loadpatents
Patent applications and USPTO patent grants for Payne; Makonnen.The latest application filed is for "post-etch residue removal for advanced node beol processing".
Patent | Date |
---|---|
Post-etch residue removal for advanced node beol processing Grant 10,790,187 - Cooper , et al. September 29, 2 | 2020-09-29 |
Cleaning compositions for removing post etch residue Grant 10,577,567 - Payne , et al. | 2020-03-03 |
Post-etch Residue Removal For Advanced Node Beol Processing App 20180204764 - Cooper; Emanuel I. ;   et al. | 2018-07-19 |
Cleaning Compositions For Removing Post Etch Residue App 20180148669 - Payne; Makonnen ;   et al. | 2018-05-31 |
Composition for and method of suppressing titanium nitride corrosion Grant 9,416,338 - Cooper , et al. August 16, 2 | 2016-08-16 |
Facilities manifold with proximity sensor Grant 9,031,700 - Payne , et al. May 12, 2 | 2015-05-12 |
Wet Processing Systems and Methods with Replenishment App 20140273497 - Payne; Makonnen ;   et al. | 2014-09-18 |
Composition For And Method Of Suppressing Titanium Nitride Corrosion App 20130303420 - Cooper; Emanuel I. ;   et al. | 2013-11-14 |
Method For Preventing The Collapse Of High Aspect Ratio Structures During Drying App 20130280123 - Chen; Tianniu ;   et al. | 2013-10-24 |
Facilites Manifold with Proximity Sensor App 20130090765 - Payne; Makonnen ;   et al. | 2013-04-11 |
Dry cleansing wipe with improved rinsibility App 20030140439 - Durden, Catherine ;   et al. | 2003-07-31 |
Dry cleansing wipe with improved rinsibility App 20030143263 - Durden, Catherine ;   et al. | 2003-07-31 |
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