Peethala; Cornelius B.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Peethala; Cornelius B..The latest application filed is for "back end of line integration for interconnects".
- Peethala; Cornelius B. - Slingerlands NY
- Peethala; Cornelius B. - Albany NY
| Patent | Date |
|---|---|
| Wet clean solutions to prevent pattern collapse Grant 11,094,527 - Peethala , et al. August 17, 2 | 2021-08-17 |
| Conductive interconnect having a semi-liner and no top surface recess Grant 11,004,735 - Peethala , et al. May 11, 2 | 2021-05-11 |
| Low oxygen cleaning for CMP equipment Grant 10,832,917 - Canaperi , et al. November 10, 2 | 2020-11-10 |
| Back End Of Line Integration For Interconnects App 20200219759 - Peethala; Cornelius B. ; et al. | 2020-07-09 |
| Back end of line integration for interconnects Grant 10,699,945 - Peethala , et al. | 2020-06-30 |
| Wet Clean Solutions To Prevent Pattern Collapse App 20200118808 - Peethala; Cornelius B. ; et al. | 2020-04-16 |
| Back End Of Line Integration For Interconnects App 20200111699 - Peethala; Cornelius B. ; et al. | 2020-04-09 |
| Conductive Interconnect Having A Semi-liner And No Top Surface Recess App 20200090988 - Peethala; Cornelius B. ; et al. | 2020-03-19 |
| Rework of patterned dielectric and metal hardmask films Grant 10,242,872 - Arnold , et al. | 2019-03-26 |
| Wet etch removal of Ru selective to other metals Grant 10,242,909 - Briggs , et al. | 2019-03-26 |
| Low Oxygen Cleaning For Cmp Equipment App 20180358231 - Canaperi; Donald F. ; et al. | 2018-12-13 |
| Low Oxygen Cleaning For Cmp Equipment App 20180358230 - Canaperi; Donald F. ; et al. | 2018-12-13 |
| WET ETCH REMOVAL OF Ru SELECTIVE TO OTHER METALS App 20180323151 - Briggs; Benjamin D. ; et al. | 2018-11-08 |
| Semiconductor device formed by wet etch removal of Ru selective to other metals Grant 10,090,247 - Briggs , et al. October 2, 2 | 2018-10-02 |
| Rework Of Patterned Dielectric And Metal Hardmask Films App 20180277369 - Arnold; John C. ; et al. | 2018-09-27 |
| Selective and non-selective barrier layer wet removal Grant 10,002,831 - Briggs , et al. June 19, 2 | 2018-06-19 |
| Barrier Planarization For Interconnect Metallization App 20180114718 - Briggs; Benjamin D. ; et al. | 2018-04-26 |
| Barrier Planarization For Interconnect Metallization App 20180114719 - Briggs; Benjamin D. ; et al. | 2018-04-26 |
| Barrier planarization for interconnect metallization Grant 9,881,833 - Briggs , et al. January 30, 2 | 2018-01-30 |
| Selective And Non-selective Barrier Layer Wet Removal App 20170317026 - Briggs; Benjamin D. ; et al. | 2017-11-02 |
| Selective and non-selective barrier layer wet removal Grant 9,806,023 - Briggs , et al. October 31, 2 | 2017-10-31 |
| Selective And Non-selective Barrier Layer Wet Removal App 20170301624 - Briggs; Benjamin D. ; et al. | 2017-10-19 |
| Selective and non-selective barrier layer wet removal Grant 9,685,406 - Briggs , et al. June 20, 2 | 2017-06-20 |
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