Patra; Michael

Patent Applications and Registrations

Patent applications and USPTO patent grants for Patra; Michael.The latest application filed is for "optical illumination system for guiding euv radiation".

Company Profile

11.74.75

Patra; Michael - Oberkochen DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Stop for arrangement in a constriction of an EUV illumination beam Grant 11,350,513 - Patra May 31, 2	2022-05-31
Optical Illumination System For Guiding Euv Radiation App 20220163897 - Patra; Michael	2022-05-26
Measurement Illumination Optical Unit For Guiding Illumination Light Into An Object Field Of A Projection Exposure System For Euv Lithography App 20220057717 - Fischer; Thomas ; et al.	2022-02-24
Optical system for transferring original structure portions of a lithography mask, projection optical unit for imaging an object field in which at least one original structure portion of the lithography mask is arrangeable, and lithography mask Grant 11,137,688 - Patra , et al. October 5, 2	2021-10-05
Stop For Arrangement In A Constriction Of An Euv Illumination Beam App 20210084741 - Patra; Michael	2021-03-18
Optical System For Transferring Original Structure Portions Of A Lithography Mask, Projection Optical Unit For Imaging An Object Field In Which At Least One Original Structure Portion Of The Lithography Mask Is Arrangeable, And Lithography Mask App 20210055661 - PATRA; Michael ; et al.	2021-02-25
Illumination optic for projection lithography Grant 10,928,733 - Patra February 23, 2	2021-02-23
Optical assembly for guiding an output beam of a free electron laser Grant 10,928,734 - Patra February 23, 2	2021-02-23
Optical system for a projection exposure apparatus Grant 10,871,717 - Patra December 22, 2	2020-12-22
Illumination Optic For Projection Lithography App 20200348600 - Patra; Michael	2020-11-05
Method for the microlithographic production of microstructured components Grant 10,802,403 - Patra October 13, 2	2020-10-13
Optical System For A Projection Exposure Apparatus App 20200218164 - Patra; Michael	2020-07-09
Projection exposure method and projection exposure apparatus for microlithography Grant 10,678,144 - Patra	2020-06-09
Projection Exposure Method And Projection Exposure Apparatus For Microlithography App 20200096877 - Patra; Michael	2020-03-26
Optical Assembly For Guiding An Output Beam Of A Free Electron Laser App 20200019064 - Patra; Michael	2020-01-16
Projection exposure method and projection exposure apparatus for microlithography Grant 10,514,611 - Patra Dec	2019-12-24
Method For The Microlithographic Production Of Microstructured Components App 20190243248 - Patra; Michael	2019-08-08
Projection Exposure Method And Projection Exposure Apparatus For Microlithography App 20190204756 - Patra; Michael	2019-07-04
Illumination system for EUV projection lithography Grant 10,310,381 - Patra , et al.	2019-06-04
Optical component for use in a radiation source module of a projection exposure system Grant 10,288,894 - Patra , et al.	2019-05-14
Facet mirror for an illumination optical unit for projection lithography Grant 10,216,091 - Deguenther , et al. Feb	2019-02-26
Illumination system for illuminating a mask in a microlithographic exposure apparatus Grant 10,191,382 - Schubert , et al. Ja	2019-01-29
Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation Grant 10,146,135 - Layh , et al. De	2018-12-04
Illumination System For Illuminating A Mask In A Microlithographic Exposure Apparatus App 20180335702 - Schubert; Erich ; et al.	2018-11-22
Optical component Grant 10,133,183 - Patra , et al. November 20, 2	2018-11-20
Illumination optical unit for EUV projection lithography Grant 10,126,658 - Patra November 13, 2	2018-11-13
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ; et al.	2018-08-30
Beam distributing optical device and associated unit, system and apparatus Grant 10,061,203 - Deguenther , et al. August 28, 2	2018-08-28
Illumination System For Euv Projection Lithography App 20180224750 - Patra; Michael ; et al.	2018-08-09
Illumination optical unit for EUV projection lithography Grant 10,018,917 - Bieling , et al. July 10, 2	2018-07-10
Projection exposure apparatus and method for controlling a projection exposure apparatus Grant 10,007,193 - Patra , et al. June 26, 2	2018-06-26
Spectacle lens for a display device that can be fitted on the head of a user and generates an image, and display device with such a spectacle lens Grant 9,989,766 - Dobschal , et al. June 5, 2	2018-06-05
Spectacle lens for a display device that can be fitted on the head of a user and generates an image, and display device with such a spectacle lens Grant 9,989,767 - Dobschal , et al. June 5, 2	2018-06-05
Illumination system of a microlithographic projection exposure apparatus Grant 9,983,483 - Patra , et al. May 29, 2	2018-05-29
Illumination system for illuminating a mask in a microlithographic exposure apparatus Grant 9,977,333 - Schubert , et al. May 22, 2	2018-05-22
Illumination system for EUV projection lithography Grant 9,958,783 - Patra , et al. May 1, 2	2018-05-01
Microlithography illumination optical system and microlithography projection exposure apparatus including same Grant 9,933,704 - Patra , et al. April 3, 2	2018-04-03
Illumination optical unit and illumination system for EUV projection lithography Grant 9,915,874 - Patra March 13, 2	2018-03-13
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2	2018-02-20
Illumination optical unit Grant 9,891,530 - Endres , et al. February 13, 2	2018-02-13
System for producing structures in a substrate Grant 9,880,474 - Patra January 30, 2	2018-01-30
Illumination system for an EUV projection lithographic projection exposure apparatus Grant 9,851,641 - Patra December 26, 2	2017-12-26
Illumination System For Illuminating A Mask In A Microlithographic Exposure Apparatus App 20170351183 - Schubert; Erich ; et al.	2017-12-07
Facet mirror for a projection exposure apparatus Grant 9,823,577 - Patra , et al. November 21, 2	2017-11-21
EUV light source for a lighting device of a microlithographic projection exposure apparatus Grant 9,823,571 - Patra November 21, 2	2017-11-21
Assembly for a projection exposure apparatus for EUV projection lithography Grant 9,791,784 - Patra , et al. October 17, 2	2017-10-17
Method for assigning a pupil facet of a pupil facet mirror of an illumination optical unit of a projection exposure apparatus to a field facet of a field facet mirror of the illumination optical unit Grant 9,791,785 - Patra October 17, 2	2017-10-17
Optical Component App 20170293154 - Patra; Michael ; et al.	2017-10-12
Illumination optical unit for projection lithography Grant 9,753,375 - Scholz , et al. September 5, 2	2017-09-05
Spectacle Lens For A Display Device That Can Be Fitted On The Head Of A User And Generates An Image, And Display Device With Such A Spectacle Lens App 20170192237 - DOBSCHAL; Hans-Juergen ; et al.	2017-07-06
Facet Mirror For An Illumination Optical Unit For Projection Lithography App 20170176865 - Deguenther; Markus ; et al.	2017-06-22
Illumination system of a microlithographic projection exposure apparatus Grant 9,678,438 - Patra , et al. June 13, 2	2017-06-13
Illumination Optical Unit For Euv Projection Lithography App 20170160642 - Bieling; Stig ; et al.	2017-06-08
Illumination system of a microlithographic projection exposure apparatus Grant 9,671,699 - Patra June 6, 2	2017-06-06
Illumination optical unit for EUV projection lithography, and optical system comprising such an illumination optical unit Grant 9,645,501 - Patra , et al. May 9, 2	2017-05-09
Method of operating a microlithographic apparatus Grant 9,612,540 - Patra April 4, 2	2017-04-04
Illumination optical unit for EUV projection lithography Grant 9,612,537 - Patra April 4, 2	2017-04-04
Illumination Apparatus For A Projection Exposure System App 20170082929 - Patra; Michael ; et al.	2017-03-23
Illumination system for illuminating a mask in a microlithographic exposure apparatus Grant 9,599,904 - Schubert , et al. March 21, 2	2017-03-21
Method of lithographically transferring a pattern on a light sensitive surface and illumination system of a microlithographic projection exposure apparatus Grant 9,581,910 - Schlesener , et al. February 28, 2	2017-02-28
Spectacle Lens For A Display Device That Can Be Fitted On The Head Of A User And Generates An Image, And Display Device With Such A Spectacle Lens App 20170045743 - DOBSCHAL; Hans-Juergen ; et al.	2017-02-16
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20170038691 - Patra; Michael ; et al.	2017-02-09
Monitor system for determining orientations of mirror elements and EUV lithography system Grant 9,563,129 - Wangler , et al. February 7, 2	2017-02-07
Euv Light Source For A Lighting Device Of A Microlithographic Projection Exposure Apparatus App 20170003597 - Patra; Michael	2017-01-05
Optical system for a microlithographic projection exposure apparatus Grant 9,535,331 - Patra , et al. January 3, 2	2017-01-03
Optical Component App 20160370707 - Patra; Michael ; et al.	2016-12-22
Beam Distributing Optical Device And Associated Unit, System And Apparatus App 20160357114 - Deguenther; Markus ; et al.	2016-12-08
Illumination system of a microlithographic projection exposure apparatus Grant 9,477,157 - Patra , et al. October 25, 2	2016-10-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ; et al.	2016-09-15
Illumination System For Euv Projection Lithography App 20160252823 - Patra; Michael ; et al.	2016-09-01
Mask for microlithography and scanning projection exposure method utilizing the mask Grant 9,423,686 - Patra , et al. August 23, 2	2016-08-23
Illumination Optical Unit And Illumination System For Euv Projection Lithography App 20160187784 - Patra; Michael	2016-06-30
Illumination Optical Unit For Euv Projection Lithography App 20160187786 - Patra; Michael	2016-06-30
Illumination System For Illuminating A Mask In A Microlithographic Exposure Apparatus App 20160187789 - Schubert; Erich ; et al.	2016-06-30
Facet Mirror For A Projection Exposure Apparatus App 20160170308 - Patra; Michael ; et al.	2016-06-16
Illumination Optical Unit For Euv Projection Lithography App 20160154316 - Patra; Michael	2016-06-02
Illumination system for illuminating a mask in a microlithographic exposure apparatus Grant 9,310,694 - Schubert , et al. April 12, 2	2016-04-12
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160070176 - Patra; Michael ; et al.	2016-03-10
Illumination optical unit for EUV projection lithography Grant 9,280,061 - Patra March 8, 2	2016-03-08
Illumination system of a microlithographic projection exposure apparatus Grant 9,280,055 - Patra , et al. March 8, 2	2016-03-08
System For Producing Structures In A Substrate App 20160062244 - Patra; Michael	2016-03-03
Illumination system of a microlithographic projection exposure apparatus Grant 9,261,695 - Patra February 16, 2	2016-02-16
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2	2016-01-19
Illumination system of a microlithographic projection exposure apparatus Grant 9,213,244 - Patra , et al. December 15, 2	2015-12-15
Method Of Lithographically Transferring A Pattern On A Light Sensitive Surface And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150301455 - Schlesener; Frank ; et al.	2015-10-22
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ; et al.	2015-10-22
EUV light source Grant 9,161,426 - Patra October 13, 2	2015-10-13
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150234291 - Patra; Michael ; et al.	2015-08-20
Method For Assigning A Pupil Facet Of A Pupil Facet Mirror Of An Illumination Optical Unit Of A Projection Exposure Apparatus To A Field Facet Of A Field Facet Mirror Of The Illumination Optical Unit App 20150198891 - Patra; Michael	2015-07-16
Monitor System For Determining Orientations Of Mirror Elements And Euv Lithography System App 20150198894 - Wangler; Johannes ; et al.	2015-07-16
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150185622 - Patra; Michael	2015-07-02
Microlithographic Projection Exposure Apparatus Having A Multi-mirror Array With Temporal Stabilisation App 20150177623 - Layh; Michael ; et al.	2015-06-25
Method Of Operating A Microlithographic Apparatus App 20150168849 - Patra; Michael	2015-06-18
Illumination system of a microlithographic projection exposure apparatus Grant 9,046,786 - Patra , et al. June 2, 2	2015-06-02
Euv Light Source App 20150137012 - Patra; Michael	2015-05-21
Illumination System For An Euv Projection Lithographic Projection Exposure Apparatus App 20150124233 - Patra; Michael	2015-05-07
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2	2015-04-28
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2	2015-04-21
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2	2015-04-07
Illumination Optical Unit App 20150092174 - Endres; Martin ; et al.	2015-04-02
Projection Exposure Apparatus And Method For Controlling A Projection Exposure Apparatus App 20150085271 - Patra; Michael ; et al.	2015-03-26
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150070671 - Patra; Michael	2015-03-12
Assembly For A Projection Exposure Apparatus For Euv Projection Lithography App 20150062549 - Patra; Michael ; et al.	2015-03-05
Illumination Optical Unit For Euv Projection Lithography App 20150036115 - Patra; Michael	2015-02-05
Optical System For A Microlithographic Projection Exposure Apparatus App 20150029477 - Patra; Michael ; et al.	2015-01-29
Illumination Optical Unit For Projection Lithography App 20150015862 - Scholz; Axel ; et al.	2015-01-15
Mask For Microlithography And Scanning Projection Exposure Method Utilizing The Mask App 20140377692 - Patra; Michael ; et al.	2014-12-25
Illumination Optical Unit For Euv Projection Lithography, And Optical System Comprising Such An Illumination Optical Unit App 20140368803 - Patra; Michael ; et al.	2014-12-18
Illumination Optical Unit For Euv Projection Lithography App 20140362361 - Patra; Michael	2014-12-11
Projection exposure method, projection exposure apparatus, laser radiation source and bandwidth narrowing module for a laser radiation source Grant 8,896,816 - Patra November 25, 2	2014-11-25
Microlithographic projection exposure apparatus Grant 8,854,604 - Deguenther , et al. October 7, 2	2014-10-07
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ; et al.	2014-08-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ; et al.	2014-08-14
Microlithographic Projection Exposure Apparatus App 20140211188 - Layh; Michael ; et al.	2014-07-31
Optical raster element, optical integrator and illumination system of a microlithographic projection exposure apparatus Grant 8,724,080 - Patra May 13, 2	2014-05-13
Microlithographic projection exposure apparatus having a multi-mirror array with temporal stabilisation Grant 8,724,086 - Layh , et al. May 13, 2	2014-05-13
Microlithographic projection exposure apparatus and related method Grant 8,593,645 - Patra November 26, 2	2013-11-26
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130308115 - Patra; Michael ; et al.	2013-11-21
Illumination System For Illuminating A Mask In A Microlithographic Exposure Apparatus App 20130250264 - Schubert; Erich ; et al.	2013-09-26
Method for setting an illumination geometry for an illumination optical unit for EUV projection lithography Grant 8,514,372 - Patra August 20, 2	2013-08-20
Method For Setting An Illumination Geometry For An Illumination Optical Unit For Euv Projection Lithography App 20130194559 - Patra; Michael	2013-08-01
Illumination system for illuminating a mask in a microlithographic exposure apparatus Grant 8,467,031 - Schubert , et al. June 18, 2	2013-06-18
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130114060 - Patra; Michael ; et al.	2013-05-09
Microlithography Illumination Optical System And Microlithography Projection Exposure Apparatus Including Same App 20130077076 - Patra; Michael ; et al.	2013-03-28
Illumination System Of A Microlithographic Projection Exposure Apparatus App 20130057844 - Patra; Michael ; et al.	2013-03-07
Polarization actuator Grant 8,373,847 - Patra , et al. February 12, 2	2013-02-12
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2	2012-12-25
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ; et al.	2012-11-22
Microlithographic Projection Exposure Apparatus And Related Method App 20120105865 - Patra; Michael	2012-05-03
Polarization Actuator App 20120099093 - Patra; Michael ; et al.	2012-04-26
Microlithographic Projection Exposure Apparatus App 20120002185 - Deguenther; Markus ; et al.	2012-01-05
Projection Exposure Method, Projection Exposure Apparatus, Laser Radiation Source And Bandwidth Narrowing Module For A Laser Radiation Source App 20110304837 - Patra; Michael	2011-12-15
Optical Raster Element, Optical Integrator And Illumination System Of A Microlithographic Projection Exposure Apparatus App 20110194090 - Patra; Michael	2011-08-11
Microlithographic Projection Exposure Apparatus App 20100283984 - Layh; Michael ; et al.	2010-11-11
Microlithographic Projection Exposure Apparatus App 20100283985 - Layh; Michael ; et al.	2010-11-11
Illumination System For Illuminating A Mask In A Microlithographic Exposure Apparatus App 20100265482 - Schubert; Erich ; et al.	2010-10-21
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ; et al.	2010-02-18
Illumination Optics For Projection Microlithography And Related Methods App 20090262324 - Patra; Michael ; et al.	2009-10-22