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Patent applications and USPTO patent grants for Persaud; Deoram.The latest application filed is for "detection and characterization of sicoh-based dielectric materials during device fabrication".
Patent | Date |
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Detection and characterization of SiCOH-based dielectric materials during device fabrication Grant 7,556,972 - Balachandran , et al. July 7, 2 | 2009-07-07 |
Extended life conditioning disk Grant 7,510,463 - Kim , et al. March 31, 2 | 2009-03-31 |
DETECTION AND CHARACTERIZATION OF SiCOH-BASED DIELECTRIC MATERIALS DURING DEVICE FABRICATION App 20080182335 - Balachandran; Manoj ;   et al. | 2008-07-31 |
Extended Life Conditioning Disk App 20070287367 - Kim; Ben ;   et al. | 2007-12-13 |
Wafer Removing Force Reduction On Cmp Tool App 20070190788 - Balachandran; Manoj ;   et al. | 2007-08-16 |
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