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Microelectronic workpiece holders and contact assemblies for use therewith Grant 7,645,366 - Hanson , et al. January 12, 2 | 2010-01-12 |
Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing Grant 7,288,179 - Pedersen , et al. October 30, 2 | 2007-10-30 |
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing Grant 7,288,172 - Pedersen , et al. October 30, 2 | 2007-10-30 |
Microelectronic workpiece holders and contact assemblies for use therewith App 20060226000 - Hanson; Kyle M. ;   et al. | 2006-10-12 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 7,048,841 - Batz, Jr. , et al. May 23, 2 | 2006-05-23 |
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces Grant 6,962,649 - Wilson , et al. November 8, 2 | 2005-11-08 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 6,939,448 - Batz, Jr. , et al. September 6, 2 | 2005-09-06 |
Method and apparatus for copper plating using electroless plating and electroplating App 20050189213 - Woodruff, Daniel J. ;   et al. | 2005-09-01 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces Grant 6,911,127 - Batz, Jr. , et al. June 28, 2 | 2005-06-28 |
Methods and apparatus for processing the surface of a microelectronic workpiece Grant 6,869,510 - Woodruff , et al. March 22, 2 | 2005-03-22 |
Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces Grant 6,773,560 - Pedersen , et al. August 10, 2 | 2004-08-10 |
Method and apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing App 20040134773 - Pedersen, John M. ;   et al. | 2004-07-15 |
Method and apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing App 20040134787 - Pedersen, John M. ;   et al. | 2004-07-15 |
Apparatus for processing the surface of a microelectronic workpiece Grant 6,699,373 - Woodruff , et al. March 2, 2 | 2004-03-02 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces App 20040035694 - Batz, Robert W. JR. ;   et al. | 2004-02-26 |
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing Grant 6,673,216 - Pedersen , et al. January 6, 2 | 2004-01-06 |
Methods and apparatus for processing the surface of a microelectronic workpiece Grant 6,645,356 - Woodruff , et al. November 11, 2 | 2003-11-11 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces App 20030196892 - Batz, Robert W. JR. ;   et al. | 2003-10-23 |
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces App 20030173209 - Batz, Robert W. JR. ;   et al. | 2003-09-18 |
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces App 20030141185 - Wilson, Gregory J. ;   et al. | 2003-07-31 |
Methods and apparatus for processing the surface of a microelectronic workpiece App 20020108851 - Woodruff, Daniel J. ;   et al. | 2002-08-15 |
Methods and apparatus for processing the surface of a microelectronic workpiece App 20020053510 - Woodruff, Daniel J. ;   et al. | 2002-05-09 |
Dry contact assemblies, methods for making dry contact assemblies, and plating machines with dry contact assemblies for plating microelectronic workpieces App 20020000372 - Pedersen, John M. ;   et al. | 2002-01-03 |
Method and apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing App 20010040099 - Pedersen, John M. ;   et al. | 2001-11-15 |
Methods and apparatus for processing the surface of a microelectronic workpiece Grant 6,309,520 - Woodruff , et al. October 30, 2 | 2001-10-30 |
Methods and apparatus for processing the surface of a microelectronic workpiece Grant 6,309,524 - Woodruff , et al. October 30, 2 | 2001-10-30 |
Methods and apparatus for processing the surface of a microelectronic workpiece Grant 6,303,010 - Woodruff , et al. October 16, 2 | 2001-10-16 |
Semiconductor processing system with wafer container docking and loading station Grant 5,660,517 - Thompson , et al. August 26, 1 | 1997-08-26 |