Patent | Date |
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Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 8,079,894 - Tolles , et al. December 20, 2 | 2011-12-20 |
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20100035526 - Tolles; Robert D. ;   et al. | 2010-02-11 |
Apparatus for storing and moving a cassette Grant 7,637,707 - Perlov , et al. December 29, 2 | 2009-12-29 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,614,939 - Tolles , et al. November 10, 2 | 2009-11-10 |
Chemical Mechanical Polishing System Having Multiple Polishing Stations And Providing Relative Linear Polishing Motion App 20070238399 - Tolles; Robert D. ;   et al. | 2007-10-11 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,255,632 - Tolles , et al. August 14, 2 | 2007-08-14 |
Polishing apparatus having a trough Grant 7,238,090 - Tolles , et al. July 3, 2 | 2007-07-03 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20060194525 - Tolles; Robert D. ;   et al. | 2006-08-31 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion Grant 7,097,544 - Tolles , et al. August 29, 2 | 2006-08-29 |
Apparatus for storing and moving a cassette App 20060072986 - Perlov; Ilya ;   et al. | 2006-04-06 |
Method of controlling carrier head with multiple chambers App 20050142995 - Perlov, Ilya ;   et al. | 2005-06-30 |
Method of controlling carrier head with multiple chambers Grant 6,896,584 - Perlov , et al. May 24, 2 | 2005-05-24 |
Chemical mechanical polishing system having multiple polishing stations and providing relative linear polishing motion App 20050048880 - Tolles, Robert D. ;   et al. | 2005-03-03 |
Loadlock chamber App 20040096300 - Perlov, Ilya ;   et al. | 2004-05-20 |
Method of controlling carrier head with multiple chambers App 20040063385 - Perlov, Ilya ;   et al. | 2004-04-01 |
Carrier head with a flexible membrane to form multiple chambers Grant 6,648,740 - Perlov , et al. November 18, 2 | 2003-11-18 |
Method and apparatus for improved substrate handling Grant 6,575,737 - Perlov , et al. June 10, 2 | 2003-06-10 |
Carrier head with a flexible membrane to form multiple chambers App 20030022609 - Perlov, Ilya ;   et al. | 2003-01-30 |
Carrier head with a flexible membrane Grant 6,506,104 - Perlov , et al. January 14, 2 | 2003-01-14 |
Method and apparatus for improved substrate handling App 20020170672 - Perlov, Ilya ;   et al. | 2002-11-21 |
Method and apparatus for wafer exchange employing stacked robot blades App 20020154975 - Perlov, Ilya ;   et al. | 2002-10-24 |
Method and apparatus for improved substrate handling Grant 6,468,353 - Perlov , et al. October 22, 2 | 2002-10-22 |
Method and apparatus for orienting substrates App 20020111710 - Perlov, Ilya ;   et al. | 2002-08-15 |
Method and apparatus for orienting substrates Grant 6,393,337 - Perlov , et al. May 21, 2 | 2002-05-21 |
Pod door opener App 20020006322 - Perlov, Ilya ;   et al. | 2002-01-17 |
Apparatus for storing and moving a cassette App 20010043849 - Perlov, Ilya ;   et al. | 2001-11-22 |
Carrier head with a flexible membrane for a chemical mechanical polishing system App 20010041526 - Perlov, Ilya ;   et al. | 2001-11-15 |
Single chamber vacuum processing tool App 20010041121 - Grunes, Howard E. ;   et al. | 2001-11-15 |
Carousel wafer transfer system Grant 6,287,386 - Perlov , et al. September 11, 2 | 2001-09-11 |
Apparatus for storing and moving a cassette Grant 6,283,692 - Perlov , et al. September 4, 2 | 2001-09-04 |
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 6,167,834 - Wang , et al. January 2, 2 | 2001-01-02 |
Apparatus and method for aligning a substrate on a support member Grant 6,146,463 - Yudovsky , et al. November 14, 2 | 2000-11-14 |
System for chemical mechanical polishing having multiple polishing stations Grant 6,126,517 - Tolles , et al. October 3, 2 | 2000-10-03 |
Chemical vapor deposition chamber Grant 6,103,014 - Lei , et al. August 15, 2 | 2000-08-15 |
Washing transfer station in a system for chemical mechanical polishing Grant 6,086,457 - Perlov , et al. July 11, 2 | 2000-07-11 |
Underwater wafer storage and wafer picking for chemical mechanical polishing Grant 6,080,046 - Shendon , et al. June 27, 2 | 2000-06-27 |
Process for PECVD of silicon oxide using TEOS decomposition Grant RE36,623 - Wang , et al. March 21, 2 | 2000-03-21 |
Conditioner head in a substrate polisher and method Grant 6,036,583 - Perlov , et al. March 14, 2 | 2000-03-14 |
Carrier head with a flexible membrane for a chemical mechanical polishing system Grant 5,964,653 - Perlov , et al. October 12, 1 | 1999-10-12 |
Carousel wafer transfer system Grant 5,951,770 - Perlov , et al. September 14, 1 | 1999-09-14 |
Chemical vapor deposition chamber Grant 5,935,338 - Lei , et al. August 10, 1 | 1999-08-10 |
Mechanical fastener to hold a polishing pad on a platen in a chemical mechanical polishing system Grant 5,931,724 - Perlov , et al. August 3, 1 | 1999-08-03 |
Apparatus for moving a cassette Grant 5,893,795 - Perlov , et al. April 13, 1 | 1999-04-13 |
Chemical vapor deposition chamber Grant 5,882,419 - Sinha , et al. March 16, 1 | 1999-03-16 |
Method for protecting against deposition on a selected region of a substrate Grant 5,871,811 - Wang , et al. February 16, 1 | 1999-02-16 |
Chemical vapor deposition of a thin film onto a substrate Grant 5,856,240 - Sinha , et al. January 5, 1 | 1999-01-05 |
Radially oscillating carousel processing system for chemical mechanical polishing Grant 5,804,507 - Perlov , et al. September 8, 1 | 1998-09-08 |
Continuous processing system for chemical mechanical polishing Grant 5,738,574 - Tolles , et al. April 14, 1 | 1998-04-14 |
Chemical vapor deposition chamber Grant 5,695,568 - Sinha , et al. December 9, 1 | 1997-12-09 |
Chemical vapor deposition chamber with a purge guide Grant 5,516,367 - Lei , et al. May 14, 1 | 1996-05-14 |
Susceptor drive and wafer displacement mechanism Grant 5,421,893 - Perlov June 6, 1 | 1995-06-06 |
Plasma-enhanced CVD process using TEOS for depositing silicon oxide Grant 5,362,526 - Wang , et al. * November 8, 1 | 1994-11-08 |
Thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 5,354,715 - Wang , et al. * October 11, 1 | 1994-10-11 |
Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process Grant 5,000,113 - Wang , et al. March 19, 1 | 1991-03-19 |
Process for PECVD of silicon oxide using TEOS decomposition Grant 4,892,753 - Wang , et al. January 9, 1 | 1990-01-09 |
CVD of silicon oxide using TEOS decomposition and in-situ planarization process Grant 4,872,947 - Wang , et al. October 10, 1 | 1989-10-10 |