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Patent applications and USPTO patent grants for Peng; Sheng-Tai.The latest application filed is for "chemical mechanical planarization membrane".
Patent | Date |
---|---|
Chemical Mechanical Planarization Membrane App 20220184773 - Chen; Cheng-Ping ;   et al. | 2022-06-16 |
Chemical mechanical planarization membrane Grant 11,267,099 - Chen , et al. March 8, 2 | 2022-03-08 |
Monolithic Platen App 20210268624 - Lia; Tsung-Lung ;   et al. | 2021-09-02 |
Monolithic platen Grant 11,020,837 - Lai , et al. June 1, 2 | 2021-06-01 |
Polishing Pad Conditioning Apparatus App 20210060727 - Chen; Cheng-Ping ;   et al. | 2021-03-04 |
Single Bodied Platen Housing A Detection Module For Cmp Systems App 20200164481 - Lai; Tsung-Lung ;   et al. | 2020-05-28 |
Multi-layered Windows For Use In Chemical-mechanical Planarization Systems App 20200164482 - Chen; Shih-Chung ;   et al. | 2020-05-28 |
Platen stopper Grant 10,661,408 - Han , et al. | 2020-05-26 |
Monolithic Platen App 20190143478 - LIA; Chou-Zon ;   et al. | 2019-05-16 |
Chemical Mechanical Planarization Membrane App 20190091829 - Chen; Cheng-Ping ;   et al. | 2019-03-28 |
Platen Stopper App 20190061094 - Han; Kanyu ;   et al. | 2019-02-28 |
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