Pei; Jincheng
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pei; Jincheng.The latest application filed is for "thick photo resist layer metrology target".
- Pei; Jincheng - Shanghai CN
| Patent | Date |
|---|---|
| System and method for tilt calculation based on overlay metrology measurements Grant 11,360,398 - Volkovich , et al. June 14, 2 | 2022-06-14 |
| Thick Photo Resist Layer Metrology Target App 20210199427 - Lingyi; Guo ; et al. | 2021-07-01 |
| System And Method For Tilt Calculation Based On Overlay Metrology Measurements App 20210149313 - Volkovich; Roie ; et al. | 2021-05-20 |
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