Pellens; Rudy Jan Maria
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pellens; Rudy Jan Maria.The latest application filed is for "radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method".
- Pellens; Rudy Jan Maria - Overpelt BE
| Patent | Date |
|---|---|
| Radiation modulator for a lithography apparatus, a lithography apparatus, a method of modulating radiation for use in lithography, and a device manufacturing method Grant 9,823,576 - Smeets , et al. November 21, 2 | 2017-11-21 |
| Radiation Modulator For A Lithography Apparatus, A Lithography Apparatus, A Method Of Modulating Radiation For Use In Lithography, And A Device Manufacturing Method App 20140211189 - SMEETS; Dries ; et al. | 2014-07-31 |
| Lithographic apparatus and device manufacturing method Grant 8,780,321 - Knaapen , et al. July 15, 2 | 2014-07-15 |
| Lithographic apparatus and method Grant 8,576,374 - Best , et al. November 5, 2 | 2013-11-05 |
| Lithographic Apparatus And Device Manufacturing Method App 20110273679 - Knaapen; Thijs Egidius Johannes ; et al. | 2011-11-10 |
| Device manufacturing method and substrate comprising multiple resist layers Grant 7,892,903 - Pellens February 22, 2 | 2011-02-22 |
| Lithographic method and patterning device Grant 7,879,514 - Phillipps , et al. February 1, 2 | 2011-02-01 |
| Lithographic Apparatus And Device Manufacturing Method App 20100157260 - KNAAPEN; Thijs Egidius Johannes ; et al. | 2010-06-24 |
| Lithographic Method, Apparatus And Controller App 20100104959 - Vangheluwe; Rik Teodoor ; et al. | 2010-04-29 |
| Lithographic apparatus and method Grant 7,626,681 - Sutedja , et al. December 1, 2 | 2009-12-01 |
| Lithographic Apparatus And Method App 20090237635 - Best; Keith Frank ; et al. | 2009-09-24 |
| Lithographic Apparatus And Method App 20090153825 - EDART; Remi Daniel Marie ; et al. | 2009-06-18 |
| Lithographic apparatus and method App 20090128792 - Pellens; Rudy Jan, Maria ; et al. | 2009-05-21 |
| Substrate holder and device manufacturing method Grant 7,494,828 - Best , et al. February 24, 2 | 2009-02-24 |
| Lithographic apparatus and method App 20080118876 - Gui; Cheng-Qun ; et al. | 2008-05-22 |
| Lithographic method and patterning device App 20080032203 - Phillipps; Geoffrey Norman ; et al. | 2008-02-07 |
| Device, lithographic apparatus and device manufacturing method App 20070238261 - Krikhaar; Johannes Wilhelmus Maria ; et al. | 2007-10-11 |
| Device manufacturing method and substrate App 20050186785 - Pellens, Rudy Jan Maria | 2005-08-25 |
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