loadpatents
Patent applications and USPTO patent grants for Peng; Chui-Ya.The latest application filed is for "automated wafer cleaning".
Patent | Date |
---|---|
Systems And Methods For Shuttered Wafer Cleaning App 20220262651 - Wang; Tsui-Wei ;   et al. | 2022-08-18 |
Automated Wafer Cleaning App 20220262654 - LEE; Chun-Yu ;   et al. | 2022-08-18 |
Semiconductor device and manufacturing method thereof Grant 11,411,108 - Chen , et al. August 9, 2 | 2022-08-09 |
Systems and methods for shuttered wafer cleaning Grant 11,355,366 - Wang , et al. June 7, 2 | 2022-06-07 |
Automated wafer cleaning Grant 11,342,202 - Lee , et al. May 24, 2 | 2022-05-24 |
System And Method For Operating The Same App 20220139742 - XIAO; Jia-Rong ;   et al. | 2022-05-05 |
Ion implantation system and source bushing thereof Grant 11,282,673 - Meng , et al. March 22, 2 | 2022-03-22 |
System and method for operating the same Grant 11,227,780 - Xiao , et al. January 18, 2 | 2022-01-18 |
Liquid delivery and vaporization apparatus and method Grant 11,162,174 - Yang , et al. November 2, 2 | 2021-11-02 |
Ion Implanter Toxic Gas Delivery System App 20210313144 - Meng; Ying-Chieh ;   et al. | 2021-10-07 |
Systems and methods for dry wafer transport Grant 11,139,183 - Wang , et al. October 5, 2 | 2021-10-05 |
Polysilicon Structure Including Protective Layer App 20210225840 - CHENG; Yu-Shao ;   et al. | 2021-07-22 |
Polysilicon structure including protective layer Grant 10,957,697 - Cheng , et al. March 23, 2 | 2021-03-23 |
Semiconductor Device And Manufacturing Method Thereof App 20210043771 - CHEN; Chih-Fen ;   et al. | 2021-02-11 |
Method For Calibrating Temperature In Chemical Vapor Deposition App 20210043524 - Chen; Chih-Fen ;   et al. | 2021-02-11 |
Ion Implantation System And Source Bushing Thereof App 20200381210 - MENG; Ying-Chieh ;   et al. | 2020-12-03 |
Semiconductor device Grant 10,818,790 - Chen , et al. October 27, 2 | 2020-10-27 |
Method for calibrating temperature in chemical vapor deposition Grant 10,818,563 - Chen , et al. October 27, 2 | 2020-10-27 |
Ion implantation system and source bushing thereof Grant 10,784,079 - Meng , et al. Sept | 2020-09-22 |
System And Method For Operating The Same App 20200094294 - XIAO; Jia-Rong ;   et al. | 2020-03-26 |
Ion Implantation System And Source Bushing Thereof App 20200098544 - MENG; Ying-Chieh ;   et al. | 2020-03-26 |
Liquid Delivery And Vaporization Apparatus And Method App 20200095681 - YANG; Hsin-Lung ;   et al. | 2020-03-26 |
Method For Calibrating Temperature In Chemical Vapor Deposition App 20200098650 - Chen; Chih-Fen ;   et al. | 2020-03-26 |
Systems And Methods For Shuttered Wafer Cleaning App 20200075352 - WANG; Tsui-Wei ;   et al. | 2020-03-05 |
Systems And Methods For In-situ Marangoni Cleaning App 20200075356 - HSU; Wei-Chun ;   et al. | 2020-03-05 |
Wafer Cleaning With Dynamic Contacts App 20200058521 - SHIH; Kun-Hsiung ;   et al. | 2020-02-20 |
Automated Wafer Cleaning App 20200058522 - LEE; Chun-Yu ;   et al. | 2020-02-20 |
Method for calibrating temperature in chemical vapor deposition Grant 10,515,861 - Chen , et al. Dec | 2019-12-24 |
Systems And Methods For Dry Wafer Transport App 20190362990 - WANG; Tsui-Wei ;   et al. | 2019-11-28 |
Semiconductor Device And Manufacturing Method Thereof App 20190312144 - CHEN; Chih-Fen ;   et al. | 2019-10-10 |
Apparatus and system for detecting wafer damage Grant 10,325,796 - Chen , et al. | 2019-06-18 |
Semiconductor device and manufacturing method thereof Grant 10,319,857 - Chen , et al. | 2019-06-11 |
Apparatus And System For Detecting Wafer Damage App 20190131157 - Chen; Yen-Fong ;   et al. | 2019-05-02 |
Method For Calibrating Temperature In Chemical Vapor Deposition App 20190035697 - Chen; Chih-Fen ;   et al. | 2019-01-31 |
Polysilicon Structure Including Protective Layer App 20190006359 - CHENG; Yu-Shao ;   et al. | 2019-01-03 |
Method of making protective layer over polysilicon structure Grant 10,050,035 - Cheng , et al. August 14, 2 | 2018-08-14 |
Method for fabricating shallow trench isolation and semiconductor structure using the same Grant 9,978,634 - Yen , et al. May 22, 2 | 2018-05-22 |
Semiconductor Device And Manufacturing Method Thereof App 20180069120 - CHEN; Chih-Fen ;   et al. | 2018-03-08 |
Semiconductor device and manufacturing method thereof Grant 9,812,570 - Chen , et al. November 7, 2 | 2017-11-07 |
Semiconductor device and manufacturing method thereof Grant 9,780,209 - Chen , et al. October 3, 2 | 2017-10-03 |
Semiconductor device and manufacturing method of the same Grant 9,589,969 - Chang , et al. March 7, 2 | 2017-03-07 |
Semiconductor Device And Manufacturing Method Thereof App 20170005196 - CHEN; Chih-Fen ;   et al. | 2017-01-05 |
Method For Fabricating Shallow Trench Isolation And Semiconductor Structure Using The Same App 20160254179 - YEN; Chun-Hsu ;   et al. | 2016-09-01 |
Semiconductor structures with shallow trench isolations Grant 9,324,603 - Tsai , et al. April 26, 2 | 2016-04-26 |
Method Of Making Protective Layer Over Polysilicon Structure App 20150206879 - CHENG; Yu-Shao ;   et al. | 2015-07-23 |
Semiconductor Structures With Shallow Trench Isolations App 20150048475 - Tsai; Shin-Yeu ;   et al. | 2015-02-19 |
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