Pavelchek; Edward K.
Patent Applications and Registrations
Patent applications and USPTO patent grants for Pavelchek; Edward K..The latest application filed is for "dyed photoresists and methods and articles of manufacture comprising same".
- Pavelchek; Edward K. - Stow MA
- Pavelchek; Edward K. - Waltham MA
| Patent | Date |
|---|---|
| Coating compositions for use with an overcoated photoresist Grant 8,142,988 - Zampini , et al. March 27, 2 | 2012-03-27 |
| Dyed photoresists and methods and articles of manufacture comprising same Grant 7,632,630 - Mori , et al. December 15, 2 | 2009-12-15 |
| Dyed photoresists and methods and articles of manufacture comprising same App 20090220888 - Mori; James Michael ; et al. | 2009-09-03 |
| Dyed photoresists and methods and articles of manufacture comprising same Grant 7,147,983 - Mori , et al. December 12, 2 | 2006-12-12 |
| Coating compositions for use with an overcoated photoresist App 20060275696 - Zampini; Anthony ; et al. | 2006-12-07 |
| Coating compositions for use with an overcoated photoresist App 20060228646 - Zampini; Anthony ; et al. | 2006-10-12 |
| Dyed photoresists and methods and articles of manufacture comprising same App 20060204892 - Mori; James Michael ; et al. | 2006-09-14 |
| Antireflective coating compositions Grant 7,026,101 - Trefonas, III , et al. April 11, 2 | 2006-04-11 |
| Antireflective hard mask compositions Grant 7,018,717 - Pavelchek March 28, 2 | 2006-03-28 |
| Antireflective hard mask compositions Grant 6,890,448 - Pavelchek May 10, 2 | 2005-05-10 |
| Antireflective coating compositions Grant 6,887,648 - Pavelchek , et al. May 3, 2 | 2005-05-03 |
| Planarizing antireflective coating compositions Grant 6,855,466 - Pavelchek , et al. February 15, 2 | 2005-02-15 |
| Antireflective coating compositions comprising photoacid generators Grant 6,849,373 - Pavelchek , et al. February 1, 2 | 2005-02-01 |
| Antireflective coating compositions App 20040219453 - Pavelchek, Edward K. ; et al. | 2004-11-04 |
| Antireflective coating compositions Grant 6,767,689 - Pavelchek , et al. July 27, 2 | 2004-07-27 |
| Aperture fill Grant 6,749,765 - Rutter, Jr. , et al. June 15, 2 | 2004-06-15 |
| High conformality antireflective coating compositions Grant 6,653,049 - Pavelchek , et al. November 25, 2 | 2003-11-25 |
| Antireflective hard mask compositions App 20030209515 - Pavelchek, Edward K. | 2003-11-13 |
| Antireflective coating compositions and exposure methods under 200 nm Grant 6,602,652 - Adams , et al. August 5, 2 | 2003-08-05 |
| Antireflective coating compositions App 20030008237 - Pavelchek, Edward K. ; et al. | 2003-01-09 |
| Antireflective Hard Mask Compositions App 20020195419 - PAVELCHEK, EDWARD K. | 2002-12-26 |
| Antireflective coating compositions App 20020172896 - Adams, Timothy G. ; et al. | 2002-11-21 |
| Aperture fill Grant 6,461,717 - Rutter, Jr. , et al. October 8, 2 | 2002-10-08 |
| Aperture fill App 20020110665 - Rutter, Edward W. JR. ; et al. | 2002-08-15 |
| Methods utilizing antireflective coating compositions with exposure under 200 nm Grant 6,410,209 - Adams , et al. June 25, 2 | 2002-06-25 |
| Antireflective coating compositions App 20020031729 - Trefonas, Peter III ; et al. | 2002-03-14 |
| Planarizing antireflective coating compositions App 20020022196 - Pavelchek, Edward K. ; et al. | 2002-02-21 |
| Antireflective coating compositions comprising photoacid generators App 20020012875 - Pavelchek, Edward K. ; et al. | 2002-01-31 |
| Planarizing antireflective coating compositions Grant 6,316,165 - Pavelchek , et al. November 13, 2 | 2001-11-13 |
| High conformality antireflective coating compositions App 20010012598 - Pavelchek, Edward K. ; et al. | 2001-08-09 |
| Antireflective coating compositions comprising photoacid generators Grant 6,261,743 - Pavelchek , et al. July 17, 2 | 2001-07-17 |
| High conformality antireflective coating compositions Grant 6,190,839 - Pavelchek , et al. February 20, 2 | 2001-02-20 |
| Antireflective coating compositions comprising photoacid generators Grant 5,939,236 - Pavelchek , et al. August 17, 1 | 1999-08-17 |
| Methods for treating photoresists Grant 5,366,852 - Pavelchek , et al. November 22, 1 | 1994-11-22 |
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