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Patent applications and USPTO patent grants for Peterson; David Hart.The latest application filed is for "lithographic apparatus, substrate table, and non-uniform coating method".
Patent | Date |
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Anti-reflection coating Grant 11,422,289 - Kelkar , et al. August 23, 2 | 2022-08-23 |
Lithographic Apparatus, Substrate Table, And Non-uniform Coating Method App 20220216092 - TIRRI; Bruce ;   et al. | 2022-07-07 |
Burls with altered surface topography for holding an object in lithography applications Grant 11,270,906 - Akbas , et al. March 8, 2 | 2022-03-08 |
A Method To Manufacture Nano Ridges In Hard Ceramic Coatings App 20210405539 - AKBAS; Mehmet Ali ;   et al. | 2021-12-30 |
Burls With Altered Surface Topography For Holding An Object In Lithography Applications App 20210202293 - AKBAS; Mehmet Ali ;   et al. | 2021-07-01 |
Anti-Reflection Coating App 20200103558 - KELKAR; Parag Vinayak ;   et al. | 2020-04-02 |
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