PENG; HE HUI
Patent Applications and Registrations
Patent applications and USPTO patent grants for PENG; HE HUI.The latest application filed is for "wafer polishing head, system thereof, and method using the same".
- PENG; HE HUI - CHANGHUA COUNTY TW
- Peng; He Hui - Changhua City TW
- Peng; He Hui - Changhua TW
| Patent | Date |
|---|---|
| Wafer Polishing Head, System Thereof, And Method Using The Same App 20210220965 - HWANG; JAMES JENG-JYI ; et al. | 2021-07-22 |
| Method for Metal Gate Surface Clean App 20210082688 - Suen; Shich-Chang ; et al. | 2021-03-18 |
| Device And Methods For Chemical Mechanical Polishing App 20210039223 - HWANG; JAMES JENG-JYI ; et al. | 2021-02-11 |
| Apparatus and methods for chemical mechanical polishing Grant 10,875,143 - Hwang , et al. December 29, 2 | 2020-12-29 |
| Apparatus and methods for chemical mechanical polishing Grant 10,875,148 - Peng , et al. December 29, 2 | 2020-12-29 |
| Method for metal gate surface clean Grant 10,847,359 - Suen , et al. November 24, 2 | 2020-11-24 |
| Apparatus And Methods For Chemical Mechanical Polishing App 20200039019 - HWANG; JAMES JENG-JYI ; et al. | 2020-02-06 |
| Apparatus And Methods For Chemical Mechanical Polishing App 20190375071 - PENG; HE HUI ; et al. | 2019-12-12 |
| Brush cleaning method Grant 9,723,915 - Huang , et al. August 8, 2 | 2017-08-08 |
| Method For Metal Gate Surface Clean App 20170221700 - Suen; Shich-Chang ; et al. | 2017-08-03 |
| Method for metal gate surface clean Grant 9,633,832 - Suen , et al. April 25, 2 | 2017-04-25 |
| Mechanisms for removing debris from polishing pad Grant 9,630,295 - Peng , et al. April 25, 2 | 2017-04-25 |
| Method For Metal Gate Surface Clean App 20160172186 - SUEN; Shich-Chang ; et al. | 2016-06-16 |
| Method for cleaning metal gate surface Grant 9,269,585 - Suen , et al. February 23, 2 | 2016-02-23 |
| Brush Cleaning Method App 20150335146 - HUANG; Fu-Ming ; et al. | 2015-11-26 |
| Brush cleaning system Grant 9,119,464 - Huang , et al. September 1, 2 | 2015-09-01 |
| Method For Metal Gate Surface Clean App 20150200089 - SUEN; Shich-Chang ; et al. | 2015-07-16 |
| Wafer Particle Removal App 20150107619 - Wu; Jiann Lih ; et al. | 2015-04-23 |
| Mechanisms For Removing Debris From Polishing Pad App 20150024661 - PENG; He-Hui ; et al. | 2015-01-22 |
| Process for forming contact plugs Grant 8,703,612 - Suen , et al. April 22, 2 | 2014-04-22 |
| Brush Cleaning System App 20130192634 - HUANG; Fu-Ming ; et al. | 2013-08-01 |
| Semiconductor Device Surface Clean App 20130061876 - Suen; Shich-Chang ; et al. | 2013-03-14 |
| Process for Forming Contact Plugs App 20130065394 - Suen; Shich-Chang ; et al. | 2013-03-14 |
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