Pethe; Shirish

Patent Applications and Registrations

Patent applications and USPTO patent grants for Pethe; Shirish.The latest application filed is for "methods and apparatus for forming dual metal interconnects".

Company Profile

4.3.6

Pethe; Shirish - Sunnyvale CA
PETHE; SHIRISH - CUPERTINO CA
Pethe; Shirish - Santa Clara CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and apparatus for filling a feature disposed in a substrate Grant 11,289,329 - Li , et al. March 29, 2	2022-03-29
Methods And Apparatus For Forming Dual Metal Interconnects App 20210320064 - PARIKH; SUKETU A. ; et al.	2021-10-14
Methods and apparatus for forming dual metal interconnects Grant 11,075,165 - Parikh , et al. July 27, 2	2021-07-27
Method Of Depositing Layers App 20210118729 - PETHE; Shirish ; et al.	2021-04-22
Methods And Apparatus For Forming Dual Metal Interconnects App 20210020569 - PARIKH; SUKETU A. ; et al.	2021-01-21
Integration of ALD copper with high temperature PVD copper deposition for BEOL interconnect Grant 10,892,186 - Sheu , et al. January 12, 2	2021-01-12
Methods And Apparatus For Filling A Feature Disposed In A Substrate App 20200350159 - LI; Rui ; et al.	2020-11-05
Integration Of ALD Copper With High Temperature PVD Copper Deposition For BEOL Interconnect App 20190115254 - Sheu; Ben-Li ; et al.	2019-04-18
Methods Of Forming Ruthenium-group Iiia Alloys App 20120266958 - Aksu; Serdar ; et al.	2012-10-25

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