Pergande; Paul E.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pergande; Paul E..The latest application filed is for "modular led heater".
- Pergande; Paul E. - Austin TX
| Patent | Date |
|---|---|
| Contactless workpiece temperature sensor Grant 11,415,463 - Pergande August 16, 2 | 2022-08-16 |
| Batch heating and cooling chamber or loadlock Grant 11,315,806 - Schaller , et al. April 26, 2 | 2022-04-26 |
| Buffer chamber wafer heating mechanism and supporting robots Grant 11,264,258 - Weaver , et al. March 1, 2 | 2022-03-01 |
| Modular LED heater Grant 11,109,452 - Pergande August 31, 2 | 2021-08-31 |
| Modular LED Heater App 20210153303 - Pergande; Paul E. | 2021-05-20 |
| System and apparatus for process chamber window cooling Grant 10,903,096 - Pergande , et al. January 26, 2 | 2021-01-26 |
| Contactless Workpiece Temperature Sensor App 20200386621 - Pergande; Paul E. | 2020-12-10 |
| Single Layer PCB Circuit Layout For Uniform Radial LED Array App 20200375027 - Schaller; Jason M. ; et al. | 2020-11-26 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robots App 20200279763 - Weaver; William T. ; et al. | 2020-09-03 |
| Buffer chamber wafer heating mechanism and supporting robots Grant 10,699,930 - Weaver , et al. | 2020-06-30 |
| Anti-reflective coating for transparent end effectors Grant 10,669,430 - Pergande | 2020-06-02 |
| Silicon carbide substrate heating Grant 10,600,662 - Pergande | 2020-03-24 |
| Anti-Reflective Coating For Transparent End Effectors App 20200024459 - Pergande; Paul E. | 2020-01-23 |
| Silicon Carbide Substrate Heating App 20200027762 - Pergande; Paul E. | 2020-01-23 |
| System And Apparatus For Process Chamber Window Cooling App 20190311922 - Pergande; Paul E. ; et al. | 2019-10-10 |
| Batch Heating and Cooling Chamber or Loadlock App 20190259638 - Schaller; Jason M. ; et al. | 2019-08-22 |
| Batch LED heating and cooling chamber or loadlock Grant 10,283,379 - Schaller , et al. | 2019-05-07 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robots App 20190019708 - Weaver; William T. ; et al. | 2019-01-17 |
| Buffer chamber wafer heating mechanism and supporting robot Grant 10,103,046 - Weaver , et al. October 16, 2 | 2018-10-16 |
| System and method to monitor semiconductor workpiece temperature using thermal imaging Grant 9,995,631 - Pergande , et al. June 12, 2 | 2018-06-12 |
| Self-damping end effector Grant 9,862,101 - LoPiccolo , et al. January 9, 2 | 2018-01-09 |
| System And Method To Monitor Semiconductor Workpiece Temperature Using Thermal Imaging App 20170356807 - Pergande; Paul E. ; et al. | 2017-12-14 |
| Electrostatic chuck with LED heating Grant 9,728,430 - Schaller , et al. August 8, 2 | 2017-08-08 |
| Self-damping End Effector App 20170173799 - LoPiccolo; Jack ; et al. | 2017-06-22 |
| Planar End Effector And Method Of Making A Planar End Effector App 20170157909 - Pergande; Paul E. ; et al. | 2017-06-08 |
| Electrostatic Chuck With LED Heating App 20160379853 - Schaller; Jason M. ; et al. | 2016-12-29 |
| Buffer Chamber Wafer Heating Mechanism And Supporting Robot App 20160307782 - Weaver; William T. ; et al. | 2016-10-20 |
| Composite end effector and method of making a composite end effector Grant 9,415,519 - Pergande , et al. August 16, 2 | 2016-08-16 |
| End effector pads Grant 9,412,638 - Pergande , et al. August 9, 2 | 2016-08-09 |
| Batch Heating and Cooling Chamber or Loadlock App 20160218028 - Schaller; Jason M. ; et al. | 2016-07-28 |
| Composite End Effector And Method Of Making A Composite End Effector App 20160001449 - Pergande; Paul E. ; et al. | 2016-01-07 |
| Planar End Effector And Method Of Making A Planar End Effector App 20150290815 - Pergande; Paul E. ; et al. | 2015-10-15 |
| End Effector Pads App 20150279720 - Pergande; Paul E. ; et al. | 2015-10-01 |
| Wafer handling apparatus Grant 9,061,423 - Pergande June 23, 2 | 2015-06-23 |
| Wafer handling apparatus Grant 9,004,564 - Pergande , et al. April 14, 2 | 2015-04-14 |
| High Temperature Platen Power Contact App 20150060433 - Webb; Aaron P. ; et al. | 2015-03-05 |
| Composite End Effectors App 20140265394 - Pergande; Paul E. ; et al. | 2014-09-18 |
| Wafer Handling Apparatus App 20140265392 - Pergande; Paul E. ; et al. | 2014-09-18 |
| Wafer Handling Apparatus App 20140265393 - Pergande; Paul E. | 2014-09-18 |
| Photographic media developer cartridge Grant D505,443 - Saldana , et al. May 24, 2 | 2005-05-24 |
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