Patel; Satyadev R.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Patel; Satyadev R..The latest application filed is for "electrical connections in microelectromechanical devices".

Company Profile

0.42.50

Patel; Satyadev R. - Palo Alto CA
Patel; Satyadev R. - Sunnyvale CA
Patel; Satyadev R. - Elk Grove CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of fabricating micromirror device Grant 7,866,036 - Doan , et al. January 11, 2	2011-01-11
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,671,428 - Patel , et al. March 2, 2	2010-03-02
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,655,492 - Patel , et al. February 2, 2	2010-02-02
Method for making a micromechanical device by using a sacrificial substrate Grant 7,629,190 - Patel , et al. December 8, 2	2009-12-08
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,586,668 - Patel , et al. September 8, 2	2009-09-08
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,573,111 - Patel , et al. August 11, 2	2009-08-11
Pre-oxidization of deformable elements of microstructures Grant 7,514,012 - Doan , et al. April 7, 2	2009-04-07
Electrical Connections in Microelectromechanical Devices App 20090039536 - Doan; Jonathan C. ; et al.	2009-02-12
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,449,358 - Patel , et al. November 11, 2	2008-11-11
Electrical connections in microelectromechanical devices Grant 7,436,573 - Doan , et al. October 14, 2	2008-10-14
Method and forming a micromirror array device with a small pitch size Grant 7,422,920 - Patel , et al. September 9, 2	2008-09-09
Spatial light modulators with light blocking/absorbing areas Grant 7,405,860 - Huibers , et al. July 29, 2	2008-07-29
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,286,278 - Patel , et al. October 23, 2	2007-10-23
Apparatus And Method For Detecting An Endpoint In A Vapor Phase Etch App 20070119814 - Patel; Satyadev R. ; et al.	2007-05-31
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 7,198,982 - Patel , et al. April 3, 2	2007-04-03
Apparatus and method for detecting an endpoint in a vapor phase etch Grant 7,189,332 - Patel , et al. March 13, 2	2007-03-13
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20070001247 - Patel; Satyadev R. ; et al.	2007-01-04
Micromirror array device with a small pitch size App 20060177957 - Patel; Satyadev R. ; et al.	2006-08-10
Method for vapor phase etching of silicon Grant 7,041,224 - Patel , et al. May 9, 2	2006-05-09
Etching method used in fabrications of microstructures Grant 7,027,200 - Shi , et al. April 11, 2	2006-04-11
Micromirror array device with a small pitch size Grant 7,019,376 - Patel , et al. March 28, 2	2006-03-28
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 7,002,726 - Patel , et al. February 21, 2	2006-02-21
Micromirror device App 20060033977 - Patel; Satyadev R. ; et al.	2006-02-16
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,995,034 - Patel , et al. February 7, 2	2006-02-07
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,995,040 - Patel , et al. February 7, 2	2006-02-07
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 6,980,347 - Patel , et al. December 27, 2	2005-12-27
Micromirror having reduced space between hinge and mirror plate of the micromirror Grant 6,972,891 - Patel , et al. December 6, 2	2005-12-06
High angle micro-mirrors and processes Grant 6,970,280 - Patel , et al. November 29, 2	2005-11-29
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates Grant 6,969,635 - Patel , et al. November 29, 2	2005-11-29
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050260793 - Patel, Satyadev R. ; et al.	2005-11-24
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050260792 - Patel, Satyadev R. ; et al.	2005-11-24
Electrical connections in microelectromechanical devices App 20050250362 - Doan, Jonathan C. ; et al.	2005-11-10
Methods for forming and releasing microelectromechanical structures Grant 6,960,305 - Doan , et al. November 1, 2	2005-11-01
Micromirror Having Reduced Space Between Hinge And Mirror Plate Of The Micromirror App 20050231789 - Patel, Satyadev R. ; et al.	2005-10-20
Hinge structures for micro-mirror arrays Grant 6,952,302 - Doan , et al. October 4, 2	2005-10-04
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050214976 - Patel, Satyadev R. ; et al.	2005-09-29
Micromirror having reduced space between hinge and mirror plate of the micromirror App 20050213190 - Patel, Satyadev R. ; et al.	2005-09-29
Multiple hinge MEMS device Grant 6,950,223 - Huibers , et al. September 27, 2	2005-09-27
Apparatus and method for flow of process gas in an ultra-clean environment Grant 6,949,202 - Patel , et al. September 27, 2	2005-09-27
Method for achieving improved selectivity in an etching process Grant 6,942,811 - Patel , et al. September 13, 2	2005-09-13
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050191790 - Patel, Satyadev R. ; et al.	2005-09-01
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050191789 - Patel, Satyadev R. ; et al.	2005-09-01
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050179982 - Patel, Satyadev R. ; et al.	2005-08-18
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050181532 - Patel, Satyadev R. ; et al.	2005-08-18
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050180686 - Patel, Satyadev R. ; et al.	2005-08-18
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050173711 - Patel, Satyadev R. ; et al.	2005-08-11
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050170547 - Patel, Satyadev R. ; et al.	2005-08-04
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050170557 - Patel, Satyadev R. ; et al.	2005-08-04
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050170540 - Patel, Satyadev R. ; et al.	2005-08-04
Metod for making a micromechanical device by using a sacrificial substrate App 20050170546 - Patel, Satyadev R. ; et al.	2005-08-04
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050170614 - Patel, Satyadev R. ; et al.	2005-08-04
Spatial light modulators with light blocking/absorbing areas App 20050157376 - Huibers, Andrew G. ; et al.	2005-07-21
Sacrificial layers for use in fabrications of microelectromechanical devices Grant 6,913,942 - Patel , et al. July 5, 2	2005-07-05
Methods for depositing, releasing and packaging microelectromechanical devices on wafer substrates App 20050139940 - Patel, Satyadev R. ; et al.	2005-06-30
Spatial light modulators with light blocking/absorbing areas Grant 6,906,847 - Huibers , et al. June 14, 2	2005-06-14
Method for making a micromechanical device by using a sacrificial substrate Grant 6,900,072 - Patel , et al. May 31, 2	2005-05-31
Micromirror having reduced space between hinge and mirror plate of the micromirror App 20050088719 - Patel, Satyadev R. ; et al.	2005-04-28
Micromirror array having reduced gap between adjacent micromirrors of the micromirror array App 20050088718 - Patel, Satyadev R. ; et al.	2005-04-28
High angle micro-mirrors and processes Grant 6,885,494 - Patel , et al. April 26, 2	2005-04-26
High angle micro-mirrors and processes App 20050078349 - Patel, Satyadev R. ; et al.	2005-04-14
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields Grant 6,873,450 - Patel , et al. March 29, 2	2005-03-29
Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays Grant 6,867,897 - Patel , et al. March 15, 2	2005-03-15
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants App 20050045276 - Patel, Satyadev R. ; et al.	2005-03-03
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050048688 - Patel, Satyadev R. ; et al.	2005-03-03
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20050042792 - Patel, Satyadev R. ; et al.	2005-02-24
Barrier layers for microelectromechanical systems Grant 6,849,471 - Patel , et al. February 1, 2	2005-02-01
Micromirror array device with a small pitch size App 20050018091 - Patel, Satyadev R. ; et al.	2005-01-27
Etching method used in fabrications of microstructures App 20050020089 - Shi, Hongqin ; et al.	2005-01-27
Spatial light modulators with light absorbing areas Grant 6,844,959 - Huibers , et al. January 18, 2	2005-01-18
Multiple hinge MEMS device App 20040233505 - Huibers, Andrew G. ; et al.	2004-11-25
Multilayer hinge structures for micro-mirror arrays in projection displays Grant 6,804,039 - Doan , et al. October 12, 2	2004-10-12
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants Grant 6,800,210 - Patel , et al. October 5, 2	2004-10-05
Barrier Layers For Microelectromechanical Systems App 20040191937 - Patel, Satyadev R. ; et al.	2004-09-30
Novel sacrificial layers for use in fabrications of microelectromechanical devices App 20040191946 - Patel, Satyadev R. ; et al.	2004-09-30
Hinge structures for micro-mirror arrays App 20040156089 - Doan, Jonathan C. ; et al.	2004-08-12
High angle micro-mirrors and processes App 20040156090 - Patel, Satyadev R. ; et al.	2004-08-12
Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays App 20040125347 - Patel, Satyadev R. ; et al.	2004-07-01
Spatial light modulators with light blocking/absorbing areas App 20040100677 - Huibers, Andrew G. ; et al.	2004-05-27
Spatial light modulators with light absorbing areas App 20040100680 - Huibers, Andrew G. ; et al.	2004-05-27
Deflectable micromirrors with stopping mechanisms Grant 6,741,383 - Huibers , et al. May 25, 2	2004-05-25
Apparatus and method for detecting an endpoint in a vapor phase etch App 20040069747 - Patel, Satyadev R. ; et al.	2004-04-15
Methods for forming and releasing microelectromechanical structures App 20040035821 - Doan, Jonathan C. ; et al.	2004-02-26
Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields App 20040008402 - Patel, Satyadev R. ; et al.	2004-01-15
Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates App 20030054588 - Patel, Satyadev R. ; et al.	2003-03-20
Projection system and mirror elements for improved contrast ratio in spatial light modulators Grant 6,523,961 - Ilkov , et al. February 25, 2	2003-02-25
Method for vapor phase etching of silicon App 20020195423 - Patel, Satyadev R. ; et al.	2002-12-26
Deflectable micromirrors with stopping mechanisms App 20020196524 - Huibers, Andrew G. ; et al.	2002-12-26
Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants App 20020197761 - Patel, Satyadev R. ; et al.	2002-12-26
Method for making a micromechanical device by using a sacrificial substrate App 20020132389 - Patel, Satyadev R. ; et al.	2002-09-19
Method for achieving improved selectivity in an etching process App 20020121502 - Patel, Satyadev R. ; et al.	2002-09-05
Projection system and mirror elements for improved contrast ratio in spatial light modulators App 20020024641 - Ilkov, Fedor A. ; et al.	2002-02-28
Fluoride gas etching of silicon with improved selectivity Grant 6,290,864 - Patel , et al. September 18, 2	2001-09-18