Perel; Alexander S.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Perel; Alexander S..The latest application filed is for "cylindrical shaped arc chamber for indirectly heated cathode ion source".
Company Profile
5.29.28
- Perel; Alexander S. - Danvers MA
- Perel; Alexander S - Danvers MA
Patent Activity
| Patent | Date |
|---|---|
| Shaped repeller for an indirectly heated cathode ion source Grant 11,251,010 - Perel , et al. February 15, 2 | 2022-02-15 |
| Ion source with multiple configurations Grant 10,896,799 - Becker , et al. January 19, 2 | 2021-01-19 |
| Cylindrical shaped arc chamber for indirectly heated cathode ion source Grant 10,818,469 - Perel , et al. October 27, 2 | 2020-10-27 |
| Cylindrical Shaped Arc Chamber For Indirectly Heated Cathode Ion Source App 20200194220 - Perel; Alexander S. ; et al. | 2020-06-18 |
| Dynamic Temperature Control Of An Ion Source App 20190189387 - Perel; Alexander S. ; et al. | 2019-06-20 |
| Ion source for enhanced ionization Grant 10,290,461 - Tieger , et al. | 2019-05-14 |
| Ion Source For Enhanced Ionization App 20190122851 - Tieger; Daniel R. ; et al. | 2019-04-25 |
| Dual material repeller Grant 9,824,846 - Lee , et al. November 21, 2 | 2017-11-21 |
| Dual Material Repeller App 20170213684 - Lee; William Davis ; et al. | 2017-07-27 |
| Ion source and a method for in-situ cleaning thereof Grant 9,142,379 - Koo , et al. September 22, 2 | 2015-09-22 |
| Technique for ion implanting a target Grant 8,937,003 - Perel , et al. January 20, 2 | 2015-01-20 |
| Ion source and a method for in-situ cleaning thereof App 20140319369 - Koo; Bon-Woong ; et al. | 2014-10-30 |
| Ion source and a method for in-situ cleaning thereof Grant 8,809,800 - Koo , et al. August 19, 2 | 2014-08-19 |
| Cleaning of an extraction aperture of an ion source Grant 8,455,839 - Chaney , et al. June 4, 2 | 2013-06-04 |
| Technique For Ion Implanting A Target App 20130072008 - Perel; Alexander S. ; et al. | 2013-03-21 |
| Flexible ion source Grant 8,330,127 - Low , et al. December 11, 2 | 2012-12-11 |
| Directional gas injection for an ion source cathode assembly Grant 8,263,944 - Koo , et al. September 11, 2 | 2012-09-11 |
| Cleaning of an extraction aperture of an ion source Grant 8,071,956 - Chaney , et al. December 6, 2 | 2011-12-06 |
| Cleaning Of An Extraction Aperture Of An Ion Source App 20110220144 - CHANEY; Craig R. ; et al. | 2011-09-15 |
| Cleaning Of An Extraction Aperture Of An Ion Source App 20110220812 - CHANEY; Craig R. ; et al. | 2011-09-15 |
| Ion source cleaning end point detection Grant 8,003,959 - Platow , et al. August 23, 2 | 2011-08-23 |
| Ethane implantation with a dilution gas Grant 8,003,957 - Chaney , et al. August 23, 2 | 2011-08-23 |
| Techniques For Generating Uniform Ion Beam App 20110143527 - PLATOW; Wilhelm P. ; et al. | 2011-06-16 |
| Ion Source Cleaning End Point Detection App 20100327159 - Platow; Wilhelm P. ; et al. | 2010-12-30 |
| Method and apparatus for controlling beam current uniformity in an ion implanter Grant 7,767,986 - Dorai , et al. August 3, 2 | 2010-08-03 |
| Directional Gas Injection For An Ion Source Cathode Assembly App 20100155619 - Koo; John Bon-Woong ; et al. | 2010-06-24 |
| Techniques for optical ion beam metrology Grant 7,723,697 - Perel , et al. May 25, 2 | 2010-05-25 |
| Ion Source and a Method for In-Situ Cleaning Thereof App 20100024841 - Koo; Bon-Woong ; et al. | 2010-02-04 |
| Method And Apparatus For Controlling Beam Current Uniformity In An Ion Implanter App 20090314962 - DORAI; Rajesh ; et al. | 2009-12-24 |
| Methods and systems for trapping ion beam particles and focusing an ion beam Grant 7,598,495 - Kellerman , et al. October 6, 2 | 2009-10-06 |
| Flexible ion source App 20090242793 - Low; Russell J. ; et al. | 2009-10-01 |
| Technique for improving the performance and extending the lifetime of an ion source with gas dilution Grant 7,586,109 - Perel , et al. September 8, 2 | 2009-09-08 |
| Ethane Implantation With A Dilution Gas App 20090200460 - Chaney; Craig R. ; et al. | 2009-08-13 |
| Techniques For Optical Ion Beam Metrology App 20090078883 - Perel; Alexander S. ; et al. | 2009-03-26 |
| Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms Grant 7,459,704 - Olson , et al. December 2, 2 | 2008-12-02 |
| Ion beam angle measurement systems and methods for ion implantation systems Grant 7,435,977 - Freer , et al. October 14, 2 | 2008-10-14 |
| Ion beam monitoring in an ion implanter using an imaging device Grant 7,423,277 - Perel , et al. September 9, 2 | 2008-09-09 |
| Technique for Improving the Performance and Extending the Lifetime of an Ion Source with Gas Dilution App 20080179545 - Perel; Alexander S. ; et al. | 2008-07-31 |
| Ion beam monitoring in an ion implanter using an imaging device App 20080061250 - Perel; Alexander S. ; et al. | 2008-03-13 |
| Methods And Systems For Trapping Ion Beam Particles And Focusing An Ion Beam App 20070295901 - Kellerman; Peter L. ; et al. | 2007-12-27 |
| Ion beam angle measurement systems and methods for ion implantation systems App 20070145298 - Freer; Brian S. ; et al. | 2007-06-28 |
| Technique for providing an inductively coupled radio frequency plasma flood gun App 20070137576 - Kurunczi; Peter F. ; et al. | 2007-06-21 |
| Bellows liner for an ion beam implanter Grant 7,205,556 - Stone , et al. April 17, 2 | 2007-04-17 |
| Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms App 20060169915 - Olson; Joseph C. ; et al. | 2006-08-03 |
| In-situ monitoring on an ion implanter Grant 7,078,712 - Perel , et al. July 18, 2 | 2006-07-18 |
| Bellows liner for an ion beam implanter App 20060071181 - Stone; Lyudmila ; et al. | 2006-04-06 |
| In-situ cleaning of beam defining apertures in an ion implanter Grant 6,992,311 - Ring , et al. January 31, 2 | 2006-01-31 |
| Decaborane ion source Grant 6,958,481 - Horsky , et al. October 25, 2 | 2005-10-25 |
| In-situ monitoring on an ion implanter App 20050205807 - Perel, Alexander S. ; et al. | 2005-09-22 |
| Decaborane vaporizer having improved vapor flow App 20030030010 - Perel, Alexander S. ; et al. | 2003-02-13 |
| Method and system for icosaborane implantation App 20020074521 - Perel, Alexander S. | 2002-06-20 |
| Decaborane ion source App 20010054699 - Horsky, Thomas N. ; et al. | 2001-12-27 |
| Decaborane ionizer Grant 6,288,403 - Horsky , et al. September 11, 2 | 2001-09-11 |
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