Petrillo; Karen Elizabeth

Patent Applications and Registrations

Patent applications and USPTO patent grants for Petrillo; Karen Elizabeth.The latest application filed is for "dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay".

Company Profile

2.5.5

Petrillo; Karen Elizabeth - Voorheesville NY
Petrillo; Karen Elizabeth - Mahopac NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay Grant 11,067,896 - Murray , et al. July 20, 2	2021-07-20
Dynamic Adjustment Of Post Exposure Bake During Lithography Utilizing Real-time Feedback For Wafer Exposure Delay App 20200379354 - MURRAY; Cody John ; et al.	2020-12-03
Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay Grant 10,545,409 - Murray , et al. Ja	2020-01-28
Immersion lithography contamination gettering layer Grant 7,807,335 - Corliss , et al. October 5, 2	2010-10-05
Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer Grant 7,638,266 - Angelopoulos , et al. December 29, 2	2009-12-29
Method of making a packaged radiation sensitive resist film-coated workpiece Grant 7,168,224 - Angelopoulos , et al. January 30, 2	2007-01-30
Immersion lithography contamination gettering layer App 20060275706 - Corliss; Daniel A. ; et al.	2006-12-07
Ultrathin polymeric photoacid generator layer and method of fabricating at least one of a device and a mask by using said layer App 20060035167 - Angelopoulos; Marie ; et al.	2006-02-16
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20040045866 - Angelopoulos, Marie ; et al.	2004-03-11
Packaged radiation sensitive coated workpiece process for making and method of storing same App 20030019782 - Angelopoulos, Marie ; et al.	2003-01-30

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