Petasch; Thomas
Patent Applications and Registrations
Patent applications and USPTO patent grants for Petasch; Thomas.The latest application filed is for "device for cleaning a surface in the interior of an optical system".
Company Profile
2.21.24
- Petasch; Thomas - Aalen DE
Patent Activity
| Patent | Date |
|---|---|
| Device For Cleaning A Surface In The Interior Of An Optical System App 20220308466 - DIESCH; Jovana-Maria ; et al. | 2022-09-29 |
| Optical element, optical assembly and production method Grant 10,520,826 - Pilz , et al. Dec | 2019-12-31 |
| Optical Element, Optical Assembly And Production Method App 20190121240 - Pilz; Roland ; et al. | 2019-04-25 |
| Lithographic Projection Objective App 20190025709 - Rogalsky; Olaf ; et al. | 2019-01-24 |
| Optical element, optical assembly and production method Grant 10,175,582 - Pilz , et al. J | 2019-01-08 |
| Optical Projection System App 20180259856 - Rau; Johannes ; et al. | 2018-09-13 |
| Lithographic projection objective Grant 10,042,265 - Rogalsky , et al. August 7, 2 | 2018-08-07 |
| Optical projection system Grant 9,891,535 - Rau , et al. February 13, 2 | 2018-02-13 |
| Optical Element, Optical Assembly And Production Method App 20170261860 - Pilz; Roland ; et al. | 2017-09-14 |
| Optical Projection System App 20170219929 - Rau; Johannes ; et al. | 2017-08-03 |
| Lithographic Projection Objective App 20170031247 - Rogalsky; Olaf ; et al. | 2017-02-02 |
| Optical projection system Grant 9,557,653 - Rau , et al. January 31, 2 | 2017-01-31 |
| Lithographic projection objective Grant 9,494,868 - Rogalsky , et al. November 15, 2 | 2016-11-15 |
| Optical Projection System App 20150323873 - Rau; Johannes ; et al. | 2015-11-12 |
| Optical projection system Grant 9,104,016 - Rau , et al. August 11, 2 | 2015-08-11 |
| Lithographic Projection Objective App 20140078482 - Rogalsky; Olaf ; et al. | 2014-03-20 |
| Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20140063628 - Sorg; Franz ; et al. | 2014-03-06 |
| Lithographic projection objective Grant 8,605,253 - Rogalsky , et al. December 10, 2 | 2013-12-10 |
| Device for the low-deformation replaceable mounting of an optical element Grant 8,582,081 - Sorg , et al. November 12, 2 | 2013-11-12 |
| Optical Projection System App 20130044304 - Rau; Johannes ; et al. | 2013-02-21 |
| Optical projection system Grant 8,300,210 - Rau , et al. October 30, 2 | 2012-10-30 |
| Apparatus for mounting two or more elements and method for processing the surface of an optical element Grant 7,800,849 - Holderer , et al. September 21, 2 | 2010-09-21 |
| Adjustment arrangement of an optical element Grant 7,656,595 - Beck , et al. February 2, 2 | 2010-02-02 |
| Optical Projection System App 20090174874 - Rau; Johannes ; et al. | 2009-07-09 |
| Lithographic Projection Objective App 20090153829 - Rogalsky; Olaf ; et al. | 2009-06-18 |
| Device For The Low-deformation Replaceable Mounting Of An Optical Element App 20090122288 - Sorg; Franz ; et al. | 2009-05-14 |
| Apparatus For Mounting Two Or More Elements And Method For Processing The Surface Of An Optical Element App 20090015947 - Holderer; Hubert ; et al. | 2009-01-15 |
| Adjustment Arrangement of an Optical Element App 20090009892 - Beck; Klaus ; et al. | 2009-01-08 |
| Device for the low-deformation replaceable mounting of an optical element Grant 7,471,469 - Sorg , et al. December 30, 2 | 2008-12-30 |
| Adjustment arrangement of an optical element Grant 7,457,059 - Beck , et al. November 25, 2 | 2008-11-25 |
| Optical element with an optical axis Grant 7,295,331 - Petasch , et al. November 13, 2 | 2007-11-13 |
| Adjustment arrangement of an optical element Grant 7,193,794 - Beck , et al. March 20, 2 | 2007-03-20 |
| Adjustment Arrangement Of An Optical Element App 20070014038 - Beck; Klaus ; et al. | 2007-01-18 |
| Adjusting apparatus for devices and for setting adjustments Grant 7,082,693 - Klein , et al. August 1, 2 | 2006-08-01 |
| Device for the low-deformation replaceable mounting of an optical element App 20060158749 - Sorg; Franz ; et al. | 2006-07-20 |
| Lens system, in particular a projection lens system for semiconductor lithography Grant 7,061,698 - Osterried , et al. June 13, 2 | 2006-06-13 |
| Apparatus for mounting an optical element in an optical system Grant 6,870,632 - Petasch , et al. March 22, 2 | 2005-03-22 |
| Optical element with an optical axis App 20040257683 - Petasch, Thomas ; et al. | 2004-12-23 |
| Adjustment arrangement of an optical element App 20040174619 - Beck, Klaus ; et al. | 2004-09-09 |
| Optical system App 20020186479 - Schoppach, Armin ; et al. | 2002-12-12 |
| Apparatus for mounting an optical element in an optical system App 20020176094 - Petasch, Thomas ; et al. | 2002-11-28 |
| Lens system, in particular a projection lens system for semiconductor lithography App 20020167740 - Osterried, Karlfrid ; et al. | 2002-11-14 |
| Adjusting apparatus for devices and for setting adjustments App 20020152627 - Klein, Klaus-Dieter ; et al. | 2002-10-24 |
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