24 |
Graphene-based micro-scale identification system
Grant 10,157,338 - Valdes Garcia , et al. Dec | 2018-12-18 |
Encryption Engine With An Undetectable/tamper-proof Private Key In Late Node Cmos Technology
App 20180181774 - Boivie; Richard H. ; et al. | 2018-06-28 |
Integrated time dependent dielectric breakdown reliability testing
Grant 9,939,486 - Chen , et al. April 10, 2 | 2018-04-10 |
Integrated time dependent dielectric breakdown reliability testing
Grant 9,874,601 - Chen , et al. January 23, 2 | 2018-01-23 |
Screen Printed Phosphors For Intrinsic Chip Identifiers
App 20180017509 - Pfeiffer; Dirk ; et al. | 2018-01-18 |
Lithographically Defined Intrinsic Identifier
App 20180019881 - Pfeiffer; Dirk ; et al. | 2018-01-18 |
Graphene-based Micro-scale Identification System
App 20170323186 - VALDES GARCIA; Alberto ; et al. | 2017-11-09 |
Carbon nanotube array for cryptographic key generation and protection
Grant 9,787,473 - Haensch , et al. October 10, 2 | 2017-10-10 |
Carbon nanostructure device fabrication utilizing protect layers
Grant 9,768,288 - Chu , et al. September 19, 2 | 2017-09-19 |
Carbon Nanostructure Device Fabrication Utilizing Protect Layers
App 20170186881 - CHU; JACK O. ; et al. | 2017-06-29 |
Security model for a memory of a network information system
Grant 9,692,858 - Jain , et al. June 27, 2 | 2017-06-27 |
Carbon nanotube array for cryptographic key generation and protection
Grant 9,660,806 - Haensch , et al. May 23, 2 | 2017-05-23 |
Integrated Time Dependent Dielectric Breakdown Reliability Testing
App 20170122999 - Chen; Jifeng ; et al. | 2017-05-04 |
Carbon Nanotube Array for Cryptographic Key Generation and Protection
App 20170063543 - Haensch; Wilfried ; et al. | 2017-03-02 |
Graphene layers for identification of products
Grant 9,568,421 - Farmer , et al. February 14, 2 | 2017-02-14 |
Integrated time dependent dielectric breakdown reliability testing
Grant 9,557,369 - Chen , et al. January 31, 2 | 2017-01-31 |
Integrated Time Dependent Dielectric Breakdown Reliability Testing
App 20170010322 - Chen; Jifeng ; et al. | 2017-01-12 |
Chip authentication using scan chains
Grant 9,506,983 - Motika , et al. November 29, 2 | 2016-11-29 |
Graphene layers for identification of products
Grant 9,493,025 - Farmer , et al. November 15, 2 | 2016-11-15 |
Graphene Layers For Identification Of Products
App 20160325580 - Farmer; Damon B. ; et al. | 2016-11-10 |
Graphene cap for copper interconnect structures
Grant 9,472,450 - Bonilla , et al. October 18, 2 | 2016-10-18 |
Methods and structures for protecting one area while processing another area on a chip
Grant 9,472,402 - Kim , et al. October 18, 2 | 2016-10-18 |
Integrated time dependent dielectric breakdown reliability testing
Grant 9,448,277 - Chen , et al. September 20, 2 | 2016-09-20 |
Graphene Layers For Identification Of Products
App 20160207345 - Farmer; Damon B. ; et al. | 2016-07-21 |
Wafer scale epitaxial graphene transfer
Grant 9,394,178 - Bedell , et al. July 19, 2 | 2016-07-19 |
Carbon Nanotube Array for Cryptographic Key Generation and Protection
App 20160191255 - Haensch; Wilfried ; et al. | 2016-06-30 |
Physical unclonable function generation and management
Grant 9,337,837 - Pfeiffer , et al. May 10, 2 | 2016-05-10 |
Methods for fabrication interconnect structures with functional components and electrical conductive contact structures on a same level
Grant 9,236,298 - Lin , et al. January 12, 2 | 2016-01-12 |
Wafer Scale Epitaxial Graphene Transfer
App 20150336800 - BEDELL; STEPHEN W. ; et al. | 2015-11-26 |
Physical unclonable function generation and management
Grant 9,184,751 - Pfeiffer , et al. November 10, 2 | 2015-11-10 |
Interconnect Structure And Method For Fabricating On-chip Interconnect Structures By Image Reversal
App 20150270219 - BRUCE; ROBERT L. ; et al. | 2015-09-24 |
Interconnect Structures With Functional Components And Methods For Fabrication
App 20150255337 - LIN; QINGHUANG ; et al. | 2015-09-10 |
Physical Unclonable Function Generation And Management
App 20150236693 - PFEIFFER; DIRK ; et al. | 2015-08-20 |
Chip Authentication Using Scan Chains
App 20150219718 - MOTIKA; FRANCO ; et al. | 2015-08-06 |
Wafer scale epitaxial graphene transfer
Grant 9,096,050 - Bedell , et al. August 4, 2 | 2015-08-04 |
Physical unclonable function generation and management
Grant 9,088,278 - Pfeiffer , et al. July 21, 2 | 2015-07-21 |
Detecting chip alterations with light emission
Grant 9,075,106 - Bernstein , et al. July 7, 2 | 2015-07-07 |
Chip authentication using scan chains
Grant 9,069,989 - Motika , et al. June 30, 2 | 2015-06-30 |
Graphene resistor based tamper resistant identifier with contactless reading
Grant 9,059,188 - Dimitrakopoulos , et al. June 16, 2 | 2015-06-16 |
Methods and structures for protecting one area while processing another area on a chip
Grant 9,059,000 - Kim , et al. June 16, 2 | 2015-06-16 |
Interconnect structure and method for fabricating on-chip interconnect structures by image reversal
Grant 9,054,160 - Bruce , et al. June 9, 2 | 2015-06-09 |
Reliable physical unclonable function for device authentication
Grant 8,971,527 - BrightSky , et al. March 3, 2 | 2015-03-03 |
Methods and Structures for Protecting One Area While Processing Another Area on a Chip
App 20150004802 - Kim; Deok-kee ; et al. | 2015-01-01 |
Carbon Nanostructure Device Fabrication Utilizing Protect Layers
App 20140374702 - CHU; JACK O. ; et al. | 2014-12-25 |
Interconnect structure and method of fabricating
Grant 8,916,978 - Lin , et al. December 23, 2 | 2014-12-23 |
Method of forming a graphene cap for copper interconnect structures
Grant 8,895,433 - Bonilla , et al. November 25, 2 | 2014-11-25 |
Physical Unclonable Function Generation And Management
App 20140327469 - PFEIFFER; Dirk ; et al. | 2014-11-06 |
Physical Unclonable Function Generation And Management
App 20140327468 - Pfeiffer; Dirk ; et al. | 2014-11-06 |
Low cost secure chip identification
Grant 8,877,525 - Leobandung , et al. November 4, 2 | 2014-11-04 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
Grant 8,867,024 - Lai , et al. October 21, 2 | 2014-10-21 |
Integrated circuit tamper detection and response
Grant 8,861,728 - Chu , et al. October 14, 2 | 2014-10-14 |
Multi-doped silicon antifuse device for integrated circuit
Grant 8,860,176 - Fritz , et al. October 14, 2 | 2014-10-14 |
Reliable physical unclonable function for device authentication
Grant 8,861,736 - BrightSky , et al. October 14, 2 | 2014-10-14 |
Wafer Scale Epitaxial Graphene Transfer
App 20140291282 - Bedell; Stephen W. ; et al. | 2014-10-02 |
Carbon nanostructure device fabrication utilizing protect layers
Grant 8,828,762 - Chu , et al. September 9, 2 | 2014-09-09 |
Reactive material for integrated circuit tamper detection and response
Grant 8,816,717 - Fritz , et al. August 26, 2 | 2014-08-26 |
Carbon Nanostructure Device Fabrication Utilizing Protect Layers
App 20140225193 - CHU; JACK O. ; et al. | 2014-08-14 |
Integrated Time Dependent Dielectric Breakdown Reliability Testing
App 20140207396 - Chen; Jifeng ; et al. | 2014-07-24 |
Authentication using graphene based devices as physical unclonable functions
Grant 8,766,258 - Dimitrakopoulos , et al. July 1, 2 | 2014-07-01 |
Structure with sub-lithographic random conductors as a physical unclonable function
Grant 8,759,976 - Edelstein , et al. June 24, 2 | 2014-06-24 |
Authentication Using Graphene Based Devices As Physical Unclonable Functions
App 20140162464 - Dimitrakopoulos; Christos D. ; et al. | 2014-06-12 |
Authentication Using Graphene Based Devices As Physical Unclonable Functions
App 20140159040 - DIMITRAKOPOULOS; CHRISTOS D. ; et al. | 2014-06-12 |
Reliable physical unclonable function for device authentication
Grant 8,741,713 - Bruley , et al. June 3, 2 | 2014-06-03 |
Reliable Physical Unclonable Function For Device Authentication
App 20140140502 - BRIGHTSKY; MATTHEW J. ; et al. | 2014-05-22 |
Reliable Physical Unclonable Function For Device Authentication
App 20140140513 - BrightSky; Matthew J. ; et al. | 2014-05-22 |
Method Of Forming A Graphene Cap For Copper Interconnect Structures
App 20140127896 - Bonilla; Griselda ; et al. | 2014-05-08 |
Integrated Circuit Tamper Detection And Response
App 20140103286 - Chu; Jack O. ; et al. | 2014-04-17 |
Antifuse Device For Integrated Circuit
App 20140103485 - FRITZ; GREGORY M. ; et al. | 2014-04-17 |
Reactive Material For Integrated Circuit Tamper Detection And Response
App 20140103957 - Fritz; Gregory M. ; et al. | 2014-04-17 |
Bilayer gate dielectric with low equivalent oxide thickness for graphene devices
Grant 8,680,511 - Dimitrakopoulos , et al. March 25, 2 | 2014-03-25 |
Reliable Physical Unclonable Function For Device Authentication
App 20140042442 - BRULEY; JOHN ; et al. | 2014-02-13 |
Structure With Sub-lithographic Random Conductors As A Physical Unclonable Function
App 20140042628 - Edelstein; Daniel C. ; et al. | 2014-02-13 |
Electronic Structure Containing A Via Array As A Physical Unclonable Function
App 20140042627 - Edelstein; Daniel C. ; et al. | 2014-02-13 |
Security Model For A Memory Of A Network Information System
App 20140026191 - JAIN; Bhushan P. ; et al. | 2014-01-23 |
Method of forming a graphene cap for copper interconnect structures
Grant 8,623,761 - Bonilla , et al. January 7, 2 | 2014-01-07 |
Integrated Time Dependent Dielectric Breakdown Reliability Testing
App 20130345997 - CHEN; JIFENG ; et al. | 2013-12-26 |
Process of making a lithographic structure using antireflective materials
Grant 8,609,322 - Angelopoulos , et al. December 17, 2 | 2013-12-17 |
Graphene Cap For Copper Interconnect Structures
App 20130299988 - Bonilla; Griselda ; et al. | 2013-11-14 |
Method Of Forming A Graphene Cap For Copper Interconnect Structures
App 20130302978 - Bonilla; Griselda ; et al. | 2013-11-14 |
Reliable physical unclonable function for device authentication
Grant 8,525,169 - Edelstein , et al. September 3, 2 | 2013-09-03 |
Bilayer Gate Dielectric With Low Equivalent Oxide Thickness For Graphene Devices
App 20130207080 - Dimitrakopoulos; Christos D. ; et al. | 2013-08-15 |
Chip Authentication Using Scan Chains
App 20130198873 - MOTIKA; FRANCO ; et al. | 2013-08-01 |
Interconnect Structures With Functional Components And Methods For Fabrication
App 20130062732 - LIN; QINGHUANG ; et al. | 2013-03-14 |
Process Of Making A Lithographic Structure Using Antireflective Materials
App 20130017486 - Angelopoulos; Marie ; et al. | 2013-01-17 |
Interconnect Structure And Method Of Fabricating
App 20130009323 - Lin; Qinghuang ; et al. | 2013-01-10 |
Interconnect structure and method of fabricating
Grant 8,334,203 - Lin , et al. December 18, 2 | 2012-12-18 |
Antireflective hardmask composition and a method of preparing a patterned material using same
Grant 8,323,871 - Burns , et al. December 4, 2 | 2012-12-04 |
Process of making a lithographic structure using antireflective materials
Grant 8,293,454 - Angelopoulos , et al. October 23, 2 | 2012-10-23 |
Interconnect Structure And Method For Fabricating On-chip Interconnect Structures By Image Reversal
App 20120261828 - BRUCE; ROBERT L. ; et al. | 2012-10-18 |
Reflective Film Interface To Restore Transverse Magnetic Wave Contrast In Lithographic Processing
App 20120092633 - Lai; Kafai ; et al. | 2012-04-19 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 8,137,997 - Colburn , et al. March 20, 2 | 2012-03-20 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 8,137,996 - Colburn , et al. March 20, 2 | 2012-03-20 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
Grant 8,125,618 - Lai , et al. February 28, 2 | 2012-02-28 |
Molecular spacer layer for semiconductor oxide surface and high-K dielectric stack
Grant 8,124,485 - Goldfarb , et al. February 28, 2 | 2012-02-28 |
Interconnect Structure And Method Of Fabricating
App 20110304053 - Lin; Qinghuang ; et al. | 2011-12-15 |
Self-Segregating Multilayer Imaging Stack With Built-In Antireflective Properties
App 20110300483 - Cheng; Joy ; et al. | 2011-12-08 |
Self-Segregating Multilayer Imaging Stack With Built-In Antireflective Properties
App 20110294068 - Cheng; Joy ; et al. | 2011-12-01 |
Antireflective Hardmask Composition and a Method of Preparing a Patterned Material Using Same
App 20110207047 - Burns; Sean D. ; et al. | 2011-08-25 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,982,312 - Colburn , et al. July 19, 2 | 2011-07-19 |
Process of making a semiconductor device using multiple antireflective materials
Grant 7,968,270 - Angelopoulos , et al. June 28, 2 | 2011-06-28 |
Multiple exposure lithography method incorporating intermediate layer patterning
Grant 7,914,975 - Burns , et al. March 29, 2 | 2011-03-29 |
Radiation-sensitive composition and method of fabricating a device using the radiation-sensitive composition
Grant 7,901,864 - Huang , et al. March 8, 2 | 2011-03-08 |
Detecting Chip Alterations with Light Emission
App 20110026806 - Bernstein; Kerry ; et al. | 2011-02-03 |
Polycarbosilane buried etch stops in interconnect structures
Grant 7,879,717 - Huang , et al. February 1, 2 | 2011-02-01 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,862,989 - Colburn , et al. January 4, 2 | 2011-01-04 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
Grant 7,837,459 - Colburn , et al. November 23, 2 | 2010-11-23 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,816,069 - Brodsky , et al. October 19, 2 | 2010-10-19 |
Method And System For Tone Inverting Of Residual Layer Tolerant Imprint Lithography
App 20100230385 - Colburn; Matthew E. ; et al. | 2010-09-16 |
Method And System For Tone Inverting Of Residual Layer Tolerant Imprint Lithography
App 20100230048 - Colburn; Matthew E. ; et al. | 2010-09-16 |
Method and system for tone inverting of residual layer tolerant imprint lithography
Grant 7,776,628 - Colburn , et al. August 17, 2 | 2010-08-17 |
Control device, in particular in the form of an electric switch for electric handtools
Grant 7,764,502 - Erb , et al. July 27, 2 | 2010-07-27 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
Grant 7,736,841 - Lai , et al. June 15, 2 | 2010-06-15 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
Grant 7,687,913 - Chakrapani , et al. March 30, 2 | 2010-03-30 |
Antireflective hardmask and uses thereof
Grant 7,648,820 - Babich , et al. January 19, 2 | 2010-01-19 |
Graded spin-on organic antireflective coating for photolithography
Grant 7,588,879 - Brodsky , et al. September 15, 2 | 2009-09-15 |
Control Device, In Particular In The Form Of An Electric Switch For Electric Handtools
App 20090213545 - Erb; Tino ; et al. | 2009-08-27 |
Techniques for patterning features in semiconductor devices
Grant 7,545,041 - Allen , et al. June 9, 2 | 2009-06-09 |
Antireflective film-forming composition, method for manufacturing the same, and antireflective film and pattern formation method using the same
Grant 7,541,134 - Iwabuchi , et al. June 2, 2 | 2009-06-02 |
Topcoat material and use thereof in immersion lithography processes
Grant 7,521,172 - David , et al. April 21, 2 | 2009-04-21 |
Process Of Making A Lithographic Structure Using Antireflective Materials
App 20090061355 - Angelopoulos; Marie ; et al. | 2009-03-05 |
Methods and structures for protecting one area while processing another area on a chip
Grant 7,497,959 - Kim , et al. March 3, 2 | 2009-03-03 |
Reflective Film Interface To Restore Transverse Magnetic Wave Contrast In Lithographic Processing
App 20090040486 - Lai; Kafai ; et al. | 2009-02-12 |
Sacrificial film-forming composition, patterning process, sacrificial film and removal method
Grant 7,485,690 - Hamada , et al. February 3, 2 | 2009-02-03 |
Process of making a semiconductor device using multiple antireflective materials
Grant 7,485,573 - Angelopoulos , et al. February 3, 2 | 2009-02-03 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, Materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20090023083 - Colburn; Matthew E. ; et al. | 2009-01-22 |
Reflective Film Interface To Restore Transverse Magnetic Wave Contrast In Lithographic Processing
App 20090011371 - Lai; Kafai ; et al. | 2009-01-08 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
Grant 7,470,504 - Lai , et al. December 30, 2 | 2008-12-30 |
Process Of Making A Semiconductor Device Using Multiple Antireflective Materials
App 20080311508 - Angelopoulos; Marie ; et al. | 2008-12-18 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20080303160 - Colburn; Matthew E. ; et al. | 2008-12-11 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20080305197 - Colburn; Matthew E. ; et al. | 2008-12-11 |
Methods and structures for protecting one area while processing another area on a chip
App 20080261128 - Kim; Deok-kee ; et al. | 2008-10-23 |
Multiple Exposure Lithography Method Incorporating Intermediate Layer Patterning
App 20080254633 - Burns; Sean D. ; et al. | 2008-10-16 |
Polycarbosilane Buried Etch Stops In Interconnect Structures
App 20080254612 - Huang; Elbert E. ; et al. | 2008-10-16 |
Method for fabricating dual damascence structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascence patterning
Grant 7,435,074 - Colburn , et al. October 14, 2 | 2008-10-14 |
Graded Spin-on Organic Antireflective Coating for Photolithography
App 20080213707 - Brodsky; Colin J. ; et al. | 2008-09-04 |
Techniques for Patterning Features in Semiconductor Devices
App 20080187731 - Allen; Scott D. ; et al. | 2008-08-07 |
Polycarbosilane buried etch stops in interconnect structures
Grant 7,396,758 - Huang , et al. July 8, 2 | 2008-07-08 |
Method and system for tone inverting of residual layer tolerant imprint lithography
App 20080118645 - Colburn; Matthew E. ; et al. | 2008-05-22 |
Antireflective composition and process of making a lithographic structure
Grant 7,326,442 - Babich , et al. February 5, 2 | 2008-02-05 |
Graded spin-on organic antireflective coating for photolithography
App 20080008955 - Brodsky; Colin J. ; et al. | 2008-01-10 |
Bottom Anti-reflective Coating
App 20070275330 - Bailey; Todd C. ; et al. | 2007-11-29 |
Topcoat Material And Use Thereof In Immersion Lithography Processes
App 20070254237 - ALLEN; ROBERT DAVID ; et al. | 2007-11-01 |
Silicon-containing compositions for spin-on arc/hardmask materials
Grant 7,276,327 - Angelopoulos , et al. October 2, 2 | 2007-10-02 |
Silicon-containing compositions for spin-on ARC/hardmask materials
Grant 7,270,931 - Angelopoulos , et al. September 18, 2 | 2007-09-18 |
Process of making a semiconductor device using multiple antireflective materials
App 20070196748 - Angelopoulos; Marie ; et al. | 2007-08-23 |
Method of forming a ceramic diffusion barrier layer
Grant 7,256,146 - Cohen , et al. August 14, 2 | 2007-08-14 |
Recovery Of Hydrophobicity Of Low-k And Ultra Low-k Organosilicate Films Used As Inter Metal Dielectrics
App 20070138640 - Chakrapani; Nirupama ; et al. | 2007-06-21 |
Lithographic antireflective hardmask compositions and uses thereof
Grant 7,223,517 - Babich , et al. May 29, 2 | 2007-05-29 |
Polycarbosilane Buried Etch Stops In Interconnect Structures
App 20070111509 - Huang; Elbert E. ; et al. | 2007-05-17 |
Antireflective Hardmask and Uses Thereof
App 20070105363 - Babich; Katherina E. ; et al. | 2007-05-10 |
Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
App 20070099122 - Lai; Kafai ; et al. | 2007-05-03 |
Polycarbosilane buried etch stops in interconnect structures
Grant 7,187,081 - Huang , et al. March 6, 2 | 2007-03-06 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
Grant 7,179,758 - Chakrapani , et al. February 20, 2 | 2007-02-20 |
Antireflective hardmask and uses thereof
Grant 7,172,849 - Babich , et al. February 6, 2 | 2007-02-06 |
Antireflective composition and process of making a lithographic structure
App 20070015083 - Babich; Katherina E. ; et al. | 2007-01-18 |
Process of making a lithographic structure using antireflective materials
App 20070015082 - Angelopoulos; Marie ; et al. | 2007-01-18 |
Molecular photoresists containing nonpolymeric silsesquioxanes
Grant 7,141,692 - Allen , et al. November 28, 2 | 2006-11-28 |
Photoresist composition
Grant 7,135,595 - Allen , et al. November 14, 2 | 2006-11-14 |
Etch selectivity enhancement for tunable etch resistant anti-reflective layer
Grant 7,077,903 - Babich , et al. July 18, 2 | 2006-07-18 |
photoresist composition
App 20060128914 - Allen; Robert David ; et al. | 2006-06-15 |
Techniques for patterning features in semiconductor devices
App 20060118785 - Allen; Scott D. ; et al. | 2006-06-08 |
Material and process for etched structure filling and planarizing
App 20060089000 - Della Guardia; Ronald A. ; et al. | 2006-04-27 |
Techniques for patterning features in semiconductor devices
Grant 7,030,008 - Allen , et al. April 18, 2 | 2006-04-18 |
Radiation-sensitive composition and method of fabricating a device using the radiation-sensitive composition
App 20060063103 - Huang; Wu-Song ; et al. | 2006-03-23 |
Photoresist composition
Grant 7,014,980 - Allen , et al. March 21, 2 | 2006-03-21 |
Silicon-containing compositions for spin-on arc/hardmask materials
App 20060058489 - Angelopoulos; Marie ; et al. | 2006-03-16 |
Antireflective film-forming composition, method for manufacturing the same, and antireflective film and pattern formation method using the same
App 20050277058 - Iwabuchi, Motoaki ; et al. | 2005-12-15 |
Methods And Structures For Protecting One Area While Processing Another Area On A Chip
App 20050255386 - Kim, Deok-kee ; et al. | 2005-11-17 |
Interconnect structures incorporating low-k dielectric barrier films
App 20050206004 - Cohen, Stephan A. ; et al. | 2005-09-22 |
Method for fabricating dual damascene structures using photo-imprint lithography, methods for fabricating imprint lithography molds for dual damascene structures, materials for imprintable dielectrics and equipment for photo-imprint lithography used in dual damascene patterning
App 20050202350 - Colburn, Matthew E. ; et al. | 2005-09-15 |
Interconnect structures incorporating low-k dielectric barrier films
Grant 6,940,173 - Cohen , et al. September 6, 2 | 2005-09-06 |
Patterning layers comprised of spin-on ceramic films
Grant 6,929,982 - Gates , et al. August 16, 2 | 2005-08-16 |
Molecular photoresists containing nonpolymeric silsesquioxanes
App 20050112382 - Allen, Robert David ; et al. | 2005-05-26 |
Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics
App 20050106762 - Chakrapani, Nirupama ; et al. | 2005-05-19 |
Etch selectivity enhancement for tunable etch resistant anti-reflective layer
App 20050098091 - Babich, Katherina E. ; et al. | 2005-05-12 |
Interconnect structures incorporating low-k dielectric barrier films
App 20050087876 - Cohen, Stephan A. ; et al. | 2005-04-28 |
Silicon-containing compositions for spin-on arc/hardmask materials
App 20050074689 - Angelopoulos, Marie ; et al. | 2005-04-07 |
Techniques for patterning features in semiconductor devices
App 20050056823 - Allen, Scott D. ; et al. | 2005-03-17 |
Antireflective hardmask and uses thereof
App 20050042538 - Babich, Katherina ; et al. | 2005-02-24 |
Lithographic antireflective hardmask compositions and uses thereof
App 20050031964 - Babich, Katherina ; et al. | 2005-02-10 |
Photoresist composition
App 20050019696 - Allen, Robert David ; et al. | 2005-01-27 |
Method For Image Reversal Of Implant Resist Using A Single Photolithography Exposure And Structures Formed Thereby
App 20040256698 - Holmes, Steven J. ; et al. | 2004-12-23 |
Photoresist composition
Grant 6,806,026 - Allen , et al. October 19, 2 | 2004-10-19 |
Patterning layers comprised of spin-on ceramic films
Grant 6,803,660 - Gates , et al. October 12, 2 | 2004-10-12 |
Method for image reversal of implant resist using a single photolithography exposure and structures formed thereby
Grant 6,780,736 - Holmes , et al. August 24, 2 | 2004-08-24 |
Polycarbosilane buried etch stops in interconnect structures
App 20040147111 - Huang, Elbert E. ; et al. | 2004-07-29 |
Antireflective SiO-containing compositions for hardmask layer
Grant 6,730,454 - Pfeiffer , et al. May 4, 2 | 2004-05-04 |
Photoresist composition
App 20030224283 - Allen, Robert David ; et al. | 2003-12-04 |
Antireflective SiO-containing compositions for hardmask layer
App 20030198877 - Pfeiffer, Dirk ; et al. | 2003-10-23 |
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