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Mirror Assembly Having A Hydrogen Barrier And Optical Assembly
App 20220206401 - PAZIDIS; Alexandra ; et al. | 2022-06-30 |
Mirror Assembly And Optical Assembly Comprising Same
App 20220187516 - PAZIDIS; Alexandra ; et al. | 2022-06-16 |
Method For Forming Nanostructures On A Surface And Optical Element
App 20210293996 - SHKLOVER; Vitaliy ; et al. | 2021-09-23 |
Reflective Optical Element
App 20210132269 - FORCHT; Konstantin ; et al. | 2021-05-06 |
Microlithographic Projection Exposure Apparatus
App 20170322343 - Kamenov; Vladimir ; et al. | 2017-11-09 |
Microlithographic projection exposure apparatus
Grant 9,733,395 - Kamenov , et al. August 15, 2 | 2017-08-15 |
Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element
Grant 9,684,252 - Zaczek , et al. June 20, 2 | 2017-06-20 |
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus
Grant 9,581,910 - Schlesener , et al. February 28, 2 | 2017-02-28 |
Mirror with dielectric coating
Grant 9,297,936 - Erxmeyer , et al. March 29, 2 | 2016-03-29 |
Method Of Lithographically Transferring A Pattern On A Light Sensitive Surface And Illumination System Of A Microlithographic Projection Exposure Apparatus
App 20150301455 - Schlesener; Frank ; et al. | 2015-10-22 |
Micromirror arrangement having a coating and method for the production thereof
Grant 8,928,980 - Weissenrieder , et al. January 6, 2 | 2015-01-06 |
Microlithographic Projection Exposure Apparatus
App 20140320955 - Kamenov; Vladimir ; et al. | 2014-10-30 |
Projection system with compensation of intensity variations and compensation element therefor
Grant 8,605,257 - Scheible , et al. December 10, 2 | 2013-12-10 |
Optical element for reflection of UV radiation, method for manufacturing the same and projection exposure apparatus comprising the same
Grant 8,488,103 - Pazidis , et al. July 16, 2 | 2013-07-16 |
Method of processing an optical element and an optical element, in particular for a microlithographic projection exposure apparatus
Grant 8,435,726 - Pazidis , et al. May 7, 2 | 2013-05-07 |
Mirror With Dielectric Coating
App 20130083411 - ERXMEYER; Jeffrey ; et al. | 2013-04-04 |
Microlithographic projection exposure apparatus
Grant 8,395,753 - Fiolka , et al. March 12, 2 | 2013-03-12 |
Off-axis objectives with rotatable optical element
Grant 8,339,575 - Pazidis , et al. December 25, 2 | 2012-12-25 |
Micromirror Arrangement Having A Coating And Method For The Production Thereof
App 20120182606 - WEISSENRIEDER; Karl-Stefan ; et al. | 2012-07-19 |
Optical Element With An Antireflection Coating, Projection Objective, And Exposure Apparatus Comprising Such An Element
App 20120038897 - ZACZEK; Christoph ; et al. | 2012-02-16 |
Optical element with an antireflection coating, projection objective, and exposure apparatus comprising such an element
Grant 8,049,964 - Zaczek , et al. November 1, 2 | 2011-11-01 |
Microlithographic Projection Exposure Apparatus
App 20110222043 - Kamenov; Vladimir ; et al. | 2011-09-15 |
Microlithographic Projection Exposure Apparatus
App 20110007293 - Fiolka; Damian ; et al. | 2011-01-13 |
Optical Element For Reflection Of Uv Radiation, Method For Manufacturing The Same And Projection Exposure Apparatus Comprising The Same
App 20100290021 - PAZIDIS; Alexandra ; et al. | 2010-11-18 |
Microlithographic projection exposure apparatus
Grant 7,817,250 - Fiolka , et al. October 19, 2 | 2010-10-19 |
Optical element, projection lens and associated projection exposure apparatus
Grant 7,738,187 - Pazidis , et al. June 15, 2 | 2010-06-15 |
Microlithographic exposure apparatus
Grant 7,518,797 - Pazidis , et al. April 14, 2 | 2009-04-14 |
Off-axis Objectives With Rotatable Optical Element
App 20090073412 - PAZIDIS; Alexandra ; et al. | 2009-03-19 |
Pellicle For Use In A Microlithographic Exposure Apparatus
App 20090059189 - Goehnermeier; Aksel ; et al. | 2009-03-05 |
Microlithographic Projection Exposure Apparatus
App 20090021719 - Fiolka; Damian ; et al. | 2009-01-22 |
Method Of Processing An Optical Element And An Optical Element, In Particular For A Microlithographic Projection Exposure Apparatus
App 20080309905 - PAZIDIS; Alexandra ; et al. | 2008-12-18 |
Optical Element, Projection Lens And Associated Projection Exposure Apparatus
App 20080304035 - Pazidis; Alexandra ; et al. | 2008-12-11 |
Microlithographic projection exposure apparatus
App 20080297754 - Kamenov; Vladimir ; et al. | 2008-12-04 |
Projection objective for immersion lithography
Grant 7,460,206 - Weissenrieder , et al. December 2, 2 | 2008-12-02 |
Projection Objective For Immersion Lithography
App 20080291419 - Weissenrieder; Karl-Stefan ; et al. | 2008-11-27 |
Optical Element with an Antireflection Coating, Projection Objective, and Exposure Apparatus Comprising Such an Element
App 20080192335 - Zaczek; Christoph ; et al. | 2008-08-14 |
Projection System with Compensation of Intensity Variations and Compensation Element Therefor
App 20080094599 - Scheible; Patrick ; et al. | 2008-04-24 |
Objective with crystal lenses
App 20070242250 - Goehnermeier; Aksel ; et al. | 2007-10-18 |
Objective with crystal lenses
Grant 7,239,447 - Goehnermeier , et al. July 3, 2 | 2007-07-03 |
Microlithographic exposure apparatus
App 20070128453 - Pazidis; Alexandra ; et al. | 2007-06-07 |
Projection objective for immersion lithography
App 20050225737 - Weissenrieder, Karl-Stefan ; et al. | 2005-10-13 |
Objective with crystal lenses
App 20050157401 - Goehnermeier, Aksel ; et al. | 2005-07-21 |
Method and device for decontaminating optical surfaces
Grant 6,796,664 - Luedecke , et al. September 28, 2 | 2004-09-28 |
Method and device for decontaminating optical surfaces
App 20030210458 - Luedecke, Jens ; et al. | 2003-11-13 |
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