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Patent applications and USPTO patent grants for Petrone; Benjamin J..The latest application filed is for "chemical vapor deposition reactor and method for utilizing vapor vortex".
Patent | Date |
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Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems Grant 7,771,563 - Grant , et al. August 10, 2 | 2010-08-10 |
Chemical vapor deposition reactor and method for utilizing vapor vortex App 20040028810 - Grant, Robert W. ;   et al. | 2004-02-12 |
Vortex based CVD reactor App 20020195055 - Grant, Robert W. ;   et al. | 2002-12-26 |
Modular processing apparatus for processing semiconductor wafers Grant 4,852,516 - Rubin , et al. August 1, 1 | 1989-08-01 |
Modular processing apparatus for processing semiconductor wafers Grant 4,722,298 - Rubin , et al. February 2, 1 | 1988-02-02 |
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