Peterlinz; Kevin A.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Peterlinz; Kevin A..The latest application filed is for "methods and systems for measurement of thick films and high aspect ratio structures".

Company Profile

4.9.9

Peterlinz; Kevin A. - San Ramon CA
Peterlinz; Kevin A. - Fremont CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Methods and systems for measurement of thick films and high aspect ratio structures Grant 11,119,050 - Sapiens , et al. September 14, 2	2021-09-14
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures App 20200284733 - Sapiens; Noam ; et al.	2020-09-10
Methods and systems for measurement of thick films and high aspect ratio structures Grant 10,690,602 - Sapiens , et al.	2020-06-23
Optical metrology with small illumination spot size Grant 10,648,796 - Sapiens , et al.	2020-05-12
Spectral reflectometry for in-situ process monitoring and control Grant 10,438,825 - Jain , et al. O	2019-10-08
Method and system for spectroscopic beam profile metrology including a detection of collected light according to wavelength along a third dimension of a hyperspectral detector Grant 10,234,271 - Fu , et al.	2019-03-19
Methods And Systems For Spectroscopic Beam Profile Metrology App 20180347961 - Fu; Jiyou ; et al.	2018-12-06
Spectroscopic beam profile overlay metrology Grant 10,101,676 - Fu , et al. October 16, 2	2018-10-16
Methods and systems for spectroscopic beam profile metrology having a first two dimensional detector to detect collected light transmitted by a first wavelength dispersive element Grant 10,072,921 - Fu , et al. September 11, 2	2018-09-11
Methods And Systems For Measurement Of Thick Films And High Aspect Ratio Structures App 20180238814 - Sapiens; Noam ; et al.	2018-08-23
Optical Metrology With Small Illumination Spot Size App 20180180406 - Sapiens; Noam ; et al.	2018-06-28
Optical metrology with small illumination spot size Grant 9,915,524 - Sapiens , et al. March 13, 2	2018-03-13
Spectral Reflectometry For In-Situ Process Monitoring And Control App 20180061691 - Jain; Prateek ; et al.	2018-03-01
Spectroscopic Beam Profile Overlay Metrology App 20170082932 - Fu; Jiyou ; et al.	2017-03-23
Combined x-ray and optical metrology Grant 9,535,018 - Peterlinz , et al. January 3, 2	2017-01-03
Optical Metrology With Small Illumination Spot Size App 20160334326 - Sapiens; Noam ; et al.	2016-11-17
Spectroscopic Beam Profile Metrology App 20160161245 - Fu; Jiyou ; et al.	2016-06-09
Combined X-Ray and Optical Metrology App 20150032398 - Peterlinz; Kevin A. ; et al.	2015-01-29

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