Patel; Shardul
Patent Applications and Registrations
Patent applications and USPTO patent grants for Patel; Shardul.The latest application filed is for "cryogenically cooled rotatable electrostatic chuck".
- Patel; Shardul - Chelmsford MA
- Patel; Shardul - North Reading MA
- Patel; Shardul - Woburn MA
| Patent | Date |
|---|---|
| Cryogenically cooled rotatable electrostatic chuck Grant 11,149,345 - Patel , et al. October 19, 2 | 2021-10-19 |
| Cryogenically Cooled Rotatable Electrostatic Chuck App 20190181028 - PATEL; SHARDUL ; et al. | 2019-06-13 |
| Hybrid Electrostatic Lens With Increased Natural Frequency App 20150048254 - Naumovski; Oliver V. ; et al. | 2015-02-19 |
| Hybrid electrostatic lens with increased natural frequency Grant 8,907,295 - Naumovski , et al. December 9, 2 | 2014-12-09 |
| Hybrid Electrostatic Lens With Increased Natural Frequency App 20140034843 - Naumovski; Oliver V. ; et al. | 2014-02-06 |
| Apparatus for controlling the temperature of an RF ion source window Grant 8,436,318 - Sinclair , et al. May 7, 2 | 2013-05-07 |
| Temperature controlled ion source Grant 8,188,448 - Benveniste , et al. May 29, 2 | 2012-05-29 |
| Temperature controlled ion source Grant 8,183,542 - Benveniste , et al. May 22, 2 | 2012-05-22 |
| Temperature Controlled Ion Source App 20110240877 - Benveniste; Victor ; et al. | 2011-10-06 |
| Temperature Controlled Ion Source App 20110240878 - Benveniste; Victor ; et al. | 2011-10-06 |
| Apparatus For Controlling The Temperature Of An Rf Ion Source Window App 20110240876 - Sinclair; Frank ; et al. | 2011-10-06 |
| Method and apparatus for controlling beam current uniformity in an ion implanter Grant 8,003,956 - Lischer , et al. August 23, 2 | 2011-08-23 |
| Method And Apparatus For Controlling Beam Current Uniformity In An Ion Implanter App 20100084582 - LISCHER; D. Jeffrey ; et al. | 2010-04-08 |
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