Patel; Norein (Narendra)
Patent Applications and Registrations
Patent applications and USPTO patent grants for Patel; Norein (Narendra).The latest application filed is for "monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer".
- Patel; Norein (Narendra) - Narendra
| Patent | Date |
|---|---|
| Monitoring wafer temperature during thermal processing of wafers by measuring sheet resistance of a test wafer Grant 6,033,922 - Rowland , et al. March 7, 2 | 2000-03-07 |
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