Perlov; Ilya

Patent Applications and Registrations

Patent applications and USPTO patent grants for Perlov; Ilya.The latest application filed is for "chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion".

Company Profile

0.40.16

Perlov; Ilya - Santa Clara CA
Perlov, Ilya - Palo Alto CA
Perlov, Ilya - San Francisco CA
Perlov, Ilya - Sunnyvale CA
Perlov; Ilya - Mountain View CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 8,079,894 - Tolles , et al. December 20, 2	2011-12-20
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20100035526 - Tolles; Robert D. ; et al.	2010-02-11
Apparatus for storing and moving a cassette Grant 7,637,707 - Perlov , et al. December 29, 2	2009-12-29
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,614,939 - Tolles , et al. November 10, 2	2009-11-10
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20070238399 - Tolles; Robert D. ; et al.	2007-10-11
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,255,632 - Tolles , et al. August 14, 2	2007-08-14
Polishing apparatus having a trough Grant 7,238,090 - Tolles , et al. July 3, 2	2007-07-03
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20060194525 - Tolles; Robert D. ; et al.	2006-08-31
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,097,544 - Tolles , et al. August 29, 2	2006-08-29
Apparatus for storing and moving a cassette App 20060072986 - Perlov; Ilya ; et al.	2006-04-06
Method of controlling carrier head with multiple chambers App 20050142995 - Perlov, Ilya ; et al.	2005-06-30
Method of controlling carrier head with multiple chambers Grant 6,896,584 - Perlov , et al. May 24, 2	2005-05-24
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20050048880 - Tolles, Robert D. ; et al.	2005-03-03
Loadlock chamber App 20040096300 - Perlov, Ilya ; et al.	2004-05-20
Method of controlling carrier head with multiple chambers App 20040063385 - Perlov, Ilya ; et al.	2004-04-01
Carrier head with a flexible membrane to form multiple chambers Grant 6,648,740 - Perlov , et al. November 18, 2	2003-11-18
Method and apparatus for improved substrate handling Grant 6,575,737 - Perlov , et al. June 10, 2	2003-06-10
Carrier head with a flexible membrane to form multiple chambers App 20030022609 - Perlov, Ilya ; et al.	2003-01-30
Carrier head with a flexible membrane Grant 6,506,104 - Perlov , et al. January 14, 2	2003-01-14
Method and apparatus for improved substrate handling App 20020170672 - Perlov, Ilya ; et al.	2002-11-21
Method and apparatus for wafer exchange employing stacked robot blades App 20020154975 - Perlov, Ilya ; et al.	2002-10-24
Method and apparatus for improved substrate handling Grant 6,468,353 - Perlov , et al. October 22, 2	2002-10-22
Method and apparatus for orienting substrates App 20020111710 - Perlov, Ilya ; et al.	2002-08-15
Method and apparatus for orienting substrates Grant 6,393,337 - Perlov , et al. May 21, 2	2002-05-21
Pod door opener App 20020006322 - Perlov, Ilya ; et al.	2002-01-17
Apparatus for storing and moving a cassette App 20010043849 - Perlov, Ilya ; et al.	2001-11-22
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20010041526 - Perlov, Ilya ; et al.	2001-11-15
Single chamber vacuum processing tool App 20010041121 - Grunes, Howard E. ; et al.	2001-11-15
Carousel wafer transfer system Grant 6,287,386 - Perlov , et al. September 11, 2	2001-09-11
Apparatus for storing and moving a cassette Grant 6,283,692 - Perlov , et al. September 4, 2	2001-09-04
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 6,167,834 - Wang , et al. January 2, 2	2001-01-02
Apparatus and method for aligning a substrate on a support member Grant 6,146,463 - Yudovsky , et al. November 14, 2	2000-11-14
System for chemical mechanical polishing having multiple polishing stations Grant 6,126,517 - Tolles , et al. October 3, 2	2000-10-03
Chemical vapor deposition chamber Grant 6,103,014 - Lei , et al. August 15, 2	2000-08-15
Washing transfer station in a system for chemical mechanical polishing Grant 6,086,457 - Perlov , et al. July 11, 2	2000-07-11
Underwater wafer storage and wafer picking for chemical mechanical polishing Grant 6,080,046 - Shendon , et al. June 27, 2	2000-06-27
Process for PECVD of silicon oxide using TEOS decomposition Grant RE36,623 - Wang , et al. March 21, 2	2000-03-21
Conditioner head in a substrate polisher and method Grant 6,036,583 - Perlov , et al. March 14, 2	2000-03-14
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 5,964,653 - Perlov , et al. October 12, 1	1999-10-12
Carousel wafer transfer system Grant 5,951,770 - Perlov , et al. September 14, 1	1999-09-14
Chemical vapor deposition chamber Grant 5,935,338 - Lei , et al. August 10, 1	1999-08-10
Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system Grant 5,931,724 - Perlov , et al. August 3, 1	1999-08-03
Apparatus for moving a cassette Grant 5,893,795 - Perlov , et al. April 13, 1	1999-04-13
Chemical vapor deposition chamber Grant 5,882,419 - Sinha , et al. March 16, 1	1999-03-16
Method for protecting against deposition on a selected region of a substrate Grant 5,871,811 - Wang , et al. February 16, 1	1999-02-16
Chemical vapor deposition of a thin film onto a substrate Grant 5,856,240 - Sinha , et al. January 5, 1	1999-01-05
Radially oscillating carousel processing system for chemical mechanical polishing Grant 5,804,507 - Perlov , et al. September 8, 1	1998-09-08
Continuous processing system for chemical mechanical polishing Grant 5,738,574 - Tolles , et al. April 14, 1	1998-04-14
Chemical vapor deposition chamber Grant 5,695,568 - Sinha , et al. December 9, 1	1997-12-09
Chemical vapor deposition chamber with a purge guide Grant 5,516,367 - Lei , et al. May 14, 1	1996-05-14
Susceptor drive and wafer displacement mechanism Grant 5,421,893 - Perlov June 6, 1	1995-06-06
Plasma-enhanced CVD process using TEOS for depositing silicon oxide Grant 5,362,526 - Wang , et al. * November 8, 1	1994-11-08
Thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 5,354,715 - Wang , et al. * October 11, 1	1994-10-11
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 5,000,113 - Wang , et al. March 19, 1	1991-03-19
Process for PECVD of silicon oxide using TEOS decomposition Grant 4,892,753 - Wang , et al. January 9, 1	1990-01-09
CVD of silicon oxide using TEOS decomposition and in-situ planarization process Grant 4,872,947 - Wang , et al. October 10, 1	1989-10-10