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Patent applications and USPTO patent grants for Pender; Jeremiah T..The latest application filed is for "method of patterning a low-k dielectric film".
Patent | Date |
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Method of patterning a low-k dielectric film Grant 11,302,519 - Nemani , et al. April 12, 2 | 2022-04-12 |
Methods for forming features in a material layer utilizing a combination of a main etching and a cyclical etching process Grant 9,543,163 - Ling , et al. January 10, 2 | 2017-01-10 |
Methods for barrier layer removal Grant 9,514,953 - Kao , et al. December 6, 2 | 2016-12-06 |
Method Of Patterning A Low-k Dielectric Film App 20150380215 - Nemani; Srinivas D. ;   et al. | 2015-12-31 |
Method of patterning a low-k dielectric film Grant 9,165,783 - Nemani , et al. October 20, 2 | 2015-10-20 |
Method of patterning a silicon nitride dielectric film Grant 9,093,389 - Nemani , et al. July 28, 2 | 2015-07-28 |
Methods For Barrier Layer Removal App 20150140827 - KAO; Chia-Ling ;   et al. | 2015-05-21 |
Methods For Forming Features In A Material Layer Utilizing A Combination Of A Main Etching And A Cyclical Etching Process App 20150056814 - LING; Mang-Mang ;   et al. | 2015-02-26 |
Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material Grant 8,932,959 - Nemani , et al. January 13, 2 | 2015-01-13 |
Near Surface Etch Selectivity Enhancement App 20140342569 - Zhu; Lina ;   et al. | 2014-11-20 |
Patterning Magnetic Memory App 20140308758 - Nemani; Srinivas D. ;   et al. | 2014-10-16 |
Method of patterning a low-k dielectric film Grant 8,802,572 - Nemani , et al. August 12, 2 | 2014-08-12 |
Method Of Patterning A Silicon Nitride Dielectric Film App 20140199851 - Nemani; Srinivas D. ;   et al. | 2014-07-17 |
Method And System For Etching Plural Layers On A Workpiece Including A Lower Layer Containing An Advanced Memory Material App 20140170856 - Nemani; Srinivas D. ;   et al. | 2014-06-19 |
Silicon oxide recess etch Grant 8,748,322 - Fung , et al. June 10, 2 | 2014-06-10 |
Method Of Patterning A Low-k Dielectric Film App 20140120726 - Nemani; Srinivas D. ;   et al. | 2014-05-01 |
Method of patterning a low-K dielectric film Grant 8,647,990 - Zhou , et al. February 11, 2 | 2014-02-11 |
Method Of Patterning A Low-k Dielectric Film App 20140017898 - Nemani; Srinivas D. ;   et al. | 2014-01-16 |
Method Of Patterning A Low-k Dielectric Film App 20130040464 - Zhou; Yifeng ;   et al. | 2013-02-14 |
Methods For Etching Silicon-based Antireflective Layers App 20110253670 - ZHOU; YIFENG ;   et al. | 2011-10-20 |
Plasma-based Organic Mask Removal With Silicon Fluoride App 20110079918 - ZHOU; Yifeng ;   et al. | 2011-04-07 |
Top gas feed lid for semiconductor processing chamber App 20030037879 - Askarinam, Farahmand E. ;   et al. | 2003-02-27 |
Substrate cleaning process Grant 6,440,864 - Kropewnicki , et al. August 27, 2 | 2002-08-27 |
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