PATERSON; Alexander Miller

Patent Applications and Registrations

Patent applications and USPTO patent grants for PATERSON; Alexander Miller.The latest application filed is for "edge ring systems for substrate processing systems".

Company Profile

7.7.13

PATERSON; Alexander Miller - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Edge Ring Systems For Substrate Processing Systems App 20220285136 - HAN; Hui Ling ; et al.	2022-09-08
Etching isolation features and dense features within a substrate Grant 11,398,387 - Shoeb , et al. July 26, 2	2022-07-26
Dual-frequency, Direct-drive Inductively Coupled Plasma Source App 20220199365 - Long; Maolin ; et al.	2022-06-23
Substrate Location Detection And Adjustment App 20220126454 - Martin; Michael John ; et al.	2022-04-28
Etching Isolation Features And Dense Features Within A Substrate App 20210358757 - Shoeb; Juline ; et al.	2021-11-18
Metal Contamination Reduction In Substrate Processing Systems With Transformer Coupled Plasma App 20210327689 - Long; Maolin ; et al.	2021-10-21
Direct Frequency Tuning For Matchless Plasma Source In Substrate Processing Systems App 20210210314 - WANG; Yuhou ; et al.	2021-07-08
Metal contamination reduction in substrate processing systems with transformer coupled plasma Grant 11,056,321 - Long , et al. July 6, 2	2021-07-06
Monoenergetic ion generation for controlled etch Grant 11,011,351 - Shoeb , et al. May 18, 2	2021-05-18
Image based plasma sheath profile detection on plasma processing tools Grant 10,957,521 - Wang , et al. March 23, 2	2021-03-23
Systems For Cooling Rf Heated Chamber Components App 20210050188 - MCCHESNEY; Jon ; et al.	2021-02-18
Auxiliary circuit in RF matching network for frequency tuning assisted dual-level pulsing Grant 10,879,044 - Wang , et al. December 29, 2	2020-12-29
Systems for cooling RF heated chamber components Grant 10,825,661 - McChesney , et al. November 3, 2	2020-11-03
Metal Contamination Reduction In Substrate Processing Systems With Transformer Coupled Plasma App 20200219708 - LONG; Maolin ; et al.	2020-07-09
Edge ring centering method using ring dynamic alignment data Grant 10,541,168 - Tan , et al. Ja	2020-01-21
Monoenergetic Ion Generation For Controlled Etch App 20200020510 - Shoeb; Juline ; et al.	2020-01-16
Image Based Plasma Sheath Profile Detection On Plasma Processing Tools App 20190371581 - Wang; Yuhou ; et al.	2019-12-05
Auxiliary Circuit In Rf Matching Network For Frequency Tuning Assisted Dual-level Pulsing App 20180294566 - Wang; Yuhou ; et al.	2018-10-11
Systems For Cooling Rf Heated Chamber Components App 20180247796 - MCCHESNEY; Jon ; et al.	2018-08-30
Edge Ring Centering Method Using Ring Dynamic Alignment Data App 20180138069 - Tan; Ali Sucipto ; et al.	2018-05-17

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